
SMC's CQS clean room, compact air cylinder has 4 bore sizes. Standard strokes range from 5 to 50mm. 10/11-C(D)QS series, available for clean environment, prevents particle generation in a clean room. 21/22-C(D)QS series offers the same structure as the clean series, and are for the environment in which the use of copper, fluorine and silicon are restricted. The 
CQSB20-30D CQSB20-35D CQSB20-40D CQSB20-45D CQSB20-50D CQSB20-75DC CQSB20-100DC CQSB20-125DC CQSB20-150DC CQSB20-175DC CQSB20-200DC CQSB25-5D CQSB20-10D CQSB20-15D CQSB20-20D CQSB20-25D CQSB20-30D CQSB20-35D CQSB20-40D CQSB20-45D CQSB20-50D CQSB20-75DC CQSB20-100DC CQSB20-125DC CQSB20-150DC CQSB20-175DC CQSB20-200DC CQSB20-250DC CQSB20-300DC 50 55 60 65 70 25 30 35 40 45 50 M5 x 50l x 55l
CQSB20-PS 20 CQSB25-PS 25 Seal kits consist of items !3, !4 and !
Copper, fluorine and silicone-free + Low particulate generation Action 21 22 Relief type Vacuum suction type D Double acting Rod end thread Nil M Standard (Rod end female thread) Rod end male thread Model Model Bore size (mm) Port size Relief port Action Standard stroke (mm) 10-/21-CQSB12 10-/21-CQSB16 10-/21-CQSB20 10-/21-CQSB25 11-/22-CQSB12 11-/22-CQSB16 11-/22-CQSB20 11-/22-CQSB25 12