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NBR Silicon rubber NBR Silicon rubber NBR Silicon rubber NBR Silicon rubber NBR Silicon rubber NBR Silicon rubber ZP02 ZP04 ZP06 ZP08 ZP10 ZP13 ZP16 ZP20 ZP25 ZP32 ZP40 ZP50 ZP63 ZP80 ZP100 ZP125 5 7 8 2 2 4 4 7 9 11 2 4 5 7 10 4 6 8 10 5 5 10 10 7 9 9 10 13 10 8 13 11 13 11 10 11 16 20 25 32 12 14 9 9 13 15 19 25 33 13 15 20 26 35 14 17 20 24 30 15 18 21 26 33 14 14 13 20 18 12 13 11 17

Table of Contents

Refer to pages 11-4-20 to 11-4-21 for detailed specifications. 11-2-21 21 Series CRB2BWU Dimensions: 10, 15, 20, 30 (With angle adjuster) Single vane type Following illustrations show actuator for 90 when A port is pressurized. CRB2BWU10/15/20/30-S Double vane type Following illustrations show the intermediate rotation position when A or B port is pressurized.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Refer to pages 11-4-20 to 11-4-21 for detailed specifications. 11-2-21 21 Series CRB2BWU Dimensions: 10, 15, 20, 30 (With angle adjuster) Single vane type Following illustrations show actuator for 90 when A port is pressurized. CRB2BWU10/15/20/30-S Double vane type Following illustrations show the intermediate rotation position when A or B port is pressurized.

Made to Order

24 30 34 40 46 58 7 7 9 9 9 9 10 10 13 15 18 21 24 27 32 39 6 8 10 13 16 16 20 20 13 15 18 21 24 27 32 39 29 33 37 37.5 37.5 44 44 49 8 10 12 16 20 20 25 25 7.5 8 8.5 9 9 10 11 13.5 M4 M4 M5 M5 M6 M6 M8 M10 90 42 46 53 53.5 59.5 66 72 77 6 8 10 12 16 16 20 20 11 11 10.5 11.5 12.5 14 14 16.5 58 64 83 93 112 120 148 162 M4 x 0.7 10 12 13 15 20 20 22 22 M4 x 0.7 10, 20, 30, 40, 50, 75, 100

Smooth Cylinder/Low Speed Cylinder

63 80 100 S TB TA ZZ GA 12 P 1/8 GA 12 P M5 x 0.8 11 12 12 77 11 114 Up to 200 11 12 12 77 11 119 12 1/8 12 M5 x 0.8 Up to 300 11 12 10 79 11 121 12 1/8 10 1/8 Up to 300 12 13 10 87 12 139 13 1/8 10 1/8 Up to 300 13 14 12 102 13 162 14 1/4 12 1/4 Up to 300 13 14 12 102 13 162 14 1/4 12 1/4 Up to 300 20 17 122 196 20 3/8 17 3/8 Up to 300 20 17 122 196 20 1/2 17 1/2 Up to 300 1206 Smooth

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Refer to pages 11-4-20 to 11-4-21 for detailed specifications. 11-2-21 21 Series CRB2BWU Dimensions: 10, 15, 20, 30 (With angle adjuster) Single vane type Following illustrations show actuator for 90 when A port is pressurized. CRB2BWU10/15/20/30-S Double vane type Following illustrations show the intermediate rotation position when A or B port is pressurized.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Basic Style A Without auto switch B P A B P Q Q With auto switch Bore size (mm) 5 st 10 st 20 st 20 st 5 st 10 st 5 st 10 st 5 st 10 st 5 st 10 st 20 st 20 st 20 st 20 st 5 st 10 st 32 40 50 Rc 1/8 40 46.5 M5 x 0.8 11.5 11 50 56.5 28 34.5 38 44.5 Rc 1/8 Rc 1/8 Rc 1/4 10.5 11 10.5 50 56.5 68.5 10.5 11 10.5 60 66.5 68.5 43 49.5 50.5 33 39.5 40.5 78.5 10.5 88.5 60.5 50.5 Rc 1/8

SY

20 20 stations D R Includes the number of blanking plate assemblies.

1

Spring return/extend) XA0/1/10/11 XA0/1/6/10/11/13/14/17/19/21 Double acting, Single rod 20, 25 CA2 C85K Non-rotating rod type Double acting, Single rod XA0/1/10/11 Single acting(Spring return/extended) 20, 25 Non-rotating rod, Direct mount type CJ2RK CS1 Single acting (Spring return/extend) XA0/1/10/11 Non-rotating rod, C85R Double acting, Single rod XA0 to 30 20, 25 Double acting, Single

Slider Type Ball Screw Drive/11-LEFS Series

-LEFS Series Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Clean Room Specication Specifications Step Motor (Servo/24 VDC) Model 11-LEFS16 11-LEFS25 11-LEFS32 11-LEFS40 Stroke [mm] Note 1) 50 to 500 50 to 600 50 to 800 150 to 1000 LECP6/LECP1/LECPMJ 14 15 25 30 45 50 55 65 Horizontal Note 2) Work load [kg] LECPA 9 10 20 20 40 45 50 60 Vertical 2 4 7.5 15 10 20 2 23 Speed [mm/s] Note 2) 10

