High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.
Operations Manual: High Vacuum L Type Valve Similar items in stock.
SY114-5GZ Blanking plate assembly SY100-77-1A R P Manifold base (5 stations) SS3Y1-S41-05-M5 SS3Y1-S41-05-M5 1 set (Type S41, 5 station manifold part number) SY100-77-1A 1 set (Blanking plate assembly part number) SY114-5GZ 4 sets (Valve) The asterisk denotes the symbol for assembly. Prefix it to the part nos. of the solenoid valve, etc.
SY114-5GZ Blanking plate assembly SY100-77-1A R P Manifold base (5 stations) SS3Y1-S41-05-M5 SS3Y1-S41-05-M5 1 set (Type S41, 5 station manifold part number) SY100-77-1A 1 set (Blanking plate assembly part number) SY114-5GZ 4 sets (Valve) The asterisk denotes the symbol for assembly. Prefix it to the part nos. of the solenoid valve, etc.
V114-5GZ VS VFN 2 1 3 2 Blank plate assembly V100-77-1A Manifold base (5 stations) VV100-S41-05-M5 VV100-S41-05-M5 1 set (Type S41, 5 station manifold base part no.) V100-77-1A 1 set (Blank plate assembly number) V114-5GZ 4 sets (Valve) To order valves and options mounted onto the manifold at the factory, list the valve/option with an asterisk () in front of each part number.