17

Maximum Load Mass MY1B/m1 MY1B/m2 MY1B/m3 200 30 40 50 20 100 30 20 10 50 40 10 5 30 4 4 5 20 3 Load mass kg Load mass kg Load mass kg 3 2 10 2 MY1B40 MY1B40 MY1B40 MY1B40 MY1B40 MY1B40 MY1B32 1 MY1B32 MY1B32 1 MY1B25 5 4 MY1B25 MY1B25 0.5 3 0.5 0.4 0.4 0.3 2 0.3 0.2 0.2 1 0.1 100 200 300 400 500 1000 1500 0.1 100 200 300 400 500 1000 1500 100 200 300 400 500 1000 1500 Piston speed mm/s Piston

e-Rodless Actuator

Speed [mm/s] 1 1 100 0.49 2 2 200 0.74 3 3 300 0.98 4 4 400 1.23 5 5 500 1.47 6 6 600 1.96 7 7 700 2.45 8 8 800 2.94 9 9 900 3.92 10 10 1000 4.90 Note) The factory default setting for the switch is No.1 (100 mm/s).

SYJ300/500/700

M5 x 0.8 (P, R port) 10 8.6 7.5 VQ 17.5 23 VKF VQZ L plug connector (L): SYJ34-L-M5 M plug connector (M): SYJ34-M-M5 M8 connector (WO): SYJ34-WO-M5 VZ VS VFN Approx. 300 (Lead wire length) 41.5 [48.5] 26.1 46 M8 x 1 28.5 52.6 [59.6] Approx. 300 (Lead wire length) 58.5 [60.7] 48.7 [50.9] 57.6 50.2 43.7 R P R P R P 10 8.6 10 8.6 10 8.6 23 23 23 5 5 5 28.5 28.5 28.5 35.6 35.6 35.6 Refer to

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

100 to 500 200 to 600 Work load [kg]*1 Horizontal 12 25 30 20 45 50 25 55 65 Vertical 0.5 7.5 15 4 10 20 2 2 23 In-line Stroke range Up to 500 20 to 1100 12 to 750 6 to 400 24 to 1200 16 to 800 8 to 400 30 to 1200 20 to 850 10 to 300 Speed*1 [mm/s] 501 to 600 30 to 1200 20 to 850 10 to 300 Actuator specifications Parallel Stroke range Up to 500 20 to 900 12 to 600 6 to 300 24 to 800 16 to

Low Profile Guide Type

/s (4) CY1F/m1 (5) CY1F/m2 (6) CY1F/m3 (7) CY1F/m4 30 30 30 30 20 20 20 20 CY3B CY3R CY1F25 CY1F25 CY1F25 CY1F25 CY1S 10 10 10 10 CY1L CY1H CY1F15 CY1F15 CY1F15 5 5 5 5 Load mass kg Load mass kg Load mass kg Load mass kg 4 4 4 4 CY1F CY1F 3 3 3 3 CYP CY1F15 CY1F10 CY1F10 CY1F10 2 2 2 2 CY1F10 1 1 1 1 D0.5 500 300 100 50 0.5 500 300 100 50 0.5 500 300 100 50 0.5 500 300 100 50 -X Piston speed

AC Servo Motor Driver (CC-Link Type)

5 20 10 5 ratio 4/7) Initial value Recommended value Point table No.1 Home position return acceleration time constant (msec) *5 0 1000 500 250 143 1000 500 250 Different from the initial value. *5.

Vacuum System Peripherals:

8, R 10, R 10, R 10, R 6 8 10 4 6 KM11 6, 10 One-touch fitting One-touch fitting 1 4 3 8 KM12 6, 10 One-touch fitting Rc KM13 3 One-touch fitting One-touch fitting KM11 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 4 One-touch fitting R male thread KM12 KM14 3 One-touch fitting KM15 KM15 3 One-touch fitting One-touch fitting rod KM16 KM14 KM16 One-touch fitting 3 One-touch fitting KM13 Miniature fittings

Hydraulic Cylinder 7MPa Nominal Pressure Series CHN

8 16 10 12 12 8 10 10 41 5 8 31 25 to 300 15.5 25 22 17 32 12 10 16 10 12 12 8 10 10 46 6 8 34 25 to 400 19.5 32 24 22 38 16 14 19 11 13 13 8 10 10 53 8 9 40 25 to 500 21 40 24 24 41 18 16 21 12 17 17 11 16 16 54 10 11 48 25 to 500 21 (mm) Bore size (mm) K NN P S T V W ZZ MM NB IA NA -0.020 -0.053 -0.020 -0.053 -0.025 -0.064 -0.025 -0.064 20 5 M22 x 1.5 1/8 81 9.5 4.5 6.5 138 M8 x 1.25 15

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

MY3A MY3B MY1H/m1 MY1H/m2 MY1H/m3 MY3M 50 50 50 40 40 40 30 30 30 20 20 20 Load mass kg Load mass kg Load mass kg MY1H40 MY1H40 MY1H40 MY1H40 MY1H40 MY1H40 10 10 10 MY1H32 MY1H32 MY1H32 MY1H32 MY1H32 MY1H32 MY1H25 MY1H25 MY1H25 MY1H25 MY1H25 MY1H25 5 5 5 4 4 4 3 3 3 2 2 2 D1 1 1 -X 100 200 300 400 500 1000 1500 100 200 300 400 500 1000 1500 100 200 300 400 500 1000 1500 Technical Data Piston

