ZP

) Width across flat J (Hexagon) (G) (G) Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) M5 x 0.8 M5 x 0.8 Width across flat 14 (Hexagon) Width across flat 14 (Hexagon) E 13 E 13 8 3 3 3 3 M10 x 1 M10 x 1 (F) (F) D D M5 x 0.8 M5 x 0.8 6 6 8 Y Y A A a a C C b B 20 21 Dimensions Dimensions a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 2 x 2 2.5 3 Y a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y Model 04 06

CA2

3 !4 !5 !6 !7 !8 !

KR

8 1 8 KGE06-01 KGE06-02 KGE06-03 KGE08-01 17 30 Applicable tubing 6 M14 x 1 15 17 13.1 10.4 17 19 29 26.1 18.0 28 27 48 17 1 4 KGE08-02 M16 x 1 18.5 8 17 19 3 8 KGE08-03 19 15 35 1 4 KGE10-02 41.5 29.5 53 67 34.5 36.5 12.5 14 21 21 M20 x 1 10 22 24 3 8 KGE10-03 3 8 KGE12-03 92 59 37 14 12 M22 x 1 27 23 24 58.3 46.1 22 1 2 KGE12-04 41 18 3 8 KGE16-03 14 40 127 25 96 113 (96) 16 M28 x 1.5 32

4/5 Port Air Operated Valve Series SYJA3000

SYJ7000-21-1A 1 pc. 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 3 position exhaust center 3 position closed center (A) 4 (A) 4 (B) 2 (B) 2 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) The asterisk denotes the symbol for assembly.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

3 !

SQ1000/2000

D side 1 2 3 4 12 13 14 15 16 17 18 19 20 21 22 23 24 11 10 9 8 7 6 5 Stations Description/Type 4 2 Single 1 5 3 Metal 4 2 Rubber 4 2 Double (latching) 1 5 3 1 5 3 Metal 4 2 Rubber 4 2 Double (double solenoid) 1 5 3 1 5 3 4 2 Closed center 1 5 3 4 2 Valves Options Cylinder port sizes Exhaust center 1 5 3 4 2 Pressure center 1 5 3 4 2 Dual 3 port valve (A) 1 5 3 N.C.

Table of Contents

Then, rotate the needle clockwise from the fully closed position. 14-3-2 3 Precautions Be sure to read before handling. Refer to pages 14-21-3 to 14-21-4 for Safety Instructions and Common Precautions. Light/Surge Voltage Suppressor Piping Caution Caution 1.

Air Cylinder

Note 3) (1 pc.) (1 pc.) (Max. 3 pcs.) Note 3) D Double clevis (1 pc.) Note 3) (1 pc.) (1 pc.) (Max. 3 pcs.) Note 3) (1 pc.) U Rod trunnion (1 pc.) Note 4) (1 pc.) (1 pc.) (1 pc.) T Head trunnion (1 pc.) Note 4) (1 pc.) (1 pc.) (1 pc.) E Integrated clevis (1 pc.) Note 3) (1 pc.) Note 3) V Integrated clevis (90) (1 pc.) Note 3) (1 pc.)

Table of Contents

3.3 8.8 3 5 5.7 2.7 5 3 12 5.8 12 6 16 MHSH3-63DA MHSH3-80DA 4 4 3 3 7.2 8.2 10.2 11.2 6 6 18 21 Note) For dimensions, refer to the MHSH3-32 to 80D dimensions on page 12-7-39.

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

H E A B L1 L2 M F G 2 LQ1R1A-M 1/8" 1/4" 3/16" 1/8" 1/4" 3/16" 1/8" 3/8" 1/4" 3/8" 1/4" 1/2" 3/8" 1/2" 3/8" 3/4" 1/2" 3/4" 1/2" 1" 3/4" 1" 3/4" 12 15.5 1/8" 10 4 8 18.5 11.5 LQ1R4C-M LQ1R4B-M LQ1R4A-M LQ1R3D-M LQ1R3C-M LQ1R3B-M LQ1R3A-M LQ1R2F-M LQ1R2E-M LQ1R2D-M LQ1R2C-M LQ1R2B-M LQ1R2A-M 1/8" 19.5 4 16 14 15 6 12 28 16.5 22 1/4" 1/4" 19 25 5 17 20 9 18 36.5 23 21 27 3/8" 3/8" 23 29 6 21

High Purity Fluoropolymer

Metric size Inch size 1/4" 3/8" 1/8" 1/2" 3/4" 6 8 10 12 19 3/16" 1/8" 1/4" 3/8" 1/2" 3/4" 4 None 2 3 Male 4 P.21 Connector LQ2H 5 2 3 Female 4 P.22 5 2 3 Male 4 P.23 Elbow LQ2L 5 2 3 Female 4 P.24 5 2 3 Male 4 P.25 Run tee LQ2R 5 2 3 Female 4 P.26 5 2 3 Male 4 P.27 Branch tee LQ2B 5 2 3 Female 4 P.28 5 2 3 Union elbow LQ2E 4 P.29 5 2 Union tee LQ2T 3 4 P.29 5 Features 4 Series LQ1 ,TL/TIL

