Series AZ is an ultra high purity (UHP) diaphragm valve for gas delivery in semiconductor and other clean industries. This series is available in manually operated.
leakage 2 x 10-11 Pam3/s 2 x 10-10 Pam3/s 1) 4 x 10-9 Pam3/s 1) Ra 10 in.(0.25 m) Face seal, Tube weld Bottom mount 0.06 in3 (1.07 cm3) 0.22 kg 2) Leak rate Across the seat leak Surface finish Connections Installation Internal volume Weight Knob 1/4 turn indicating round knob with a raised rectangular section 1) Tested with Helium gas inlet pressure 125 psig (0.9 MPa). 2) Weight for AZ3652S2PMV4MV4