VCA

Thread type Rc G NPT NPTF Nil F N T Stations 02 : 10 2 stations : 10 stations D side U side 1 2 3 4 5 How to Order Valves (VCA30/40) VC A 5 1 G 3 4 03 For air Thread type Rc G NPT NPTF Nil F N T Series 3 4 Class 3 Class 4 Port size (OUT) 5 N.C. for manifold Valve type Symbol 03 04 06 Class 3 Port size 3/8 (10A) 1/2 (15A) 3/4 (20A) Class 4 Fluid General air Dry air Nil A Orifice size Orifice

HRX-OM-R005

0.7 70 0.6 60 Circulating fluid pressure[MPa] 0.5 50 Pump head[m] Availavel area 0.4 40 Outlet60Hz 0.3 30 Outlet50Hz 0.2 20 0.1 10 Return port Availavel area 0.0 0 10 20 30 40 Circulating fluid flow[L/min] Fig. 9-7 Pump capacity(HRS060--20-(BJM)) 9.7 Required facility water flow (For water-cooled type) 30 Facility water flow rate[L/min] 25 20 15 10 5 0 0 10 20 30 40 50 Facility water inlet

Vacuum Pad: Ball Joint Type

B8 01 10 13 16 20 25 32 ZPT F-B5 (Without buffer/Female thread) ZPT F(Without buffer/Female thread) Hexagon width across flats P N M5 x 0.8 Hexagon width across flats 8 NL 5 Y Hexagon width across flats 12 Hexagon width across flats 10 F Hexagon width across flats 3 F Hexagon width across flats 2 D 3 D C C 2 2 A A B B Dimensions Dimensions (mm) (mm) N: 1/8 (Rc, NPT, NPTF) A B C D F Y N:

Air Pilot Operated Series NVSA

>Aiv EJ E) =:-:H8 I 10 l 1 I : i/b.a $n a ltfllon!. @nl6l t dory. DITENSIONS A B c D E F o H J t( T N o P B s r u 3.43 (87) 2.

VCA

) Formulas VV2CA3 Side ported: L1 = n x 35 + 33, L2 = n x 35 + 44 Front ported: L1 = n x 35 + 69, L2 = n x 35 + 80 VV2CA4 Side ported: L1 = n x 41 + 35, L2 = n x 41 + 46 Front ported: L1 = n x 41 + 79, L2 = n x 41 + 90 n (stations) PB IN port direction Model Dimensions 9 348 359 384 395 404 415 448 459 8 313 324 349 360 363 374 407 418 10 383 394 419 430 445 456 489 500 6 243 254 279 290

One-touch Fittings

[mm] Model 1 D1 Weight [g] X (X) Y X (X) Y Nylon Urethane a b 4 6 KQ2T04-06A1 10.4 7.7 10 8.2 9.7 12 15.3 16.3 19.4 13.3 13.3 5.7 6.8 6 3.2 7.1 6.6 3 3.3 Q2 Q2 Oval type Round type Applicable tubing b 8 to 16 4, 6 6 8 KQ2T06-08A1 13.2 9.7 12 10.4 13 17.2 17.3 22.4 14.2 13.3 7.3 8.4 8 4.2 16.4 16.4 4.5 5.3 2 x N L3 L1 M1 Q1 Q1 8 10 KQ2T08-10A 15.9 15.6 13.2 13 19.6 19.2 26.2 15.6 14.2 8.4

Rubber seal 5 Port Solenoid Valve Series SYJ7000

Type 21P (5 Port/Body ported) How to Order SS5YJ721P 05 A, B port Applicable blanking plate assembly SYJ7000-21-3A A B P, R port thread type A B Stations A B A B P port 1/4 03 3 stations Nil F N T Rc G NPT NPTF : : Applicable connector assembly Refer to page 59. 12 12 stations R port 1/4 Note) For more than 10 stations, supply air to both sides of P port and exhaust air from both sides of

VXP21/22/23

Model/Valve Specifications Av x 10-6m2 Cv converted C [dm 3/(sbar)] b Cv Water, Oil, Steam Air Flow characteristics Maximum operating pressure differential (MPa) Min. operating pressure differential (MPa) 10 10 15 10 15 20 Connection Orifice Max. system pressure (MPa) Weight (g) Model Water AC DC AC DC AC DC AC Air Oil Steam size (mm) Thread VXP2130-02 0.7 0.7 1.0 0.7 1.0 1.0 1 4 740 500

Soft Start-up Valve

Unit Series AV2000-A AV3000-A AV4000-A AV5000-A Spacer Y200-A Y300-A Y400-A Y600-A Spacer with bracket Y200T-A Y300T-A Y400T-A Y600T-A Applicable model AC20-A AC20-B AC25-A, AC30-A AC25-B, AC30-B AC40-A*1 AC40-B*1 AC50-B, AC55-B AC60-B *1 Except port size 06 Assembly Example eSpacer with bracket qSoft start-up valve Air combination wAC30-03G-A Assembly example Products do not come assembled

Digital Flow Switches

specification Nil N F Rc NPT G Nil N Lead wire with connector 3m Without lead wire Port size Applicable models Flow rate (l/min) Port size Symbol 40 100 4 16 03 04 06 10 3/8 1/2 3/4 1 PF2W504, PF2W520 PF2W520, PF2W540 PF2W540, PF2W511 PF2W511 Specifications PF2W504 PF2W520 PF2W540 PF2W511 Model Measured fluid Water Detection type Karman vortex 0.5 to 4l/min 2 to 16l/min 5 to 40l/min 10

