High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.
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Operations Manual: High Vacuum L Type Valve Flange Size: 16mm, Heater: None, Non-standard Indicator: X (Non-standard Indicator), Body Surface Treatment: A (External: Hard Anodized; Internal: Oxalic Acid Anodized)
Type: Manual Vacuum Valve, Application: Single Item Operating, Installation Method: Direct, Number of Ports: 2-Port Valve, Switching Type: 2-Position Normally Closed, Piping Opening: Flange, Flange Type: KF, Flange Size Nominal: 16, Seal Type: Bellows Seal, Sonic Conductance: 5L/S, Seal Material: FKM 1349-80, Amount of leakage(Pa·m3/s): Internal: 1.3 × 10-10, External
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