SMC Corporation of America
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SMC 10-ARP20K-F02B precision regulator,clean room, ARP PRECISION REGULATOR
Special applications include (10-) clean room compliant, (20-)copper-free, fluorine-free, and (21-) clean room compliant, copper-free, fluorine-free and silicon-free.Direct operated precision regulator, Sensitivity: within 0.2%F.S., 3 types of set pressure allow more freedom in designing a circuit, Repeatability: within ?
https://www.smcpneumatics.com/10-ARP20K-F02B.html
ARP20/30/40, Direct Operated Precision Regulator, Special Applications

The ARP is a modular style, direct operated precision regulator.  A locking adjustment knob allows the pressure to be set, and then locked to prevent accidental setting changes. The ARP20/30/40 series is available with a backflow function that exhausts the air pressure in the outlet side reliably and quickly

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https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://partbuilder.smcpneumatics.com/product-search-results/10-ARP20K-F02B

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PDF Icon How To Order: Series ARP20 to ARP40 10- 10- 21- 21- Direct฀Operated฀Precision฀Regulator Series ARP20K to ARP40K 10- 10- Direct฀Operated฀Precision 21- 21- Regulator฀with฀Backflow฀Function

https://partbuilder.smcpneumatics.com/hto_pdf/10_ARP.pdf
PDF Icon Catalog: Direct Operated Precision Regulator/Modular Style ARP20 to ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style ARP20K to ARP40K Regulator JIS symbol Regulator with backflow function

https://www.smcpneumatics.com/pdfs/ARP_3018A.pdf
ARP20/30/40, Direct Operated Precision Regulator, Special Applications

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https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://inventory.partbuilder.smcpneumatics.com/vona2/detail/332000160692/?Tab=codeList&curSearch={"seriesCode":"332000160692","stockItemFlag":"1"}
PDF Icon Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

switch 5 to 50C (No freezing) (Ex.)10-ARP30-02BE1 Bleed type Construction 0.2 0.5 Weight (kg) Note 3) 0.3 Note 1) When a product with backflow function (10-ARP20K to 40K) is chosen, set the inlet pressure 0.05 MPa or higher than the set pressure.

https://www.smcpneumatics.com/pdfs/cleanarp.pdf
PDF Icon Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

switch 5 to 50C (No freezing) (Ex.)10-ARP30-02BE1 Bleed type Construction 0.2 0.5 Weight (kg) Note 3) 0.3 Note 1) When a product with backflow function (10-ARP20K to 40K) is chosen, set the inlet pressure 0.05 MPa or higher than the set pressure.

https://www.smcpneumatics.com/pdfs/10_arp.pdf