High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.
- High
Operations Manual: High Vacuum L Type Valve Flange Size: 25mm, Heater: None, Non-standard Indicator: X (Non-standard Indicator), Body Surface Treatment: External: Hard Anodized; Internal: Raw Material, Seal Material: N1 [EPDM (2101-80)], Seal Replacement: A (Valve Seal, Exterior Seal)
Flange Size: 25mm, Heater: None, Non-standard Indicator: Non-standard Indicator, Body Surface Treatment: External: Hard Anodized; Internal: Raw Material, Seal Material: N1 [EPDM (2101-80)], Seal Replacement: Valve Seal, Exterior Seal
Flange Size: 25mm, Heater: 5 to 150°C, with 100°C at 100VAC, 120°C at 200VAC Heater