SZ3000

148 137.5 122.5 13 160.5 150 133 14 173 162.5 143.5 15 185.5 175 154 16 198 187.5 164.5 17 1-3-30 31 Cassette Type Manifold Non Plug-in Type Series SZ3000 Dimensions: SZ3000 Non Plug-in SS5Z3-60Stations B With external pilot 4One-touch fitting [1(P), 3(R) port] Applicable tubing O.D.: 8 24 13.3 (Pitch) P = 10.5 24 13.3 16.2 16.2 17 SV 36.7 34 34 B 2 B 2 PE B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2

51

Head Flange (mm) Bore size (mm) Standard stroke A AL D J B B1 C H1 H ZZ E F FX FD FT GA GB I KA MM NA P S 20 25 32 40 50 63 80 100 12 12.5 11 10.5 15 15 17 20 85 92 94 101 130 130 162 166 14.5 17.5 17.5 23.5 29 29 35.5 35.5 5 6 6 8 11 11 13 16 14 16.5 20 26 32 38 50 60 20 23 23 29 35 35 44 44 Up to 200 12 15 15 20.5 26 26 32.5 32.5 40 44 53 61 76 92 104 128 13 17 17 19 27 27 32 41 8 10 12

High Purity Fluoropolymer

Model G F B H L E M M 3 4 LQ1T12 LQ1T11 1/8 10 11.5 18.5 8 4 2 Class 1 LQ1T52 LQ1T51 LQ1T42 LQ1T41 LQ1T33 LQ1T32 LQ1T31 LQ1T22 LQ1T21 12 19 10 12 6 8 10 4 6 15 16.5 28 14 12 6 4 20 23 36.5 17 18 9 5 F (E) 2-B L M 20 28 45 21 22 11 6 1/4 G 29 39 54 26 28 14 7 (E) (E) H L L 25 19 LQ1T62 LQ1T61 Class 2 to 5 39.5 49 69.5 36 36 18 8 Inch sizes Applicable tubing O.D.

VFS

[dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv Weight (kg) Plug-in Non plug-in VF 2.6 2.8 2.6 2.8 2.5 2.7 2.6 2.9 2.7 2.9 2.8 3.1 2.8 3.1 2.3 2.6 2.3 2.4 2.7 2.8 3 8 0.20 0.22 0.20 0.22 0.14 0.22 0.15 0.15 0.22 0.22 VFS4110 11 12 11 12 10 11 11 12 11 11 6.3 6.8 12 12 12 12 10 11 10 10 11 11 6.5 6.8 0.18 0.15 0.18 0.15 0.18 0.18 0.16 0.15 0.22 0.22 2 position 3 position 40 or less 0.63 1,000

C95

K2 H6 EU 11 11 15 15 18 18 10 12 12 16 16 20 6.6 6.6 9 9 11 11 38 41 50 52 66 76 51 54 65 67 86 96 10 10 12 14 18 20 21 24 33 37 47 55 7 9 11 11 12.5 13.5 18 22 30 35 40 50 26 28 32 40 50 60 31 35 45 50 60 70 32 36 45 50 63 71 8 10 12 12 14 15 10 11 12 15 15 19 32 40 50 63 80 100 11 11 15 15 18 18 10 12 16 16 20 20 21 24 33 37 47 55 8.5 8.5 10.5 10.5 11.5 12.5 10 10 12 12 14 15 6.6 6.6 9

CG5-S

acid (25%, Room temperature) C C C C B D 11 Organic solvent Citric acid A B C C D A 12 Acetic acid (10%, Room temperature) B B A A C C 13 Lactic acid (5%, 20C) A B A B D A 14 Linseed oil A C C B A A 15 Polassium chloride A A A A C B 16 Calcium chloride A A A A A B 17 Other (oil, gas, etc.)

Speed Controller with Indicator

Description Material Note 1 Body A PBT 2 Body B Brass Electroless nickel plating 3 Knob POM 4 Needle PBT 5 Needle guide Brass Electroless nickel plating 6 U-seal HNBR 7 O-ring NBR 8 O-ring NBR 9 Cassette 10 Seal NBR 11 Bonnet A POM 12 Bonnet B POM 13 Gear POM 14 Indicator gear POM 15 Clip Stainless steel 16 Gasket NBR/Stainless steel q t r u i !6 !

5 Port Air Operated Valve Series SYA3000/5000/7000 1

15 (Bracket) VR VH 2 position double: SYJA3220-M3(-F) 2 position double: SYJA3240-M5 VHS 10 9 36 7.1 2-M3 x 0.5 (Pilot port) 10 1.8 4 A B (For mounting) 2-3.2 1.5 1.5 22 7 8.2 2.5 (For manifold mounting) 2-1.8 2-M3 x 0.5 (Pilot port) A B 11 1.5 17.5 (For mounting) 2-3.2 equivalent (18.5) A B Manual override 14 36 (18.5) (21) Manual override 41.6 13.5 15 41.6 28.5 21 R2 P R1 13 R P R (11)

MGP

4-OA 4-OB counter bore depth OL XX section XX section L Through 4-NN WA Z X0.02 X0.02 DA DB VB VA R U X T H PW 2-P XAH7 6 depth XAH7 depth 6 GA PB Q 2-P (Plug) PA+Stroke GB J K S FB FA C+Stroke B+Stroke E A+Stroke G MGPM, MGPL/Common Dimensions Bore (mm) Standard stroke (mm) B C DA FA FB G GA GB H HA J K L MM ML NN OA OB OL P PA PB PW Q 25, 50, 75,1 00 71 58 11 8 8.5 9 M5 X 0.8 12 13 15

Possible to transfer a workpiece at low-speed.

