SMC Corporation of America
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Search Results "AZ3652S2PMV4MV4"
This is a legacy product. Please contact us for the latest version.sales@ocaire.com AP TECH REGULATORS and VALVES. 1/4 DIAPHRAGM VALVE. AIRLINE EQUIPMENT. AP TECH 1/4 INCH ALL OTHERS. .00000 lb. DX.

Series AZ is an ultra high purity (UHP) diaphragm valve for gas delivery in semiconductor and other clean industries.  This series is available in manually operated.

  • Cleaned for high purity semiconductor applications
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leakage 2 x 10-11 Pam3/s 2 x 10-10 Pam3/s 1) 4 x 10-9 Pam3/s 1) Ra 10 in.(0.25 m) Face seal, Tube weld Bottom mount 0.06 in3 (1.07 cm3) 0.22 kg 2) Leak rate Across the seat leak Surface finish Connections Installation Internal volume Weight Knob 1/4 turn indicating round knob with a raised rectangular section 1) Tested with Helium gas inlet pressure 125 psig (0.9 MPa). 2) Weight for AZ3652S2PMV4MV4