Air Cylinder

) 25 1.5 40 13 10 (13) 1/8 17 15 (17) 20 1.5 50 14 12 (14) 1/4 18 16 (18) 20 3 63 14 12 (14) 1/4 18 17 (18) 20 3 80 20 16 (20) 3/8 24 20 (24) 20 4 100 20 16 (20) 1/2 24 20 (24) 20 4 Bore size NA S TA TB ZZ Bore size TC TD TE TF TG 20 24 69 (77) 11 11 106 (114) 25 29 69 (77) 11 11 111 (119) 32 35.5 71 (79) 11 10 (11) 113 (121) 40 44 78 (87) 12 10 (12) 130 (139) 50 55 90 (102) 13 12 (13) 150

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Bore size (mm) Stroke range (mm) 20 25 32 40 50 63 80 100 A AL B1 C D E F GA GB H H1 I J K KA MM NA P S TA TB ZZ 5 6 6 8 11 11 13 16 M4 x 0.7 depth 7 5 M8 x 1.25 24 1/8 1/8 1/8 1/8 1/4 1/4 3/8 1/2 114 119 121 139 162 162 196 196 12 12 12 13 14 14 20 20 35 40 40 50 58 58 71 71 77 77 79 87 102 102 122 122 26 31 38 47 58 72 89 110 11 11 11 12 13 13 12 12 12 13 14 14 20 20 11 11 11 12 13 13

ZP

Dimensions ZP2-Z002 ZP2-Z003 40 20 0.1 0.2 A A 20 0.1 0.2 40 A A 20 40 A-A A-A w q q w 11 20 9 18 90 4 x 4 90 4 x 4 4 e e 5 5 () 12 () 4 x 2.4 1.8 1.5 4 x 2.4 1.5 0.9 20 9.4 Component Parts Component Parts Part no. Description No. ZP2-Z2A ZP2-Z2B ZP2-Z2C Material PTFE FKM Aluminum alloy Note Clear anodized Part no. Description No.

CA2

to 500 30 27 22 44 16 32 10 15 M8 x 1.25 14 11 M14 x 1.5 27 CA2 50 70 11 7 up to 600 20 to 600 35 32 27 52 20 40 10 17 M8 x 1.25 18 11 M18 x 1.5 30 63 85 11 7 up to 600 20 to 600 35 32 27 64 20 40 10 17 M10 x 1.25 18 14 M18 x 1.5 31 CS1 80 102 13 11 up to 750 20 to 750 40 37 32 78 25 52 14 21 M12 x 1.75 22 17 M22 x 1.5 37 100 116 16 11 up to 750 20 to 750 40 37 41 92 30 52 14 21 M12 x 1.75

CM2

Built-in One-touch fitting Basic Front flange Built-in One-touch fitting Spring return CM2F20SCM220A, #11 SCM220A, #11, #4 SCM220A, #11, #4, #19 CM2F25SCM225A, #11 SCM225A, #11, #4 SCM225A, #11, #4, #19 CM2F32SCM232A, #11 SCM232A, #11, #4 SCM232A, #11, #4, #19 CM2F40SCM240A, #11 SCM240A, #11, #4 SCM240A, #11, #4, #19 Bore P Q 20 6 23 25 6 26 Basic Front flange Built-in One-touch fitting

CQ2

Standard (mm) A Without auto switch B P A B P Q Q With auto switch Bore (mm) 5st 10 50 20 5st 10 33 20 5st 10 20 5st 10 20 5st 10 60 20 5st 10 43 20 32 40 50 RC(PT) 1/8 28 40 M5 X 0.8 50 38 11.5 11 10.5 11 RC(PT)1/8 10.5 11 RC(PT)1/8 46.5 34.5 56.5 44.5 56.5 39.5 66.5 49.5 RC(PT)1/8 RC(PT)1/4 78.5 50.5 10.5 10.5 88.5 60.5 10.5 68.5 40.5 68.5 50.5 RC(PT)1/4 C D E H I J K

5

58 M8 x 1.25 depth 16 7 18 M18 x 1.5 55 63 35 32 27 38 20 32 2 58 11 72 M10 x 1.5 depth 16 7 18 M18 x 1.5 69 80 40 37 32 50 25 40 3 71 13 89 M10 x 1.5 depth 22 10 22 M22 x 1.5 86 100 40 37 41 60 30 50 3 71 16 110 M12 x 1.75 depth 22 10 26 M26 x 1.5 106 (mm) Bore size (mm) Stroke range (mm) S TA TB ZZ Rc, NPT port G port GA GB P GA GB P 20 77 11 11 114 12 12 1/8 12 12 M5 x 0.8 25 77 11 11

ZP

10 117 132 Weight by Stroke (g) Stroke (mm) Model 10 15 20 25 30 40 50 ZPY02 to 08 ZPY10 to 25 ZPY40, 50 +7 +8 +9 +12 +14 +26 5.5 +28 +30 5.5 P . 13-11-65 to 13-11-68 13-11-50 51 Series ZPY Vacuum Pad: Lateral Vacuum Entry with Barb Fitting with Buffer How to Order Series ZPY With buffer ZPY A10 U 16 K GS 20 U6 Mounting thread (Refer to Table (3) for applications.)

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535 1 5 10 20 50 1 5 10 20 50 16-11-13 10 For details about certified products conforming to international standards, visit us at www.smcworld.com.

C85

M22 x 1.5 G 1/8 M8 x 1.25 24 8.2 32 11 62 126 6 13 115 11 8.5 95 20 44 24 8 16 12 22 17 8 8 11.5(13) 15(17) 15(17) 20 28 8 25 M22 x 1.5 G 1/8 M10 x 1.25 30 32 11 65 137 8 126 17 11 104 22 50 28 10 16 12 22 20 8 8 11.5(13) 15(17) 15(17) 10.5 10.2 22 33.5 ( ): In the case of air cushion.