High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.
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Operations Manual: High Vacuum L Type Valve Valve Type: XLD (Smooth Exhaust, Normally Closed, Bellows, O-ring Seal), Flange Size: 40, Flange Type: KF(NW), Port Direction: K (w/o Indicator, Left Flange Surface; Std. Indicator, Left Flange Surface)
Valve Type: Smooth Exhaust, Normally Closed, Bellows, O-ring Seal, Flange Size: 40, Flange Type: KF(NW), Port Direction: w/o Indicator, Left Flange Surface; Std. Indicator, Left Flange Surface, Temperature: -, Auto Switch: -, Lead Wire: -, Number: -, Non-standard Indicator: -, Body Surface Treatment: -, Seal Material: -, Seal Replacement: -
Note 9) Refer to SMC catalog CAT.ES100-42 for detailed specifications and instructions of digital pressure switch. 14-2-73 74 Filter Regulator with Back Flow Mechanism Series AW20K/30K/40K How to Order AW 30 03 BE K F 1N Option Filter regulator Applicable model AW20K to 40K AW20K to 40K AW20K to 40K AW30K/40K AW20K AW30K/40K AW20K to 40K AW20K to 40K AW30K/40K AW20K to 40K Symbol 1 2 6 8