SMC Corporation of America
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Search Results "XLFV-63K-3H"
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High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.

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Note IDG1 IDG5, 5H IDG10, 10H IDG20, 20H IDG3, 3H Body Brass Aluminum alloy 1 Platinum silver coated (IDG1 is electroless nickel plated.) Female connector Brass 2 Electroless nickel plated Strainer Brass 3 Case 4 Resin Orifice Resin Stainless steel 5 Silencer Bronze 6 Replacement Parts Part no. IDG1 IDG3H IDG5 IDG5H IDG10 IDG10H IDG20 IDG20H No.

Note IDG1 IDG5/5H IDG10/10H IDG20/20H IDG3/3H q w e r t y Aluminum alloy Copper alloy Body Platinum silver coated (IDG1 is electroless nickel plated.) Copper alloy Female connector Electroless nickel plated Copper alloy Strainer Case Resin Stainless steel Resin Orifice IDG3H is resin. Copper alloy Silencer Replacement Parts Part no. No.

Note IDG1 IDG5/5H IDG10/10H IDG20/20H IDG3/3H q w e r t y Aluminum alloy Copper alloy Body Platinum silver coated (IDG1 is electroless nickel plated.) Copper alloy Female connector Electroless nickel plated Copper alloy Strainer Case Resin Stainless steel Resin Orifice IDG3H is resin. Copper alloy Silencer Replacement Parts Part no. No.