High precision, low flow consumption, stainless steel regulator SRP has excellent corrosion resistance. SUS316 is used for all metal parts in contact with the fluid. Consistent clean room production is achieved by cleaning, assembling, inspecting, and sealing in double packaging in a class 10,000 environment.
How To Order: Precision Clean Regulator SRP Series Fluid consumption l/min (ANR) Note 1) Sensitivity 0.5 or less 0.3% of full span 1% of full span Repeatability Metal SUS316 Resin Fluororesin Fluid-contact parts Rubber Fluoro rubber Ceramics Other Clean room class 10 Assembly environment HCFC141b ultrasonic cleaning of all fluid-contact parts Parts cleaning Note 1) At set pressure of 0.2MPa 1 Series SRP Flow Characteristics Fluid: Air SRP1101
Fluid consumption l/min (ANR) Note 1) Sensitivity 0.5 or less 0.3% of full span 1% of full span Repeatability Metal SUS316 Resin Fluororesin Fluid-contact parts Rubber Fluoro rubber Ceramics Other Clean room class 10 Assembly environment HCFC141b ultrasonic cleaning of all fluid-contact parts Parts cleaning Note 1) At set pressure of 0.2MPa 1 Series SRP Flow Characteristics Fluid: Air SRP1101
-M5 Conditions/Upstream pressure: 0.5MPa SRP1-M5 Conditions/Upstream pressure: 0.7MPa 0.25 0.50 0.20 0.40 Downstream pressure MPa Downstream pressure MPa 0.15 0.30 0.10 0.20 0.05 0.10 0.00 0.00 0 20 40 60 80 100 120 140 0 10 20 30 40 50 60 70 80 90 100 Flow rate l/min (ANR) Flow rate l/min (ANR) SRP1-01 SRP1101-01 Conditions/Upstream pressure: 0.5MPa Conditions/Upstream pressure: 0.7MPa 0.25