C95

D-F5BAL D-F5 D-J5 D-A5/D-A6 D-A59W D-F5NTL Bore size Bore size (mm) (mm) A Ht B Hs A Ht Hs A B A B A B B 10.5 24.5 0 35 14.5 25 32 32 32.5 17 2 21 4.5 22 8.5 9.5 21.5 27.5 0 38.5 25.5 27.5 40 40 36.5 28 2 32 4.5 33 8.5 9.5 23 34.5 0 43.5 27 34 50 50 41 29.5 2.5 33.5 5 34.5 9 10 28 39.5 0 48.5 32 39 63 63 46 34.5 2.5 38.5 5 39.5 9 10 28 46.5 2.5 55 22 46.5 80 80 52.5 24.5 6.5 28.5 9 29.5

PF2A/PF2W

type Wiring specifications Nil N F Rc NPT G Nil N Lead wire with connector 3 m Without lead wire Port size Applicable model Flow rate (l/min) Port size Symbol Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 4 16 100 40 03 04 06 10 3/8 1/2 3/4 1 PF2W504, PF2W520

100

/set 14 ZL1 Series Dimensions ZL112A(N)(-B) Valve (Without supply valve or release valve) 2 x 5.3 Mounting hole ( ) Recommended tightening torque: 1.2 to 1.5 Nm 53.2 114 Vacuum (V) port Applicable tubing O.D. B Air pressure supply (P) port Applicable tubing O.D.

Digital Flow Switches, Series PF2A, Series PF2W

specification Nil N F Rc NPT G Nil N Lead wire with connector 3m Without lead wire Port size Applicable models Flow rate (l/min) Port size Symbol 40 100 4 16 03 04 06 10 3/8 1/2 3/4 1 PF2W504, PF2W520 PF2W520, PF2W540 PF2W540, PF2W511 PF2W511 Specifications PF2W504 PF2W520 PF2W540 PF2W511 Model Measured fluid Water Detection type Karman vortex 0.5 to 4l/min 2 to 16l/min 5 to 40l/min 10

Table of Contents

Refer to page 829-10. 8-29-17 18 Dual Rod Cylinder: With End Lock For Retraction Side Series CXS 6, 10, 15, 20, 25, 32 How to Order CXS M Y7BW 50 S R 10 Number of auto switches Nil S n 2 pcs. 1 pc. n pcs.

Vacuum Pad: Ball Joint Type, Series ZPT/ZPR

/Female Thread) ZPT 20/25/30 F-B 5/8/01 (Without Buffer/Female Thread) Width across flats P N M5 x 0.8 NL Width across flats 8 5 Y Width across flats 12 F Width across flats 10 Width across flats 3 F Width across flats 2 D 3 D C C 2 2 A A B B Dimensions A Dimensions A (mm) (mm) B C D F Y B C D F N NL P Model Model ZPT10F-B5 ZPT20F-B5 10 12 10 12.5 27 32 M5 x 0.8 5 9 1.5 ZPT13F-B5 ZPT20F-B8

Compact manifold regulator ARM5 Series

IN side OUT side Fitting size Straight Elbow Elbow Elbow Straight Elbow Elbow Elbow R S T U V W X Y 4, 5/32 2.5 6 11 35.5 6 3 12.5 19 35.5 3 6.5 11 36 1/4 3 12.5 19 35.5 6.5 6 11.5 38.5 8, 5/16 5 13.5 21 38.5 ARM5AB Centralized supply type (DIN rail mount) n = Number of stations for regulator block L2 L2-10.5 L1=(14 x n)+56 11.5 Y Pressure gauge (Accessory) 10 10 14 14 16 10 10 5.3 W V T

LEC-OM02704CN

RX(n+2)1 RY(n+2)1 RX(n+2)2 1 RY(n+2)2 RX(n+2)3 2 RY(n+2)3 6 RX(n+2)4 3 RY(n+2)4 7 RX(n+2)5 4 RY(n+2)5 8 RX(n+2)6 5 RY(n+2)6 RX(n+2)7 6 RY(n+2)7 RX(n+2)8 7 RY(n+2)8 RX(n+2)9 8 RY(n+2)9 RX(n+2)A RY(n+2)A RY(n+2)B RX(n+3)9 RY(n2)C 1 RX(n+3)A RY(n2)D 2 RX(n+3)B Ready RY(n2)E 3 RX(n+3)C RY(n+2)F RX(n+3)F RY(n+3)9 RY(n+3)A RY(n+3)B RY(n+3)F . n 15 5 15 (RWwn) (RWrn) (1) (1) RWwn

Speed Controller with Indicator In-line Brass Stainless steel Electroless nickel plated In-line Type “Made to Order” “Made to Order” section has been added. Pages 3, 8 section has been added. ¡Lubricant: Vaseline -X12 The numerical indication of ¡Greas

Holder mounting Metric Size Applicable tubing 23 04 06 08 10 12 3.2 4 6 8 10 12 AS1002FS TMH-23J TMH-04J TMH-06J AS2002FS AS2052FS TMH-06 TMH-08 AS3002FS TMH-07 TMH-10 TMH-12 AS4002FS TMH-13 Tubing size Applicable model The applicable TMH for the AS1002FS-02 is not available.

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

B 15 1 A A 5 B B 15 20 A A L1 L2 4 Manual override + + + + 10 10 3.2 63.3[65.5] 15.3 32 17 7.5 (4.4) 111.5[115.9] 12.4 1 98.6[103] A A A A A A 16 R P R P 31.2 31.5 64.1[66.3] 36.4 B B B B B B 65.3 17 50.4 70.2 2-4.5 (For mounting) + + + + + + Triangle mark 1/8 (P, R port) (Pitch) P = 12.5 18.5 1/8 (P, R port) (Station n) (Station 1) (Light/surge voltage suppressor) Applicable connector: