Table of Contents

) 06 (10) Y610(03) 04 (03) 04 Y610(5) (6) VHS40-06 02 03 04 E600(6) VHS2001 02 02 03 02 03 VHS30VHS30VHS40VHS50E30002 03 04 E30002 03 04 E40002 03 04 06 E500-06 E20001 02 03 (6) 06 10 06 10 E60006 10 E600E100-M5 (6) 02 03 04 06 IS1000E-30 IS1000E-30 02 03 04 IS1000E-20 01 02 03 Pressure switch with piping adapter 02 03 04 IS1000E-40 (6) Y24-01 02 Y34-01 02 Y34-01 02 Y44-02 03 Y54-03 04 Y14

ZP

Suffix of how to order (@) U2: M-5AU-2,U4: M-5AU-4-X83 U6: M-5AU-6-X83,02: KJH02-M5 ZP3(04/06/08) UM: ZP3(04/06/08) B: ZP3(04/06/08) UM: ZP3(04/06/08) B: ZP3(04/06/08) UM: ZP3(04/06/08) B: ZP3(04/06/08) UM: ZP3(04/06/08) B: ZP3A-T2-A5 ZP3A-T2-B5 ZP3A-T2-A10-B5 ZP3A-T2-A10-04 Note 1) ; in the table indicates the pad material. Note 2) @ in the table indicates the vacuum inlet.

AC

Description ARJM104, 6, 10 Manifold base How to Order ARJ1020F-M5-06 ARJ1020F-M5-04 M5 ARJ 20 10 F 04 1 Option Miniature regulator 1 Set at 0.2MPa Port size Only the adjusting spring is different from standard.

Vacuum Pad

Suffix of how to order (@) U2: M-5AU-2,U4: M-5AU-4-X83 U6: M-5AU-6-X83,02: KJH02-M5 ZP3(04/06/08) UM: ZP3(04/06/08) B: ZP3(04/06/08) UM: ZP3(04/06/08) B: ZP3(04/06/08) UM: ZP3(04/06/08) B: ZP3(04/06/08) UM: ZP3(04/06/08) B: ZP3A-T2-A5 ZP3A-T2-B5 ZP3A-T2-A10-B5 ZP3A-T2-A10-04 Note 1) ; in the table indicates the pad material. Note 2) @ in the table indicates the vacuum inlet.

Table of Contents

Lead wire length Nil 0.6 m Example) ZSE1-00-15CN-X129 ZS-20-5A-50 1 pc. 1 pc. 30 3 m 50 5 m 13-8-8 9 Ejector Valve Unit Series ZYY/ZYX How to Set the Pressure How to Use the Connector Hysteresis Hysteresis is the difference between the pressure at which the output signal turns ON and the pressure at which it turns OFF. It turns ON at the set pressure. 1.

VFS

Cable length 1.5 m 3 m VVFS2000-30A-3 5 m VVFS2000-30A-4 7 m Component parts Assembly part no. Cable length 1.5 m 3 m VVZS3000-21A-3 5 m VVZS3000-21A-4 8 m Component parts VVFS2000-30A-1 VVFS2000-30A-2 VVZS3000-21A-1 VVZS3000-21A-2 Plug 206837-1 1 pc. Cable clamp 206138-1 1 pc. Socket 66101-2 24 pcs.

V

-16ASUP B L O C K P L AT E P R PR VVQ1000-N5-Station (1-Max. stations) N A M E P L AT E [-N] Direct exhaust [-S] B U I LT I N S I L E N C E R VVQ1000-F-L(VQ1000) E L B O W F I T T I N G S A S S E M B LY I N D I V I D U A L EXH S PA C E R EXH B L O C K B A S E A S S E M B LY VVQ1000-19A(VQ1000) F P L KQPP L A N K I N G P L U G 23 04 06 08 10 01 03 07 2 S TAT I O N S M AT C H I N G F I T T

VFR

DZ, YZ) Light/Surge voltage suppressor (At EZ) Light/Surge voltage suppressor (At TZ) Applicable cable O.D. 2.3 to 2.8 Applicable cable O.D. 6 to 8 Applicable cable O.D. 6 to 8 [4.5 to 7] L plug connector: L M plug connector: M [ ]: Type Y 300 (Lead wire length) 300 (Lead wire length) Light/Surge voltage suppressor (At MZ) Light/Surge voltage suppressor (At LZ) n: Stations Stations L L1

Air Fittings & Tubing

X M5 M-5ALN-6 Body rotates at 360 around the stud axis M-5J P.2.1-50 M3 female X M3 male M-3UL Barb elbow 3.18/2.18 X M5 soft nylon P.2.1-51 Body rotates at 360 around the stud axis Nipple M-5ALU-3 Fitting to workpiece and fitting fitting connection P.2.1-49 polyurethane 3.18/2 X M5 M3 Universal tee M5 male X M5 male M-5N Body rotates at 360 around the stud axis 4/2.5 X M5 M3 female soft

Modular F.R.L. Unit

M AR50, 60 AR30, 40 J G J G A A IN OUT IN OUT H M M H Parts list Material Note No.

