Operations Manual: XMD/XYD Series L1 L2 XMD-25 50 123 48 1 40 26 41 16 7.5 XMD-40 65 170 66 2 55 70 41 63 20 15 P.C.D 58.7 6x6.6 XMD-50 70 183 79 2 75 52 68 20 17.5 XMD-63 88 217 100 3 87 95 114 70 72 20 19.5 P.C.D 92.1 8x 8.4 XMD-80 90 256 117 3 114 110 83 98 20 26.5 D G C C K J H B Fd (K Flange) 45 Fn (KF Flange) A E Unit: mm Model A B C D E Fn Fd G H J K XYD-25 100.2 86.7 48 1 23.5 40 26 66 16 7.5 XYD-40 130 114 66 2 38
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XMD-25-M9NA-XN1A The material used in the sliding part of the S-valve is: FKM : Produced by Mitsubishi Cable Industries, Ltd. 488 Stainless steel High Vacuum Angle/In-line Valve XMD, XYD Series Specifications XMD-40 XYD-40 XMD-50 XYD-50 XMD-63 XYD-63 XMD-80 XYD-80 XMD-25 XYD-25 Model Flange (Valve) size 25 40, CF070 50 63, CF114 80 Valve type Normally closed (Pressurize to open, spring seal
XMD-25-M9NA-XN1A The material used in the sliding part of the S-valve is: FKM : Produced by Mitsubishi Cable Industries, Ltd. 7 Series XMD, XYD Specifications XMD-25 XYD-25 XMD-40 XYD-40 XMD-50 XYD-50 XMD-63 XYD-63 XMD-80 XYD-80 Model Flange (valve) size 25 40, CF070 50 63, CF114 80 Valve type Normally closed (Pressurize to open, spring seal) [both main & initial exhaust valves] Fluid Inactive
Valve Type: XMD (Angle Type, 2 Stage Control, Single Acting, Bellows, O-ring Seal), Flange Size: 25, Flange Type: KF (NW), Port Direction: w/o Ind. or w/Std.Ind.,FlangeSide; w/o Ind or w/Std.