High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.
Operations Manual: High Vacuum L Type Valve Specifications Table 1 Valve specifications Table 2 Power/ Current With rated voltage applied Model XLS-16 XLS-25 XLS-16-P*G XLS-25-P*G Flange (valve) size 16 25 16 25 Actuating type Normally closed (N.C.)
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Mounting bolt Mounting bolt Spring Return Spring Extend Model C Mounting bolt Model C Mounting bolt D 25 30 25 30 25 30 30 35 30 35 35 40 45 55 D 25 30 25 30 25 30 30 35 30 35 35 40 45 55 CQ2B12-5S -10S CQ2B16-5S -10S CQ2B20-5S -10S CQ2B25-5S -10S CQ2B32-5S -10S CQ2B40-5S -10S CQ2B50-10S -20S CQ2B12-5T -10T CQ2B16-5T -10T CQ2B20-5T -10T CQ2B25-5T -10T CQ2B32-5T -10T CQ2B40-5T -10T CQ2B50-
55 l CQP2B12-5T -10T CQP2B16-5T -10T CQP2B20-5T -10T CQP2B25-5T -10T CQP2B32-5T -10T CQP2B40-5T -10T CQP2B50-10T -20T 6.5 5 7.5 9.5 9 7.5 12.5 2.3-92 Compact Cylinder/Axial Piping: Single Acting Single Rod Series CQP2 Construction CU CQS CQ2 Replacement Parts: Seal Kits Component Parts No. q w Note Hard anodized Chromated 12 to 25 32 to 50, Hard chrome plated 12 to 40, Anodized 50, Chromated