High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.
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Operations Manual: High Vacuum L Type Valve Valve Type: XLD (Smooth Exhaust, Normally Closed, Bellows, O-ring Seal), Flange Size: 63, Flange Type: D [K(DN)], Port Direction: w/o Indicator, Flange Side; Std. Indicator, Flange Side, Temperature: 5 to 60°C, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire: Z (5m), Number: A (2pcs, Valve Open/Closed)
Valve Type: Smooth Exhaust, Normally Closed, Bellows, O-ring Seal, Flange Size: 63, Flange Type: D [K(DN)], Port Direction: w/o Indicator, Flange Side; Std. Indicator, Flange Side, Temperature: 5 to 60°C, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire: 5m, Number: 2pcs, Valve Open/Closed, Non-standard Indicator: -, Body Surface Treatment: -, Seal Material:
HIGH VACUUM VALVE, XL, HIGH VACUUM VALVE, 0.00000 lb