Clean series 10-AW filter regulators have fluorine grease, are assembled and inspected in a workshop, and have clean packaging (products are sealed in anti-static double bags after the surface has been blown with clean air). The 10-AW series has a particle generation grade of 1, and is available with port sizes from
Optional specifications Model AW20(K)-B AW30(K)-B AW40(K)-B AW40(K)-06-B AW60(K)-B Bracket assembly Note 1) AW23P-270AS AR33P-270AS AR43P-270AS AW62P-270AS Set nut AR23P-260S AR33P-260S AR43P-260S Note 2) Round type Note 3) Standard G36-10-01 G46-10-01 0.02 to 0.2 MPa setting G36-4-01 G46-4-01 (with color zone) Standard G36-10-01-L G46-10-01-L 0.02 to 0.2 MPa setting G36-4-01-L G46-4-01-
B A MXS6 MXS8 MXS12 MXS16 MXS20 MXS25 Dimension A 3.2 mm or less Dimension B 5 mm 3.6 mm or less 6 mm 8 mm 10 mm MXQ6 MXQ8 MXQ12 MXQ16 MXQ20 MXQ25 Dimension A 3.2 mm or less Dimension B 5 mm 3.6 mm or less 6 mm 8 mm 10 mm 320 Series MXS/MXQ/MXQR Replacement Procedure of Seal 3 1-9. Remove the seal support. 1-10. Remove the rod cover assembly. 1-11.