Table of Contents

11 !2 !33 !4 !5 !

SMC Pneumatic Clean Series

25, 50, 75, 100, 125, 150, 200 1/8 Relief type Vacuum suction type 25, 50, 75, 100, 125, 1/4 150, 200, 250, 300 3/8 1/2 25, 50, 75, 100, 125, 150, 200 Available Available (40 to 63) 11-/22-CG120 11-/22-CG125 11-/22-CG132 11-/22-CG140 11-/22-CG150 11-/22-CG163 11-/22-CG180 11-/22-CG1100 Non-lube Double acting, Available 20 25 32 40 50 63 80 100 single rod 1/8 25, 50, 75, 100, 125, 1/4 150

Electric Actuator/Slider Type

8.5 40 to 100 50 33.5 105 to 120 95 125 to 200 70 43.5 205 to 300 85 51 25 M6 1.0 12 80 18 30 95 6.8 40 40 28.5 75 20 to 35 64 5 6 34 8.5 40 to 100 50 33.5 105 to 120 105 125 to 200 70 43.5 205 to 300 85 51 32 M6 1.0 12 95 28 40 117 7.3 60 Size Without lock With lock VA VB VC VA VB VC 25 115.5 82.5 11 160.5 127.5 11 32 120 80 14 160 120 14 93 Electric Actuator/Guide Rod Type Series LEYG

XL

-25 XLD-40 XLD-50 XLD-63 XLD-80 12 11 11 11 11 41 63 68 72 98 95 110 Note 1) Dimension E applies when heater option is included.

High Vacuum Angle Valve, XL Series

-25 XLD-40 XLD-50 XLD-63 XLD-80 12 11 11 11 11 41 63 68 72 98 95 110 Note 1) Dimension E applies when heater option is included.

MU

14 LD 5.5 6.6 9 11 13.5 LS 79 90 96 116 123 LX 11 12 15 18 22 X 12 16 18 21 24 Model MUL25 MUL32 MUL40 MUL50 MUL63 LH 29 37 46 57 67 LT 3.2 4.5 4.5 5 6 LZ 23 27 31 37 48 Axial foot MUL25SMU25, #2 (#1+#2+#11) MUL32SMU32, #2 (#1+#2+#11) MUL40SMU40, #2 (#1+#2+#11) MUL50SMU50, #2 (#1+#2+#11) MUL63SMU63, #2 (#1+#2+#11) CU CQS CQ2 MU (mm) ZZ 99 106 114 139 145 FZ 24 28 32 39 50 FY 66 82 102 126

Auto Switch Guide Reed Switches/Solid State Switches For Rotary Actuators (Air Grippers) 1

2-color indication With timer Grommet 20D-A59W Tie-rod Grommet 11-11-17 D-F79/F7P/J79 11-11-18 Grommet D-F7NV/F7PV/F7BV 11-11-19 Rail D-J79C 11-11-20 Connector 11-11-21 D-F59/F5P/J51/J59 Grommet 11-11-22 D-S991/S992/S99V1/S99V2 11-11-22 D-T991/T992/T99V1/T99V2 11-11-22 D-S9P1/S9P2/S9PV1/S9PV2 Grommet 11-11-23 D-S791/S792 11-11-23 D-T791/T792 Direct 11-11-23 D-S7P1/S7P2 11-11-23 Connector

CM2

11 16 14 15 10 24 88 38 39 11 18 21 22 8 46.5 7 M14 x 1.5 21.5 42.5 M32 x 2 177 188 1/4 32 With Rod Boot l Z Symbol h B3 e f Stroke Bore size (mm) 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 20 36 17 30 68 81 93 106

42

Port size 02 1/4 03 3/8 Porting specifications Nil Side ported B Bottom ported Note) Note) For bottom ported, port size is 1/4 only. 451 VQ4000 Series Dimensions: Plug-in Type Conduit terminal 2-position single: VQ410 -l 0 1 2 156 50 23.5 23.5 2 50 90 106 156 Indicator light 11 (12.5) 11 (12.5) 5 3 4(A) port 2(B) port 9 11 4 2 48 38 1 10.5 A B 38 24.6 48 4 2 A 13.5 13.5 2 x 5.6 Mounting hole

CY1

40 50 1 0 1 2 3 4 5 6 10 7 8 9 10 11 0 1 2 3 4 5 6 7 8 9 10 1112 13 14 15 Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) CY1R20 CY1R63 200 H 1000 100 Allowable driving force Fn (N) Allowable driving force Fn (N) 500 H 400 50 30 L 300 200 L 100 10 5 Useable range 20 30 40 50 Useable range 1 0 1 2 3 4 5 6 10 7 8 9 10 11 12 13 0 1 2 3 4 5 6 7 8 9 10 1112

