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SMC XLD-40 high vacuum valve, XLD HIGH VACUUM VALVE***

Part Number Description: HIGH VACUUM VALVE Product Line: Z Product Line Description: VACUUM SERIES Family Code: 683 Family Description: XLD HIGH VACUUM VALVE Class Code: 2X Part Code: 1 Reference Code: L PDF Documentation: Datasheet Click here to report information errorImage shown may not match exact part number

https://www.smcpneumatics.com/XLD-40.html

XLD, Aluminum High Vacuum Angle Valve, Air Operated

High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.

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Operations Manual: High Vacuum L Type Valve

https://smccatalog.partbuilder.smcpneumatics.com/dl_catalogs/assets/manual/en-jp/files/XLD-E.pdf

Aluminum High Vacuum Angle Valve, 2-Step Control, Single Acting / Bellows Seal, O-Ring Seal, XLD Series

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Valve Type: XLD (Smooth Exhaust, Normally Closed, Bellows, O-ring Seal), Flange Size: 40, Flange Type: KF(NW), Port Direction: w/o Indicator, Flange Side; Std.

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Valve Type: XLD (Smooth Exhaust, Normally Closed, Bellows, O-ring Seal), Flange Size: 40, Flange Type: KF(NW), Port Direction: L (w/o Indicator, Rear Flange Surface; Std.

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://partbuilder.smcpneumatics.com/product-search-results/XLD-40LH0-XQ1A

Valve Type: XLD (Smooth Exhaust, Normally Closed, Bellows, O-ring Seal), Flange Size: 40, Flange Type: KF(NW), Port Direction: L (w/o Indicator, Rear Flange Surface; Std.

https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://partbuilder.smcpneumatics.com/product-search-results/XLD-40LH0-XR3A