KJ

(mm) Note) Connection thread Rc 3.2 Mounting T (M) Weight (g) L1 M L2 Model hole Nylon Urethane 2.9 Mounting plate thickness 7 mm or less 1 4 KQ2E23-02 13 M12 x 1 3.4 14 31.5 15 13 15.5 17 14 1 8 KQ2E04-01 11 5.6 4 16 13 16 27.5 31 Connection thread 4 M12 x 1 14 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 3 8 1 2 3 8 1 2 KQ2E04-02 17 15 35 Applicable tubing KQ2E06-01 28 11 25 40 17 KQ2E06-02 15 6

Vacuum Equipment

Selection Graph (2)-1 Pad Diameter Selection Graph by Lifting Force Vertical Lifting (2 to 50) Selection Graph (1)-1 Pad Diameter Selection Graph by Lifting Force Horizontal Lifting (2 to 50) 50 40 32 25 20 16 13 10 8 50 40 32 25 20 16 13 10 8 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200

C76

13 8 22(25) 42.5 M10 x 1 42.5 45 57 12 89 19 227 12 20 M12 x 1.75 ( ) : In the case of air cushion With rod boot (mm) AM C e f K KK Item h 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 77 90 102 115 140 165 190 88 101 113 126 151 176 201 Stroke Bore 32 20 12 35 30 10 M10 x 1.5 40 24 14 46 35 12 M12 x 1.75 Item I Wh Stroke Bore 1 to 50 51 to 100 101 to 150 151 to

C76

13 M10 x 1 42.5 8 69 45 28.3 22(25) 57 12 42.5 227 89 19 12 20 M12 x 1.75 ( ) : In the case of air cushion With rod boot (mm) AM C e f K KK Item h 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 77 90 102 115 140 165 190 88 101 113 126 151 176 201 Stroke Bore 32 20 12 35 30 10 M10 x 1.5 40 24 14 46 35 12 M12 x 1.75 Item I Wh Stroke Bore 1 to 50 51 to 100 101 to 150

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz [115 VAC 50/60 Hz] 220 VAC 50/60 Hz [230 VAC 50/60 Hz] With surge voltage suppressor (Non-polar type) T With light/surge voltage suppressor (Non-polar type) With surge voltage suppressor (Non-polar type) Power saving circuit is not available for W type.

7ND9071en

The display starts to blink next position (50 % or 20 %).

HRX-OM-X084

Table 8-1 Quality criteria for clean water (tap water) Item Unit Criterion Circulating fluid Facility water pH (at 25 oC) 6.0 to 8.0 6.5 to 8.2 Electric conductance (at 25 oC) [S/cm] 100 to 300 100 to 800 Chloride ion [mg/L] 50 or less 200 or less Standard Sulfuric acid ion [mg/L] 50 or less 200 or less item Acid consumption (at pH 4.8) [mg/L] 50 or less 100 or less Total hardness [mg/L]

VQZ1000/2000/3000

Yes Note) None Note) Yes Yes (W/o indicator light) Yes (W/o indicator light) Note) Note) Coil voltage Note) 1 2 3 4 5 6 9 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Note) DIN is applicable to VQZ2000/3000. Bracket Assembly Note) Part no.

CG1

50 63 70 70 72 80 95 95 (19.5) (11.5) 1 12 12 12 12 13 13 10 (12) 24.2 6 6 6 8 10 10 107 13 13 13 16 20 20 0.25 stroke (22.5) 1.25 2 3 10 (12) 26.7 112 (13) 10 (12) 30.2 114 (13) (25) 10 (12) 13 13 34.6 132 (13) (25) 11.5 14.5 40.6 155 47.1 155 The minimum stroke for rod boot equipped style is 20mm.

42

53 70 0.65 (0.73) Rubber seal VQ530 5 1 12 0.33 3.4 13 0.37 3.7 60 63 63 0.58 (0.66) VQ5000 1/2 Exhaust center Metal seal VQ540 5 0 12 0.13 2.9 14 0.18 3.4 50 53 70 0.65 (0.73) 3-position Rubber seal VQ540 5 1 14 0.39 3.9 16 0.35 4.5 60 63 63 0.58 (0.66) Pressure center Metal seal VQ550 5 0 12 0.23 2.9 13 0.24 3.3 50 53 70 0.65 (0.73) Rubber seal VQ550 5 1 13 0.32 3.4 14 0.40 3.9 60 63 63

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

S 83 106 111 124 150 W 35 50 50 50 60 X 19 25 30 40 40 D 16.6 21.6 26.4 33.6 41.6 ZZ 103 132 137 156 182 E 3 2 2 2 3 N 11 18 18.5 20 26 F 10 13 13 16 16 MM M4 x 0.7 M4 x 0.7 M5 x 0.8 M6 x 1 M6 x 1 G 5.5 7.5 7.5 8 11 NN M10 x 1 M20 x 1.5 M26 x 1.5 M26 x 1.5 M32 x 2 H 13 20 20.5 22 29 I 12 15 18 23 J 6 6 8 8 10 K 11 8 10 15 16 L 57 66 70 80 92 Model CY3B15 CY3B20 CY3B25 CY3B32 CY3B40 P (Piping

