
Series AZ is an ultra high purity (UHP)diaphragm valve for gas delivery in semiconductor and other clean industries. This series is available in air operated.
10-9 Pam3/s 1) Ra 10in. (0.25 m) Face seal, Tube weld 60 to 110 psig (0.4 to 0.76 MPa) M5 x 0.8 Top Bottom mount 0.06 in3 (1.07 cm3) 0.24 kg 2) Leak rate Across the seat leak Surface finish Connections Actuation pressure Actuation port connection Actuation port location Installation Internal volume Weight 1) Tested with Helium gas inlet pressure 125 psig (0.9 MPa). 2) Weight for AZ3542S2PMV4MV4