Thermo-chiller

Cooling Capacity HRS100-A -20/40(50 Hz) HRS100-A -20/40(60 Hz) 14 14 12 12 Ambient temperature 90F (32C) Cooling capacity [kW] Cooling capacity [kW] 10 10 Ambient temperature 90F (32C) Ambient temperature 104F (40C) Ambient temperature 104F (40C) 8 8 6 6 4 4 Ambient temperature 113F (45C) Ambient temperature 113F (45C) 2 2 0 0 41 [5] 50 [10] 59 [15] 68 [20] 77 [25] 86 [30] 95 [35] 41 [5]

Thermo-con/Rack Mount Type

It may be out of this range in some other operating conditions. 7 Thermo-con/Rack Mount Type Air-cooled HECR Series Cooling Capacity HECR002-A HECR-A Air-cooled Water-cooled HECR-W Model Selection Specific Product Precautions Options Optional Accessories Circulating fluid: Ethylene glycol 20% Circulating fluid: Tap water 800 800 700 700 Cooling capacity [W] Cooling capacity [W] Ambient temperature

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

Auto switch model Electrical entry direction Lead wire length (mm) Load voltage Type Electrical entry Indicator light Wiring (Output) Special function Applicable load 5 (Z) AC DC 0.5 (Nil) 3 (L) Perpendicular In-line Z76 5 V IC circuit 3-wire Yes Reed switch Z73 12 V 100 V Grommet Relay, PLC 24 V 2-wire Z80 5 V, 12 V 100 V or less No IC circuit Y59A Y69A 3-wire (NPN) IC circuit 5 V, 12

HRS100/150

Cooling Capacity HRS100-A-20/40(50 Hz) HRS100-A-20/40(60 Hz) 14 14 12 12 Ambient temperature 32C Cooling capacity [kW] Cooling capacity [kW] 10 10 Ambient temperature 40C Ambient temperature 32C Ambient temperature 40C 8 8 6 6 4 4 Ambient temperature 45C Ambient temperature 45C 2 2 0 0 5 10 15 20 25 30 35 5 10 15 20 25 30 35 Circulating fluid temperature [C] Circulating fluid temperature

RSH/RS1H

3 13 28 10.3 6 3 6 12 Conveyor lower limit position 1 R25 74 Stroke 2-M5 x 0.8 14 8 144 4 Front pressure port 12 Rear pressure port 70 4.5 2-Plug 12 18 40 (Width across corners 47) 36 Note 1) The figure shows dimensions at the maximum energy absorption capacity.

Air Cylinder/End Lock Series MBB ø32, ø40, ø50, ø63, ø80, ø100

(mm) CM2 Fd FZ FY FX FT FE FD B 4-FD Port 32 40 50 63 80 100 up to 700 25 79 32 64 10 3 7 50 C85 up to 800 31 90 36 72 10 3 9 55 up to 1000 38.5 110 45 90 12 2 9 70 Fd FY B CG1 up to 1000 39.5 120 50 100 12 2 9 80 up to 1000 45.5 153 63 126 16 4 12 100 up to 1000 54 178 75 150 16 4 14 120 FX FE FT MB FZ C95 Rear flange(G)/Locking at head end (Hl) Hl/ Rl Wl (mm) CA1 Cushion valve Stroke range

RSH/RS1H

Please order them by using the seal kit number corresponding to each bore size. 10-9-7 7 Series RSH/RS1H Dimensions/Bore Size: 20 RSH20-15 The figure shows an extended piston rod. 0.2 40 48 4-4.4 through Load carrying direction 12 3 13 28 10.3 6 3 6 12 Conveyor lower limit position 1 R25 74 Stroke 2-M5 x 0.8 14 8 144 4 Front pressure port 12 Rear pressure port 70 4.5 2-Plug 12 18 40 (Width

Air Cylinder/Low Friction Series MB l Q ø32, ø40, ø50, ø63, ø80, ø100

to 1000 up to 1000 up to 1000 102.5 122 1.7-28 Low Friction Series MBlQ With Mounting Bracket Front flange/(F) Front flange (mm) Port Cushion valve 4-FD Bore size (mm) Stroke range Fd FZ FY FX FT FE FD B 32 40 50 63 80 100 25 31 38.5 39.5 45.5 54 79 90 110 120 153 178 32 36 45 50 63 75 64 72 90 100 126 150 10 10 12 12 16 16 3 3 2 2 4 4 7 9 9 9 12 14 up to 700 50 55 70 80 100 120 up to 800

INFORMATION Modular Connection Type Residual Pressure Relief 3 Port Solenoid Valve For connecting to F.R.L. units AC25-A AC30-A AC40-A VP500 IN OUT VP700 Allows for space saving and reduced piping labor. Power consumption: 0.35 W (Without light) EXH Exam

VP500 VP700 Residual pressure relief 3 port solenoid valve (VP700) AW40-A + VP700 AC30C-A + VP500 Residual pressure relief 3 port solenoid valve (VP500) Air filter *1 (AF30-A) Mist separator *1 (AFM30-A) Regulator *1 (AR30-A) Filter regulator *1 (AW40-A) Silencer *1 (AN402-04) *1 Sold separately AC30-A 15-E664 VP500/700 Series VP500/700 Series RoHS How to Order VP 5 1 7 5 D 1 Y Modular connection

Smooth Cylinder/Low Speed Cylinder

80 M10 x 1.5 depth 22 37 3 40 25 40 22 Up to 300 110 60 71 16 10 M26 x 1.5 41 100 37 3 M12 x 1.75 depth 22 40 30 50 26 (mm) GB Rc, NPT port GB G port Bore size (mm) Stroke range (mm) 20 25 32 40 50 63 80 100 S TB TA ZZ GA 12 P 1/8 GA 12 P M5 x 0.8 11 12 12 77 11 114 Up to 200 11 12 12 77 11 119 12 1/8 12 M5 x 0.8 Up to 300 11 12 10 79 11 121 12 1/8 10 1/8 Up to 300 12 13 10 87 12 139 13

5

01 03 50 12 Part no.