HRX-OM-W002

Note1) Applicable model HRR012/018-A/W-10-T/MT HRR012/018/024/030-A/W-20-T HRR012/018/024/030-A/W-20-MT Rated flow50/60Hz Note23 L/min 7(0.36MPa)/10(0.42MPa) 10(0.42MPa)/14(0.40MPa) 10(0.32MPa/)/14(0.32MPa) Maximum pumphead 50/60Hz m 50 50 50 Pump Output W 320 550 Circuit protector A 15 15A10A for standard Recommended earth leakage breaker capacity A 15 Cooling capacity Note 4 W The cooling

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

For 3 Axes Step Axis Movement mode Speed Position Acceleration Deceleration Pushing force Trigger LV Pushing speed Moving force Area 1 Area 2 In position Comments mm/s mm mm/s2 mm/s2 mm mm mm Axis 1 ABS 500 100.00 3000 3000 0 85.0 50 100.0 10.0 30.0 0.5 Axis 2 ABS 500 100.00 3000 3000 0 85.0 50 100.0 10.0 30.0 0.5 0 Axis 3 ABS 500 100.00 3000 3000 0 85.0 50 100.0 10.0 30.0 0.5 Axis 1 INC

VQ7-6/7-8

50 50 50 Manual override Manual override 13 (A port) 13 (B port) 13 (A port) 13 (B port) A B A B 38 50 62 38 50 62 B A B A R1 (L 500) Cable with connector R2 P R2 R1 P (L 500) Cable with connector Mounting hole 2-6.5 42.5 42.5 Mounting hole 2-6.5 42.5 42.5 Indicator light Indicator light 93 93 25 (X port) 25 (X port) 5 3 37 5 3 37 22 22 14 14 1 1 25 25 25 25 X(PE) port 1/8 R1, R2 port

Cylinder with Lock

P 1000 1000 80 80 100 100 63 63 50 50 40 40 80 80 100 100 63 63 50 50 40 40 100 100 32 32 Load mass m [kg] Load mass m [kg] 50 50 32 32 10 10 1 100 500 1000 1 100 500 1000 400 300 200 400 300 200 Maximum speed V [mm/s] Maximum speed V [mm/s] 6 Cylinder with Lock Double Acting, Single Rod 32, 40, 50, 63, 80, 100 MWB Series RoHS How to Order 50 B 40 MWB With auto switch MDWB M9BW B 40 50

C95

Contents CK95-32 CK95-40 CK95-50 CK95-63 CK95-80 CK95-100 32 40 50 63 80 100 Kits include items 13 to 17 for 32, 12 to 18 for 40 to 100 from the table above.

Stability of suction position,

Mounting thread size 32 to 50 ZP3E-(32 to 50)UMll M10 x 1 8 to 10 ZP3E-(32 to 50)BMll 63 to 125 ZP3E-(63 to 125)UMll M16 x 1.5 13 to 15 ZP3E-(63 to 125)BMll Note 1) When mounting and removing the seal washer, rotate the set screw while the seal washer is being held.

JXCx-OMU0004

2 10 200 15 200 15 200 15 200 3 12 300 20 300 20 300 20 300 4 15 400 25 400 25 400 25 400 5 20 500 30 500 30 500 30 500 6 25 600 35 600 35 600 35 600 7 30 700 40 700 40 700 40 700 8 35 800 45 800 45 800 50 800 9 40 900 50 900 50 900 60 900 10 45 1000 55 1000 55 1000 70 1000 11 50 1200 60 1200 60 1200 80 1200 12 55 1400 65 1400 70 1400 90 1400 13 60 1600 70 1600 80 1600 100 1600 14 65 1800

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

60 50 100V AC Hz 110V AC Hz 200V AC Hz 220V AC Hz Closed center Exhaust center Pressure center 60 50 60 M5 X 0.8: 1.8(0.1) 50 60 (1) AC Push-turnlocking slotted style With light and surge voltage suppressor SYJ5000 Rc(PT)1/8: 4.5(0.25) SYJ7000 Rc(PT)1/8, 1/4: 12.6(0.7) Note 1) All AC voltage models have built-in surge voltage suppressor. 1.2-2 Series SYJ3000/5000/7000 Manifold Variations

Sine Cylinder Series REC

10.5 10 41 8 13 20 NANote) 0 -0.033 0 -0.033 0 -0.039 25 37.5 5.5 8 6 22 19.5 32 13 10.5 10 45 10 17 26 32 32 46.5 5.5 10 6 22 19.5 32 13 10.5 11 45 12 17 26 40 56.2 7 12 8 24 21 41 16 13.5 12.5 50 14 22 32 Note) For 32, a trunnion pivot bracket NA (42.5) is used as standard.