High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.
XLF is
1 Valve mounting screw falling-out-prevention type EX600 Series Standard (Valve mounting screw not falling-out-prevention type) VM SY30V-16A-1 SY30V-16AR-1 SY50V-16A-1 SY50V-16AR-1 SY70V-16A-1 SY70V-16AR-1 SY30V-16A SY30V-16AR SY50V-16A SY50V-16AR SY70V-16A SY70V-16AR Internal pilot External pilot Internal pilot External pilot Internal pilot External pilot SY3000 XT34 SY5000 SY7000 The part
Applicable rod end nut A L1 H1 H A L1 H1 H2 H I type single knuckle I-12A I-14A I-16A Y type double knuckle Y-12A Y-14A Y-16A I type single knuckle I-12A I-14A I-16A Y type double knuckle Y-12A Y-14A Y-16A 125 140 160 125 140 160 NT-12 NT-12 NT-16 110 50 3.5 100 156.5 125 65 100 181 18 110 50 3.5 105 161.5 125 65 105 186 18 120 56 3.5 110 170.5 140 76 110 198 21 Symbol -XC87 Cylinder with
Description Material Special resin Seal belt MY16-16A-Stroke MY20-16A-Stroke MY25-16A-Stroke MY32-16A-Stroke MY40-16A-Stroke MY50-16A-Stroke MY63-16A-Stroke 1 !6 Stainless steel NBR NBR NBR NBR NBR NBR MY16-16B-Stroke MY20-16B-Stroke MY25-16B-Stroke MY32-16B-Stroke MY40-16B-Stroke MY50-16B-Stroke MY63-16B-Stroke 1 Dust seal band !
6 @1 @2 @3 @4 @5 @6 @7 @9 #0 #1 #2 #3 #5 #6 #7 #8 #9 $0 $1 $4 $5 $6 $7 $8 %0 %1 %3 %4 %5 %6 %7 %8 %9 ^1 ^2 ^3 ^4 ^5 ^6 ^8 Seal belt Dust seal band Scraper Piston seal Cushion seal Tube gasket O-ring O-ring O-ring O-ring O-ring Connector guide O-ring O-ring Special resin MY40-16A-stroke MY32-16A-stroke MY25-16A-stroke Stainless steel NBR NBR NBR NBR NBR NBR NBR NBR NBR NBR NBR NBR MY40-16B-stroke
Symbol Specifications Change of rod end shape Special port location Made of stainless steel -XA -XC3 Mounting bracket Description (when ordering a minimum number) Bore size (mm) Minimum order 20 25 32 40 -XC6 Axial foot -XC9 2 CM-L020B CM-L032B Foot 2 pcs., Mounting nut 1 pc.