Special Applications: 10- (Clean Room Compliant), Size: 20, Backflow Function: K (Backflow Function), Thread: Rc, Port Size: 01 (1/8), Accessory: BG (B+G), Specifications: 3 (0.008 to 0.6 MPa Setting)

Special Applications: Clean Room Compliant, Size: 20, Backflow Function: Backflow Function, Thread: Rc, Port Size: 1/8, Accessory: B+G, Specifications: 0.008 to 0.6 MPa Setting, Pressure Unit: -

Series SV

SV400 SV300 SV200 SV100 Die-cast aluminium See thread types on page 86 for . 3/8: SY9000-27-1 1/4: SY7000-27-1-Q SY5000-27-1-Q SY3000-27-1-Q Sub-plate 8 1/2: SY9000-27-2 3/8: SY7000-27-2-Q Gasket SY5000-11-18 SY9000-11-2 SY7000-11-14 SY3000-11-25 9 For valve mounting (flat nickel plated) Round head combination screw SV2000-21-1 (M3 x 30) SV2000-21-2 (M3 x 40) SV3000-21-1 (M4 x 35) SX3000-

5

2, 3, 4, 5) D-A9 5 15 30 Note 1) 15 + 35(n 2) 2 (n = 2, 4, 6) Note 3) 50 + 35 (n 2) (n = 2, 3, 4, 5) D-M9V 5 20 35 20 + 35(n 2) 2 (n = 2, 4, 6) Note 3) 35 + 35 (n 2) (n = 2, 3, 4, 5) D-A9V 5 15 25 15 + 35(n 2) 2 (n = 2, 4, 6) Note 3) 25 + 35 (n 2) (n = 2, 3, 4, 5) D-M9WV D-M9AV 10 20 35 20 + 35(n 2) 2 (n = 2, 4, 6) Note 3) 35 + 35 (n 2) (n = 2, 3, 4, 5) D-C7 D-C80 5 15 50 15 + 45

Tamper Proof and Flat Head Screw

15.2 1/4" 13.2 27.8 39.3 17 29.5 8 18.5 41 53.7 9.5 R 3/8 19 1.5 47.7 23 20.9 AS321F-N03-09ST AS321F-03-10ST 18.5 NPT3/8 19 23 9.5 20.9 53.7 1.5 47.7 31.8 5/16" 15.2 29.5 41 18.5 10 43.3 21 AS321F-N03-11ST AS321F-03-12ST 20.9 31.8 43.3 32.8 21 17.9 3/8" 12 22 44.3 AS321F-N04-11ST AS421F-04-10ST 18.5 33.6 3/8" 17.9 33.6 47.9 21 21 10 47.9 28.6 1/2" NPT1/2 23.8 21.7 28.6 12 35.2 49.5 25.4

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Nickel plated Spring washer Steel wire @3 Felt Felt @4 Holder Stainless steel @5 8-21-19 19 Series MGG Construction 63 to 100/MGGB #3 !5 #6 q t #8 !4 !7 @2 @3 @4 r y e #7 u o !1 i w !8 #4 !6 A @0 @1 !9 #2 !

Smooth Cylinder/Low Speed Cylinder

=2, 3, 4, 5) (n=2, 4, 6) Note 3) (n-2) 2 35 + 35(n-2) 20 + 35 D-M9V 35 20 5 (n=2, 3, 4, 5) (n=2, 4, 6) Note 3) (n-2) 2 25 + 35(n-2) 15 + 35 D-A9V 25 15 5 (n=2, 3, 4, 5) (n=2, 4, 6) Note 3) (n-2) 2 D-M9WV D-M9AV 35 + 35(n-2) 20 + 35 35 20 10 (n=2, 3, 4, 5) (n=2, 4, 6) Note 3) (n-2) 2 50 + 45(n-2) D-C7 D-C80 15 + 45 50 15 10 (n=2, 3, 4, 5) (n=2, 4, 6) Note 3) D-H7 D-H7W D-H7NF (n-2) 2 60 +

SMC Pneumatic Clean Series

Direct mount type End lock Standard 1 3 3 1 2 Double rod Air Cylinder Direct mount type 10-/1121-/221 3 3 1 2 CA2 Air Cylinder Standard 10113 1 2 CUJ Mini-free Mount Cylinder 10-/1121-/221 3 3 1 2 CDU Free Mount Cylinder 10-/1121-/221 2 3 1 2 CQS Compact Cylinder 10-/1121-/221 2 3 1 2 CQ2 10113 1 2 REC Sine Cylinder Note) 11-/1221-/221 3 1 2 CXSJ 3, 4 Dual Rod Cylinder Note) 10-/11-/1221

Table of Contents

Flow Characteristics/Weight 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) Flow characteristics Weight (kg) Port size Model Type of actuation C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv 3 8 1 2 3 4 3 8 1 2 3 4 3 8 1 2 3 4 3 8 1 2 3 4 4.5 5.1 5.6 4.5 5.1 5.6 4.0 4.5 5.0 4.2 (4.0) 4.8 (4.5) 5.5 (4.8) 0.33 0.28 0.28 0.33 0.28 0.28 0.29 0.23 0.23 0.29 (0.28) 0.24 (0.27) 0.23 (0.30) 16 19 21 16 19 21 15 18