HRX-OM-Q026

Ambient temperature (C) Recommended circulating fluids 10 to 45 Tap water, ethylene glycol aqueous solution 15(wt)% -5 to 10 Ethylene glycol aqueous solution 15(wt)% -20 to -5 Ethylene glycol aqueous solution 40(wt)% Circulating fluid temperature(C) Recommended circulating fluids 10 to 35 Tap water, ethylene glycol aqueous solution 15(wt)% 5 to 10 Ethylene glycol aqueous solution 15(wt)%

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

0.075 0.062 0.062 0.079 0.084 0.081 0.084 0.024 0.047 0.024 0.024 M5 x 0.8 C4 M5 x 0.8 C4 M5 x 0.8 C4 M5 x 0.8 C4 M5 x 0.8 C4 M5 x 0.8 C4 10-SS5YJ3-32-M5 10-SS5YJ3-32-C4 10-SYJ333 1/8 10-SS5YJ3-S32-M5 10-SS5YJ3-S32-C4 Base mounted for internal pilot 10-SS5YJ3-41-M5 10-SS5YJ3-41-C4 10-SYJ343 1/8 10-SS5YJ3-S41-M5 10-SS5YJ3-S41-C4 10-SS5YJ3-46-M5 1/8 M5 x 0.8 10-SS5YJ3-46-C4 10-SYJ343 10-SS5YJ3

MY1

impact: P = 0.5MPa For 40 Horizontal impact: P = 0.5MPa 2000 1500 2000 1500 Impact speed (mm/s) Impact speed (mm/s) L-unit 1000 1000 Air cushion 500 400 300 500 400 300 L-unit Air cushion 200 200 Caution 1002 3 4 5 10 20 50 100 1 2 3 4 5 10 20 30 400 50 1.

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

Rubber Seal 3 Port Solenoid Valve Series 10-SYJ300/500/700 Directional Control Valves Air Grippers Modular F. R.

7

Port size 3/8,1/2 10 Cv = 2.4 VXE 40 30 Port size 1/4 10 Cv = 1.9 VXP 20 VXR VXH 10 0.02 0.03 0.032 0.04 0.05 0.055 0.06 0.07 0.08 0.09 0.1 0.16 0.2 0.3 0.4 0.5 VXF Pressure differential P = (P1 P2) [MPa] VX3 VXA 163 VXD Series Specific Product Precautions 1 Be sure to read this before handling the products.

Guide Cylinder Series MGG

Contact P/A in this case. 1 Guide Cylinder Series MGG Models and Specifications JIS symbol Models and strokes Long stroke (mm) Standard stroke (mm) Model Bearing type Bore size (mm) 20 250, 300, 350, 400 75, 100, 125, 150, 200 25 350, 400, 450, 500 MGGM Slide bearing 32 350, 400, 450, 500, 600 40 350, 400, 450, 500, 600, 700, 800 75, 100, 125, 150, 50 350, 400, 450, 500, 600, 700, 800, 900

VP300/500/700

Y:4.5 to 7 D: 6 to 8 Y: 146.1 Rc 1/4, 3/8 (P port) MAX.10 D: 146.6 Pg9 D: 99.4 116.4 Y: 101.4 118.4 D: 90.4 107.4 Y: 92.4 109.4 : With light/surge voltage suppressor ( ): Dimensions for external pilot 4-8-9 10 Series VP300/500/700 Dimensions: VP700/Body Ported Grommet terminal (E) Grommet (G) Applicable lead wire O.D. 2.3 to 2.8 163 162 72.4 82.4 62.9 72.9 (103.5) (External pilot port) (Rc

LEC-OM02704CN

10 .2 10.1 .2 10.2 .3 10.3 CC-Link .3 10.4 .4 10.4.1 .4 10.4.2 .5 10.4.3 .14 10.5 .16 10 1 10 10 10.1 MR Configurator 1 LED LED CN6CN2CN3 1. 2.

4-channel Flow Monitor ( compatible)

Normal output Reversed output -100No.PF-OMA1011-A Specifications Model PFG20# series PF2A5 PF3W5 PF2D5 Applicable flow sensor 10 50 11 21 51 04 20 40 11 25 04 20 40 Rated flow range 1 to 10 5 to 50 10 to 100 20 to 200 50 to 500 0.5 to 4 2 to 16 5 to 40 10 to 100 50 to 250 0.4 to 4 1.8 to 20 4 to 40 L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min L/min 0.35 to 1.7 to

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

32 32 52 36 108 116 118 40 4 40 55 20 8 21 7 4 60 75 9 10 19 450 300 300 6.8 28 102 3.2 135 450 300 40 37 41 111 30 9 14 137 146 9 10 40 40 60 40 112 120 122 47 4 40 55 20 8 25 7 4 60 75 9 10 19 450 300 300 6.8 28 104 3.2 137 450 300 40 37 41 113 30 9 14 139 148 9 10 40 40 60 40 114 122 124 47 4 40 55 20 8 25 7 4 60 75 9 10 19 500 300 300 30 134 3.2 171 500 300 52 45 143 39 18 177 188

Cylinder with Lock Series MNB

1/8 4 19.5 to 500 40 35 10 30 22 8 52 104 38 10 14 16 13 14 16.5 63 12 91 52.5 1/8 4 14 27 to 500 50 40 12.5 35 27 11 65 120.5 46.5 14 20 20 14 15.5 19 75 15 104.5 58.5 1/4 5 18 32 to 600 63 45 17.5 35 27 11 75 134.5 56.5 14 20 20 14 16.5 23 90 12 119.5 68 1/4 9 18 32 to 600 80 45 22 40 32 13 95 169 72 22 30 25 20 19 33 102 18 150 81 1/4 11.5 22 37 to 750 100 55 25 40 41 16 114 189 89 22