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SMC 10-ARP20-N01B-Z precision regulator,clean room, REGULATOR, PRECISION
The ARP20/30/40 series is available with a back flow function that exhausts the air pressure in the outlet side reliably and quickly. 
https://www.smcpneumatics.com/10-ARP20-N01B-Z.html
ARP20/30/40, Direct Operated Precision Regulator, Special Applications

The ARP is a modular style, direct operated precision regulator.  A locking adjustment knob allows the pressure to be set, and then locked to prevent accidental setting changes. The ARP20/30/40 series is available with a backflow function that exhausts the air pressure in the outlet side reliably and quickly

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PDF Icon How To Order: Series ARP20 to ARP40 10- 10- 21- 21- Direct฀Operated฀Precision฀Regulator Series ARP20K to ARP40K 10- 10- Direct฀Operated฀Precision 21- 21- Regulator฀with฀Backflow฀Function

https://partbuilder.smcpneumatics.com/hto_pdf/10_ARP.pdf
PDF Icon Catalog: Direct Operated Precision Regulator/Modular Style ARP20 to ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style ARP20K to ARP40K Regulator JIS symbol Regulator with backflow function

https://www.smcpneumatics.com/pdfs/ARP_3018A.pdf
ARP20/30/40, Direct Operated Precision Regulator, Special Applications

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https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://inventory.partbuilder.smcpneumatics.com/vona2/detail/332000160692/?Tab=codeList&curSearch={"seriesCode":"332000160692","stockItemFlag":"1"}
PDF Icon Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

Direct Operated Precision Regulator/Modular Style (For Special Applications) -ARP20 to -ARP40 10 20 21 10 20 21 JIS symbol Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) Regulator with backflow function Regulator -ARP20K to -ARP40K 10 20 21 10 20 21 Clean room compliant (10-ARP). Copper-free, fluorine-free (20-ARP).

https://www.smcpneumatics.com/pdfs/arp_3018b.pdf
PDF Icon Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

Note 8) : Combination available for options : E1, E2, E3, E4. 1094 Direct Operated Precision Regulator Series ARP20 to ARP40 10211021Direct Operated Precision Regulator with Backflow Function Series ARP20K to ARP40K 10211021Specifications Model 10-ARP20 (K) 10-ARP30 (K) 10-ARP40 (K) 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 Port size Air Fluid 1.2 MPa Proof pressure 0.7 MPa Maximum operating pressure

https://www.smcpneumatics.com/pdfs/cleanarp.pdf