Prevents Micro-Bubbles

S) LVN TI/ TIL L 49.5 PA A B (mm) Dimensions W PAX (mm) Dimensions W Model LVA20 LVA30 LVA40 LVA50 LVA60 67 2-2 Depth 4 S PB Model LVA2 LVA3 LVA4 LVA5 88.5 11.5 B A SMC 110.5 24 A B SMC 147 29 34.5 K Dimensions (mm) A B Q R P C D E G H J K L M N Model Rc 1/8, 1/4 NPT 1/8, 1/4 LVA1 20 33 49.5 10 27.5 11 4 11 27.5 4.2 M5 x 0.8 Rc 1/4 NPT 1/4 LVA2 57.5 30 36 44 11 31.5 13 4 20 37 3.5 26.5

Brake mechanism added

A B A B A B A B A B A B A B A B 40 50 63 80 100 6 4 3.5 1.5 0 0.5 6.5 2 4 11.5 10 0 0 4.5 0 2 9.5 8 ML2B 3.5 1.5 0 0.5 6.5 2 4 11.5 10 0 0 4.5 0 2 9.5 8 8.5 7.5 6 5 2.5 3 9 4.5 6.5 14 12.5 1.5 2 8 3.5 5.5 13 11.5 12 10 9.5 7.5 6 6.5 4.5 8 10 17.5 16 4 4.5 12.5 6 8 15.5 14 13.5 12.5 11 10 7.5 8 14 9.5 11.5 19 17.5 6.5 7 13 8.5 10.5 18 16.5 D-A9 and D-A9V cannot be mounted on 50.

ZP

Flat Type Model A B C Y q Pad dia.

High Vacuum Angle Valve

Heater: Indicator: 12 XLF/XLFV Series Dimensions XLF: Air operated (b) C E E C E Fn (KF flange) Fd (K flange) (a) D Heater (Option) Auto switch (Option) (c) [mm] Model A B C D E*1 Fn Fd G H XLF-16-2 40 108 38 20 30 17 44 XLF-25-2 50 121 48 27 12 40 26 44 XLF-40-2 65 171 66 39 11 55 41 67 XLF-50-2 70 185 79 46 11 75 52 72 XLF-63-2 88 212 100 55 11 87 95 70 76 XLF-80-2 90 257 117 65 11

CJ5-S

85 15 CC 40 10 24 Up to 500 30 27 19 26 40 16 19 13 50 8 47 M6 x 1.0 6 14 16 4 M14 x 1.5 44 1/8 11 93 15 50 14 40 Up to 600 35 32 27 32 50 20 21 14 58 11 58 M8 x 1.25 7 18 22 5.5 M18 x 1.5 55 1/4 15 109 21 RB 63 14 Up to 600 40 35 32 27 38 60 20 21 14 58 11 72 M10 x 1.5 7 18 22 7 M18 x 1.5 69 1/4 15 109 21 80 22 60 Up to 750 40 37 32 50 75 25 28 20 71 13 89 M10 x 1.5 10 22 33 7 M22 x 1.5

CJ5-S

85 15 CC 40 10 24 Up to 500 30 27 19 26 40 16 19 13 50 8 47 6 14 16 4 M14 x 1.5 44 1/8 11 93 15 M6 x 1.0 50 14 40 Up to 600 35 32 27 32 50 20 21 14 58 11 58 7 18 22 5.5 M18 x 1.5 55 1/4 15 109 21 M8 x 1.25 RB 63 14 Up to 600 40 35 32 27 38 60 20 21 14 58 11 72 M10 x 1.5 7 18 22 7 M18 x 1.5 69 1/4 15 109 21 80 22 60 Up to 750 40 37 32 50 75 25 28 20 71 13 89 M10 x 1.5 10 22 33 7 M22 x 1.5

Rotary Cylinder Series MRQ Size: 32, 40 1

Size/Standard stroke (mm) Rotating angle 32 40 5, 10, 15, 20, 25, 30, 40, 50, 75, 100 A B 80 to 100 170 to 190 Refer to pages 11-10-18 to 11-10-19 for middle and long strokes other than standard stroke.

IDU/IDF

Power cord outlet IDU6D to 15C, IDF6D to 15C IDF75C A 240 240 30 30 240 240 65 65 B 40 40 49 49 40 40 40 40 Model IDU6D IDU8D IDU11C IDU15C IDF6D IDF8D IDF11C IDF15C E 225 225 181 Model IDF37C1 IDF55C IDF75C A 425 190 208 B 375 140 158 C 75 75 66 D 153 153 144 Power cord outlet (17) Grommet with waist Back side Cooling water outlet Cooling water inlet A D E Compressed air pressure gauge B

Secondary Batteries

B L F G C D T Basic style Axial foot style Rod side flange style Head side flange style Single clevis style Double clevis style Center trunnion style Cylinder stroke (mm) 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 500, 600 50, 63 Built-in Magnet Cylinder Model 25, 50, 75, 100, 125, 150, 175, 200, 250, 300,

Table of Contents

Description Material AS800 AS900 y u i JIS B 2401 P-7 JIS B 2401 P-7 AQ NBR O-ring u O-ring O-ring Spring NBR NBR Stainless steel JIS B 2401 P-12 JIS B 2401 G-50 14115 JIS B 2401 P-16 JIS B 2401 G-65 14124 JIS B 2401 P-48 JIS B 2401 P-38 NBR O-ring ASV i AK ASS Dimensions: AS420/500/600 Dimensions: AS800/900 ASR ASF 2-Port size 2-Port size Dimensions Dimensions L1 L2 L4 Min.

•

/>B ' C . 0 E . F.

