High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.
Operations Manual: High Vacuum L Type Valve Similar items in stock.
Fluid Air Operating pressure range 0.2 to 0.5MPa Internal pilot type Ambient and fluid temperature 5 to 50C Response time (for 0.5MPa) Note 1) 25ms or less Maximum operating frequency 5Hz Manual operation Non-locking push type, Push-turn slotted locking type Pilot valve individual exhaust type, Main valve/pilot valve common exhaust With vacuum pressure gauge Pilot exhaust type Lubrication
Flange Size: -, Flange Type: -, Port Direction: -, Temperature: -, Version: -, Auto Switch: -, Lead Wire: -, Number: -, Non-standard Indicator: -, Body Surface Treatment: -, Seal Material: -, Seal Replacement: -
Look up from the 5Hz switching cycle to find the intersection with SUP=0.35MPa. 2. From the point just found, draw a line to the Y-axis to find the air consumption. The result is approximately 9l/min (ANR). 1 0 2 3 4 5 6 7 8 9 10 Cycle (Hz) Caution 1. These flow rate characteristics are for fresh water (viscosity 1mPas, specific gravity 1.0). 2.