Battery-less

75 50 100 50 100 150 Pitching [Nm] 11 26 43 77 112 155 Yawing [Nm] Rolling [Nm] 12 48 146 177 152 93 Model Selection LESYH Series Battery-less Absolute (Step Motor 24 VDC) Pushing Force Set ValueForce Graph LESYH8mEm LEFS LEFB LEY LEYG LESYH LES LESH LEHF LER JXC51/61 JXC 1 160 Lead 2.5: LESYH8 EC 140 120 100 Force [N] Lead 5: LESYH8 EB 80 60 40 20 Lead 10: LESYH8 EA 0 80 50 60 70 30 40

2/3 Port Valve

Temp. rise C (Rated voltage) 5 50 3.5 45 6 55 7.5 55 6 45 8.5 60 11 60 9.5 50 11.5 60 Power consumption W (Holding) Apparent power VA Frequency Hz Model Power Inrush Holding 50 20 11 60 17 7 50 42 18 60 37 12 50 55 22 60 47 18 Application Example AC VX31 Style N.C. (VX31) N.O. (VX31) C.O.

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

76 25 19 Bore size [mm] H1 J K KA LZ M MM N P PG PH PL PW S Without rod boot With rod boot (One side) (Both sides) H ZZ d* e f h l ZZ ZZ 40 8 M8 x 1.25 6 14 71 11 M14 x 1.5 27 1/4 42 11 20 45 153 51 255 52 43 15 59 1/4 stroke 263 271 50 11 M8 x 1.25 7 18 80 11 M18 x 1.5 30 3/8 46 10 21 50 168 58 284 58 52 15 66 1/4 stroke 292 300 63 11 M10 x 1.25 7 18 99 14 M18 x 1.5 31 3/8 48.5 13 23 60

Series SV

For single SV4000-50-1ASV4000 For double SV4000-50-2AA SV 000 52U 1 Supply/Exhaust end block assembly SV 000 51D A Supply/Exhaust block assembly Connector entry direction (D-sub, flat types only) Series Mounting 1 2 3 4 Upward Lateral SV1000 SV2000 SV3000 SV4000 1 2 Nil D0 Direct mount DIN rail mount Supply/Exhaust block assembly specification P, E port size 10 11 12 13 14 15 16 18 For EX500

Proposals for Energy Saving

Solenoid specifications Symbol Apparent power VA Inrush Energized Power consumption W (energized) Temperature increase C (rated voltage) 4.5 45 3.2 35 6 55 7.5 60 6 50 8 60 11 65 9.5 60 11.5 65 Frequency Hz 50 20 (32) 11 60 17 (28) 7 50 40 18 60 35 12 50 50 21 60 45 17 Model Power supply OUT AC VXD21 DC IN AC VXD22 DC AC VXD23 DC Note 1) Reset voltage is 20% or more of rated voltage for AC

Modular F.R.L. Units

75.2 40 9 18 5 48 AC40-06-B 3/4 1/8 235.4 149.1 37.8 38.4 77.6 110 33.8 3 50 80.2 40 9 18 5 48 AC50-B 3/4, 1 1/8 282.4 220.1 41.2 93.1 110 43.3 3.2 70 96.2 50 11 20 6 60 AC55-B 1 1/8 292.4 234.1 44.7 98.1 110 43.3 3.2 70 96.2 50 11 20 6 60 AC60-B 1 1/8 297.4 234.1 44.7 98.1 110 43.3 3.2 70 101.2 50 11 20 6 60 Optional specifications Semi-standard specifications Metal bowl with level

10

4.5 5 5 5.5 6.5 D-P4DW 4 4 4 4.5 4 4.5 4.5 D-A9l/A9lV 7 7.5 8.5 9.5 9.5 10.5 12 D-Z7l/Z80 7.5 8.5 7.5 9.5 9.5 10.5 13 D-A5l/A6l 9 9 10 11 11 11 10 D-A59W 13 13 13 14 14 15 17 D-A3l/A44 9 9 10 11 11 11 10 * The switch mounting bolt is supplied with the switch.

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

connector LO 110 VAC 50/60Hz 5000mm 50 3 With lead wire M [115 VAC 50/60Hz] M plug connector Without lead wire MN 220 VAC 50/60Hz 4 Without connector MO [230 VAC 50/60Hz] Without connector cable WO M8 connector For type "W", DC voltage is only available.

Aluminum High Vacuum Angle Valve

XLD-50 XLD-63 XLD-80 XLD-100 XLD-160 50 123 48 1 12 40 26 16 7.5 41 65 170 66 2 11 55 41 20 15 63 70 183 79 2 11 75 52 20 17.5 68 88 217 100 3 11 87 95 70 20 20 72 90 256 117 3 11 114 110 83 20 26.5 98 108 321 154 3 11 134 130 102 20 38 133 138 335 200 3 11 190 180 153 30 40 114 Note 1) Dimension E applies when heater option is included.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

Because sizes 10, 20, 30 and 50 have the table press fit into an angular type bearing, they cannot be disassembled. 50 11-9-30