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

B B 2 2 2 A A A 45 65.5 4 4 4 B 25 2 A Dimensions Equation L1=22n+24 n: Station 17.5 37.5 (1.5) 7.5 4 L n 13 1 2 14 16 3 4 5 6 7 8 9 11 15 10 12 46 68 310 332 376 90 112 134 156 178 200 222 266 354 L1 L2 L3 244 288 75 87.5 337.5 362.5 400 112.5 137.5 162.5 175 200 225 250 287.5 375 262.5 312.5 85.5 98 410.5 How to Order 348 373 123 148 173 185.5 210.5 235.5 260.5 298 385.5 273 323

MXW

220.5 MX A 51 31 31 31 31 MTS B 104 124 149 174 199 MXW12 W 31 11 11 11 11 MY V 124 144 169 194 219 A 59.5 34.5 34.5 34.5 34.5 34.5 W V CY B 135.5 160.5 185.5 210.5 235.5 260.5 MXW16 W 39.5 14.5 14.5 14.5 14.5 14.5 MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com

ZP

(for Heavy-duty) Adapter assembly model Applicable pad model Series ZP Page ZP40HB ZP50HB ZP40H ZP50H ZPA-T1-B P. 75 ZP63HB ZP80HB ZP63H ZP80H ZPA-T2-B P. 75 ZP100HB ZP125HB ZP100H ZP125H ZPA-T3-B P. 75 ZP40HB ZP50HB ZP40H ZP50H ZPA-T101 P. 75 ZP63HB ZP80HB ZP63H ZP80H ZPA-T201 P. 75 ZP100HB ZP125HB ZP100H ZP125H ZPA-T301 P. 75 ZP40HB ZP50HB ZP40H ZP50H ZPA-X101-B P. 76 ZP63HB ZP80HB ZP63H

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

A Adjustment amount by adjustment bolt A Adjustment amount by adjustment bolt A Adjustment amount by adjustment bolt B Adjustment amount by adjustment bolt B Adjustment amount by adjustment bolt B 90 Rotation 90 Rotation 90 Rotation 11-9-13 14 Series MSQ Construction o i t !

CXS

A C MTS D-F9W, D-M9 D-A93 D-A90, D-A96 D-M9V, D-F9WV Bore size (mm) CXSJ15 to 32 B D A 15.5 25.5 31.5 39 40 49 D 9.5 7 0 3 5 5.5 C 9.5 19.5 25.5 33 34 43 B 6 9 11 11.5 B 0.5 3 10 13 15 15.5 A 15.5 25.5 31.5 39 40 49 A 19.5 29.5 35.5 43 44 53 C 11.5 21.5 27.5 35 36 45 D 5.5 3 4 7 9 9.5 D 8 5.5 1.5 4.5 6.5 7 B 6 9 11 11.5 B 0.5 3 10 13 15 15.5 C 13.5 23.5 29.5 37 38 47 C 11 21 27 34.5 35.5

CXS

A C MTS D-F9W, D-M9 D-A93 D-A90, D-A96 D-M9V, D-F9WV Bore size (mm) CXSJ15 to 32 B D A 15.5 25.5 31.5 39 40 49 D 9.5 7 0 3 5 5.5 C 9.5 19.5 25.5 33 34 43 B 6 9 11 11.5 B 0.5 3 10 13 15 15.5 A 15.5 25.5 31.5 39 40 49 A 19.5 29.5 35.5 43 44 53 C 11.5 21.5 27.5 35 36 45 D 5.5 3 4 7 9 9.5 D 8 5.5 1.5 4.5 6.5 7 B 6 9 11 11.5 B 0.5 3 10 13 15 15.5 C 13.5 23.5 29.5 37 38 47 C 11 21 27 34.5 35.5

Environment

C A B C A B C A B C A B C A B C LEY40 1100 Work load [kg] 1 1.5 3 2.5 5 10 4.5 9 18 7 14 28 1 1.5 3 1.2 2.5 5 Lead 4: LEY40C 800 900 1000 Pushing force 85% 65% 85% 65% 95% 95% Lead 8: LEY40B Lead 16: LEY40A 10 20 30 40 50 60 70 80 90 0 100 200 300 400 500 600 700 Force [N] Non-rotating Accuracy of Rod Size Non-rotating accuracy q 16 1.1 25 0.8 32 0.7 40 + Max. 65% Set value of pushing force

Sine Cylinder Series REC

MM NA 1.5 AL FZ FX Width across flats KA Effective thread length FL K A 2 x 7 F N N 40 Mounting hole ZZ + Stroke Z + Stroke S + Stroke H FT B (mm) A AL B B2 F FL G H D B1 FT FX FY FZ E Bore (mm) FX 0 -0.033 0 -0.033 0 -0.033 0 -0.039 20 18 15.5 34 26 13 8 13 10.5 10 41 4 60 75 20 25 22 19.5 40 32 13 10 17 10.5 10 45 4 60 75 26 20, 25, 32 32 22 19.5 40 32 13 12 17 10.5 11 45 4 60 75 26

Sine Cylinder Series REC

MM NA 1.5 AL FZ FX Width across flats KA Effective thread length FL K A 2 x 7 F N N 40 Mounting hole ZZ + Stroke Z + Stroke S + Stroke H FT B (mm) A AL B B2 F FL G H D B1 FT FX FY FZ E Bore (mm) FX 0 -0.033 0 -0.033 0 -0.033 0 -0.039 20 18 15.5 34 26 13 8 13 10.5 10 41 4 60 75 20 25 22 19.5 40 32 13 10 17 10.5 10 45 4 60 75 26 20, 25, 32 32 22 19.5 40 32 13 12 17 10.5 11 45 4 60 75 26