High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.
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Operations Manual: High Vacuum L Type Valve Check the SpeedWork Load Graph on page 75. 73 Model Selection LEYG Series Battery-less Absolute (Step Motor 24 VDC) Moment Load Graph Horizontal Mounting, Sliding Bearing LEFS LEFB LEY LEYG LESYH LES LESH LEHF LER JXC51/61 JXC 1 t L = 50 mm y L = 100 mm 10 10 LEYG32M E/40M E LEYG32M E/40M E LEYG32M E/40M E LEYG32M E/40M E Load mass m [kg] Load mass m [kg] LEYG25M E LEYG25M E LEYG25M E LEYG25M
XLD-63 XLD-80 XLD-25 XLD-40 XLD-50 XLD-100 XLD-160 0.08 Nm 0.3 Nm 6-3.S S S S 6-4.M M M S 6-5./ S M S M 12 XL-OMY0002 7.
-25 XLD-40 XLD-50 XLD-63 XLD-80 12 11 11 11 11 41 63 68 72 98 95 110 Note 1) Dimension E applies when heater option is included.