High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.
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Operations Manual: High Vacuum L Type Valve AC Lead wire length (m) Load voltage DC Auto switch model Special function Electrical entry Indicator light Wiring (Output) Pre-wired connector Applicable load Type In-line Perpendicular 0.5 (Nil) 1 (M) 3 (L) 5 (Z) M9NV M9PV M9BV M9NWV M9PWV M9BWV M9NAV M9PAV M9BAV M9N M9P M9B M9NW M9PW M9BW M9NA M9PA M9BA 5 V, 12 V 3-wire (NPN) 3-wire (PNP) IC circuit Solid state switch 12 V 2-wire 3-wire
Model/Specifications MHT2-32D MHT2-40D MHT2-50D MHT2-63D Model Bore size (mm) Applicable auto switch Bracket no.
M50.8 4.3 MHS3 MHSJ3-63D MHSH(J)3-63D M61 7.3 MHSJ3-80D MHSH(J)3-80D M61 7.3 Nm MHS3-16D M30.5 0.88 20D M30.5 0.88 25D M40.7 2.1 32D M40.7 2.1 40D M50.8 4.3 50D M50.8 4.3 63D M61 7.3 80D M61 7.3 MHSH(J)3 100D M81.25 18 125D M101.5 36 Nm MHS4 MHSH(J)3-32DA MHSH(J)3-32DB M40.7 2.1 Nm MHSH(J)3-40DA MHSH(J)3-40DB M40.7 2.1 MHS4-16D M30.5 0.88 MHSH(J)3-50DA MHSH(J)3-50DB M50.8 4.3 20D M30.5