High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.
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Operations Manual: XLDV Series Similar items in stock.
75l x 80l x 85l x 120l x 145l M5 x 35l x 40l x 45l x 50l x 55l x 60l x 65l x 70l x 75l x 80l x 115l x 140l M6 x 45l x 50l x 55l x 60l x 65l x 70l x 75l x 80l x 85l x 120l x 145l M8 x 50l x 55l x 60l x 65l x 70l x 75l x 80l x 85l x 90l x 125l x 150l M5 x 35l x 40l x 45l x 50l x 55l x 60l x 65l x 70l x 75l x 80l x 115l x 140l M6 x 45l x 50l x 55l x 60l x 65l x 70l x 75l x 80l x 85l x 120l
75l x 80l x 85l x 120l x 145l M5 x 35l x 40l x 45l x 50l x 55l x 60l x 65l x 70l x 75l x 80l x 115l x 140l M6 x 45l x 50l x 55l x 60l x 65l x 70l x 75l x 80l x 85l x 120l x 145l M8 x 50l x 55l x 60l x 65l x 70l x 75l x 80l x 85l x 90l x 125l x 150l M5 x 35l x 40l x 45l x 50l x 55l x 60l x 65l x 70l x 75l x 80l x 115l x 140l M6 x 45l x 50l x 55l x 60l x 65l x 70l x 75l x 80l x 85l x 120l
(P) (Pressure port) 50 Main exhaust solenoid valve 50 XLDV-40 to 160/With solenoid valve C (KF flange) (K flange) Fd Fn C XLA XL XL M M5 Port 3(R) (Exhaust port) Auto switch (Option) XLQ K XM XY Initial exhaust solenoid valve N 5.5 DXSA B G Main exhaust solenoid valve XVD M5 Port 1(P) (Pressure port) A XGT CYV 8.5 8.5 A (mm) Model A B C Fn G M N Fd K XLDV-40 XLDV-50 XLDV-63 XLDV-80 XLDV-100