
High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.
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CDP-5A 18 0.050 0.093 76.5 5 Polished round 18 66.5 4 4 x 25l 100 CDP-6A 80 20 0.065 0.117 83 5 Polished round 20 73 4 4 x 30l CDP-7A 100 25 0.065 0.117 88 5 Polished round 24 78 4 4 x 36l Cotter pin and flat washer are included.
Avoid applications in which two or more end lock cylinders are synchronized to move one workpiece, as one of the cylinder locks may not be able to release when required. 4.9N 2 20, 25, 32 M2.5 x 0.45 x 25L or more M3 x 0.5 x 30L or more 40 10N 3 6. Use a speed controller with meter-out control. Lock cannot be released occasionally by meter-in control.
Bore size (mm) Thread size Pulling force N Stroke (mm) 16 M2.5 x 0.45 x 25L or more 4.9 2 Bolt should be detached under normal operation, otherwise it may cause malfunction of the locking feature. Rubber cap 447 Air Cylinder: With End Lock Series CBJ2 Construction (Not able to disassemble) Head end lock !3 !1 Air Cylinders !6 !7 e !5 o !0 i !2 !8 u CJ2 w CM2 CG1 @0 !9 t !