SMC's CQS clean room, compact air cylinder has 4 bore sizes. Standard strokes range from 5 to 50mm. 10/11-C(D)QS series, available for clean environment, prevents particle generation in a clean room. 21/22-C(D)QS series offers the same structure as the clean series, and are for the environment in which the use of copper, fluorine and silicon are restricted. The
Catalog: Compact Cylinder Series CQS Cylinder (Tube) Inner Diameter(φ): 16, Stroke(mm): 5, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: [Block Shape] Plate Cylinder, Additional Function: Standard, Environment, Applications: Clean Room, Operating Temperature(°C): -, End Locking: No, Valves: No, Operating Pressure(MPa): 0.07 to 1, Specification: Built-in magnet,
Clean Series: 11 (Vacuum Suction Type), Magnet: D (Built-in), Bore Size: 16mm, Stroke: 5mm, Rod End Thread: M (Male), Auto Switch: M9NV--Solid State, Gen. Purpose, 3 Wire NPN, Vertical