Air Cylinder

10 (12) 1/8 12 10 (12) M5 x 0.8 18 15.5 13 14 8 29 8 12 2 35 5 26 M4 x 0.7 5 6 14 M8 x 1.25 24 25 Up to 300 301 to 1500 12 10 (12) 1/8 12.5 10 (12.5) M5 x 0.8 22 19.5 17 16.5 10 33 10 14 2 40 6 31 M5 x 0.8 5.5 8 16 M10 x 1.25 29 32 Up to 300 301 to 1500 12 10 (12) 1/8 10.5 10 (10.5) 1/8 22 19.5 17 20 12 40 12 18 2 40 6 38 M5 x 0.8 5.5 10 20 M10 x 1.25 35.5 40 Up to 300 301 to 1500 13 10

Series 12-CY3B Magnetic rodless cylinder ø15, ø20, ø25, ø32, ø40

/8 NPT1/8 G1/8 Rc1/4 NPT1/4 G1/4 12-CY3B15 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 12-CY3B20 20 100, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 (Both sides) 1300 25 12-CY3B25 Non-lube 32 12-CY3B32 100, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 12-CY3B40 40 Note 1) Stroke exceeding the standard stroke but below the maximum possible stroke is available

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

NPN) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) Reed switch Solid state switch A96V A96 5 V IC Yes Yes Grommet A93 M9N M9P M9B F9NW F9PW F9BW F9BA A93V M9NV M9PV M9BV F9NWV F9PWV F9BWV 100 V 24 V 12 V Relay, PLC 5 V, 12 V IC 12 V 5 V, 12 V IC Relay, PLC 24 V Grommet 12 V Diagnostic indication (2-color) 5 V, 12 V IC 12 V 2-wire

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

NPN) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) Reed switch Solid state switch A96V A96 5 V IC Yes Yes Grommet A93 M9N M9P M9B F9NW F9PW F9BW F9BA A93V M9NV M9PV M9BV F9NWV F9PWV F9BWV 100 V 24 V 12 V Relay, PLC 5 V, 12 V IC 12 V 5 V, 12 V IC Relay, PLC 24 V Grommet 12 V Diagnostic indication (2-color) 5 V, 12 V IC 12 V 2-wire

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

(The dimensions are marked .) 8-29-29 30 Series CXSW Dimensions; 25, 32 CXSW25 ZZ SS 12 S 12 12 12 30 (30) Z 6 30 2-R3.5 2-M8 x 1.25 x 6l (Hexagon socket head set screw) 28 1 8 78 1 60 0.2 60 0.2 60 0.2 0.2 80 64 35 6.3 5 2-R3.5 2-6.9 through 2-11 counterbore depth 6.3 8 12 14 4-M6 x 1 (Through-hole) 4-M5 x 0.8 thread depth 7.5 2-M6 x 1 x 18.5l, 2-M6 x 1 (Hexagon bolt) (Hexagon nut) 2-M6

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

Flow Direction Symbols on Body Meter-out type Meter-in type Symbol Indication symbol Flow Rate and Sonic Conductance Model ASD230FG ASD330FG ASD430FG ASD530FG ASD630FG Metric size 8, 10 6 8 10, 12 10 12 4, 6 6, 8 6 3/16" 1/4" 1/8" 5/32" 1/4" 5/16" 3/8" Tubing O.D. 3/16" 1/4" Inch size 1/4" 5/16" 3/8" 3/8" Flow rate (L/min (ANR)) 75 175 295 350 500 600 700 1200 1300 Controlled flow Free

Table of Contents

Polarity Flat ribbon cable connector SOL.A SOL.B 20 18 () () (+) (+) 1 station 19 17 15 13 11 9 10 12 14 16 18 20 2 stations SOL.A SOL.B () () (+) (+) 16 14 Flat Ribbon Cable Connector Assembly (Option) SOL.A SOL.B 12 10 () () (+) (+) 3 stations Note Assembly part no.

125

0.26 12 0.29 12 0.28 13 0.28 0.6 0.7 VEX342-04 1/2 13 0.20 13 0.24 12 0.29 14 0.20 0.6 0.7 Base This is not a manual override.

Series AP500

MPa) 30 psig (0.21 MPa) Inlet pressure: 45 psig (0.31 MPa) 35 0.24 30 0.21 Delivery pressure (MPa) Delivery pressure (psig) A 25 0.17 m1.12 (m28.4) 20 0.14 45 15 0.10 10 0.07 1.00 (25.4) 2 x 10-32 UNF depth 0.25 (6.3) (Mounting hole) 5 0.03 0 0.00 0 10 20 30 40 50 60 70 80 Flow Rate (slpm, N2) A Connections AP501A Input pressure : 2 psig (14 kPa) inch (mm) FV4 MV4 TW4 760 0 2.78 (70.6) 700