Rotation starting point End of rotation e R g ot n at ra L io n B Rotation starting point End of rotation n io ra at n ot g R e L L B B A Rotation starting point End of rotation A A R e ot g at n ra io n Lmax 15 18 24 27 31.5 Lmax 15 18 24 27 31.5 Lmax 15 18 24 27 31.5 Size 10 15 20 30 40 Size 10 15 20 30 40 Size 10 15 20 30 40 The figure shows the view from the long shaft end.

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

B 2 x Port size 1(IN), 2(OUT) port H G 2 x M5 thread depth N G 2 x M5 thread depth N WN: M12 connector F K D C J E IN A 2 x Port size 1(IN), 2(OUT) port B H G 2 x M5 thread depth N Glossary of Terms [mm] Size Port size A B C D E F G H N 20 1/8 14 30 69.2 36 9 18 15 17.5 6.4 1/4 19 40 67.7 22.2 22.2 7.6 3/8 22 48 70.7 11 19 20.6 6 30 1/4 19 40 76.7 42 9 21 22.2 22.2 7.6 3/8 22 48 79.7 11

CQS

24.5 7.5 10 2.5 7.5 10 22.5 3.5 6 1.5(1) 3.5 6 20 26.5 9.5 11 0.5 9.5 11 24.5 5.5 7 3.5(-1) 5.5 7 25 D-F9BAL Auto switch model Symbol Hs W 16.5 B 14.5 A 3.5 4.5 12 18.5 15 3 5 16 Bore size (mm) 22 11.5 6.5 9 20 24 9.5 8.5 10 25 Note 1) The product is shipped out of the factory in installation state "a)".

VFR

wire electrical entry) P EB EA 31 50 67 81 37 37 43 6-Rc 3/4 61 103 (P , EA, EB port) 72 [ ] = A, B port Rc 3/4 Formula for manifold weight M = 0.911n + 1.621 (kg) n: Station 144 (72) 60 11 60 Non plug-in type: VV5FR5-10Station 1Bore size U side 2.3 (Electrical entry) Manual override (Non-locking) 21 R5.5 B B B B A A A A B B B n A A A B B B B A A A A 3 L2 L1 P = 51 11 11 71.5 (Pitch) P =

Rotary Cylinder Series MRQ Size: 32, 40 1

(mm) (mm) Stroke 5 10 15 20 25 30 40 50 75 100 Y 12.5 15 15 20 20 15 17.5 17.5 25 30 Q 20 20 20 20 30 E 68 68 70.5 68 70.5 68 70.5 75.5 80.5 83 11-10-15 16 Refer to page 11-11-1 concerning further information on specifications of the auto switch single body.

HRX-OM-X084

temperature sensor 13 ue own Blue 3B 8 14 ue 15 (CN7) Blue 5 7 ue 16 6 Blue 8 Brown 3 4 1 9 Brown Blue Serial communication 9 10 Blue Blue Blue 7 12 2 Blue 9 Blue 11 3 10 11 12 Blue Blue Blue External communication section for customer connection Brown 15 1 Blue 8 Blue 16 9 17 2 Brown Blue 18 10 (CN1) 1/2 Red Brown 19 3 1A White Blue 20 11 2A outlet White Blue 21 4 3A 22 12 Blue Contact

Stability of suction position,

492 490 502 ZP3E-YF80UMJB ZP3E-YF100UMJB Width across flats 17 Bushing Bushing Width across flats 17 8 8 50 8 8 50 Bushing Bushing Width across flats 30 M22 x 1.5 Width across flats 30 M22 x 1.5 24 33 A B 21.5 30.5 A B Rc1/8 Rc1/8 D D D D 32 32 61 50 53.5 22.61) 5 56 25.11) 7 4 4 30 (Rotating angle) 30 (Rotating angle) 83 80 103 100 D-D D-D 22 22 26 26 11 11 Dimensions Dimensions Model A

High Vacuum Angle Valve, XL Series

Dimensions (mm) 1in=25.4mm (b) C D E C E E (a) F (c) Heater (optional) B G A A (mm) D 1 1 2 2 C 38 48 66 79 B 100.5 114 162.5 179.5 F 30 40 55 75 A 40 50 65 70 G 17 26 41 52 E Note 1) Model XLH-16 XLH-25 XLH-40 XLH-50 12 11 11 Note 1) Dimension E applies when heater option is included.

Vacuum System Peripherals:

U D side D B Special specification M U side 2 to 10 stations 15 15 Includes number of blanking plate assembly .

5 Port Solenoid Valve, Series VQC

B (+) () () (+) 10 10 When using a standard commercial connector, use a type 26P connector conforming to MIL-C-83503 or a type 20P with strain relief. Cannot be used for transfer wiring. SOL. A SOL. A (+) () () (+) 11 11 Station 6 Station 6 SOL. B SOL. B (+) () () (+) 12 12 SOL. A SOL. A (+) () () (+) 13 13 Station 7 Station 7 SOL. B SOL.

Fieldbus System

Specify on a manifold specification sheet if plugs are reguired on the A and B port on the manifold. 17 Series SY3000/5000 For Series EX600 Plug-in Connector Connecting Base A, B port size (Inch) A, B port size (Metric) Type 10/ Side ported Type 11/ Bottom ported Symbol Type 10/ Side ported Type 11/ Bottom ported A, B port A, B port Symbol SY3000 P P P P P P P P P SY5000 SY5000 SY3000