Best Pneumatics Vol. 14

) 06 (10) Y610(03) 04 (03) 04 Y610(5) (6) VHS40-06 02 03 04 E600(6) VHS2001 02 02 03 02 03 VHS30VHS30VHS40VHS50E30002 03 04 E30002 03 04 E40002 03 04 06 E500-06 E20001 02 03 (6) 06 10 06 10 E60006 10 E600E100-M5 (6) 02 03 04 06 IS1000E-30 IS1000E-30 02 03 04 IS1000E-20 01 02 03 Pressure switch with piping adapter 02 03 04 IS1000E-40 (6) Y24-01 02 Y34-01 02 Y34-01 02 Y44-02 03 Y54-03 04 Y14

A

I O N S P I S T O N R O D C L E V I S GKM: S T E E L, Z I N C C H R O M AT E P L AT E D Cyl.

SY

G: Approx. 300 H: Approx. 600 45.9 <46.6> [47.5] Rc 1/8 (external pilot port) Rc 1/8 (Pilot EXH port) 164.3 <165.7> [167.5] (lead wire length) 75.4 [81.9] 34.5 17.5 15.5 29.5 29.5 44.5 5-Rc 3/8, 1/2 (piping port) 96.5 L type plug connector (L): DIN terminal (D): M type plug connector (M): 3 4 5 03 04 03 04 3 4 5 03 04 3 4 5 SY9 40(R)-LSY9 40(R)-DSY9 40(R)-MApplicable

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

(Values at the initial period) JIS Symbol (A) 4 (B) 2 1 (P) 3 (R) 2-8-4 5 4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 Flow Characteristics 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) Flow characteristics Valve model Port size C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv L M L M L M L M Body ported VQD1121-M5 0.05 0.31 0.19 0.05 0.16 0.22 U W VQD1121 -M5 0.07 0.28 0.28 0.07 0.24 0.27

Modular F.R.L. Unit

) Y610(03) 04 (03) 04 Y610Note 5) Note 6) VHS201 02 02 03 02 03 VHS3000VHS3000VHS402 03 04 E600Note 6) E30002 03 04 E30002 03 04 E40002 03 04 06 E500-06 E20001 02 03 Note 6) E60006 10 E60006 10 06 10 E100-M5 02 03 04 06 IS1000E-30 IS1000E-30 02 03 04 IS1000E-20 01 02 03 Note 6) Pressure switch with piping adapter 02 03 04 IS1000E-40 Note 6) Y24-01 02 Y34-01 02 Y34-01 02 Y44-02 03 Y54-03 04

A

0.05MPa / 8PSI M5 M5 01 18 02 14 03 38 04 12 06 34 2000 18 14 3000 14 38 4000 38 12 34 Bowl Material Polycarbonate Accessory (Standard) Bowl Guard P O R T T H R E A D 0.7MPa supply, 0.01MPa pressure drop (new) Rc(PT)* Remove (N) when ordering N NPT F G(PF)* Remove (N) when ordering D I M E N S I O N S M I S T S E PA R AT O R NAFD30004000 ACCESSORIES M I S T S E P A R AT O R S Y M B

Modular F.R.L. Units

Example) IS10E-30N03-6PRZ Left Right Symbol Description Nq Body size 20 30 40 Pressure switch with piping adapter Nw Pipe thread type Nil Rc N2 NPT F2 G + 23 E (13) 01 1/8 02 1/4 03 3/8 04 1/2 06 3/4 + Ne Port size (5000) (3000) (500) C (23) 0.1 0.3 a Set pressure range Nil 0.1 to 0.4 MPa 61 0.1 to 0.6 MPa + 0.2 0.4 Port size MPa B Nil 0.5 m L 3 m Z 5 m + Semi-standard b Lead wire length

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

type> (Lead wire length) 75.4 [82.4] Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors 73.6 34.5 15.5 17.5 29.5 29.5 44.5 [1(P), 5(EA), 3(EB) port] 3/8, 1/2 96.5 L plug connector (L): M plug connector (M): DIN terminal (D, Y): 10-SY9140(R)-WO03 04 M8 connector (WO): D Y 10-SY9140(R)10-SY9140(R)-M10-SY9140(R)-L03 04 03 04 03 04

ZP

Buffer Specifications (Non-rotating) Stroke (mm) 10, 20, 30, 40, 50 1.0 3.0 3.0 Nm 5% At 0 stroke (N) At buffer stroke (N) Spring reactive force Tightening torque Dimensions: With Buffer ZP2-R WK 04 06 ZP2-R 20 WK 04 06 ZP2-R 30 WK 04 06 Width across flat 6 (Hexagon) Width across flat 6 (Hexagon) Width across flat 14 (Hexagon) Width across flat 6 (Hexagon) Width across flat 14 (Hexagon) Width

CG5-S

8 -04 R 1/2 -04 R 1/2 Straight Union KGH KGLU12-02 R 1/4 12 -03 R 3/8 -04 R 1/2 Applicable tubing O.D.