Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

L1 (Non-locking) Manual override 76.5 [83] 64.1 57.5 A A 42 29.5 B B 8 8.5 2n-One-touch fitting (A, B port) P=19 (Pitch) Applicable tube: C6: T0604 C8: T0806 25 [ ] for AC L plug connector (L) M plug connector (M) 0.8 0.8 87.1 [88.4] 95.1 122.6 [125.2] 108 [110.6] 127.2 141.8 19 19 32.5 32.5 (Lead wire length) 70.5 300 300 (Lead wire length) 87.6 [94.1] 64.1 70.5 76.5 [83] [ ] for AC

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

(Initial value) Base mounted Solenoid specifications Grommet(G)/(H), L plug connector (L), M plug connector (M), DIN terminal (D), M8 connector (W) Electrical entry JIS Symbol G, H, L, M, W D Internal pilot Rated coil voltage V DC AC50/60Hz 24, 12, 6, 5, 3 24, 12 10-SYJ51 M 2 4 10-SYJ52 M 2 4 100, 110, 200, 220 10% of rated voltage Allowable voltage fluctuation (A) 2 (A) 2 Standard 0.35

Fieldbus System

m is number of I/O Units.

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Lead wire length symbols: 0.5 m Nil (Example) C73C 3 m L (Example) C73CL 5 m Z (Example) C73CZ None N (Example) C73CN Since there are other applicable auto switches than listed, refer to page 6-5-45 for details.

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

(Type 20 manifold) 10 SYJ3 2 5 M 1 M3 3 Body ported Base mounted (4 port) 2 3 SYJ3 10 3 5 M (Manifold use only) Base mounted (5 port) 10 4 M 2 5 3 SYJ3 Clean series 4 port Manual override Port size Body option Nil: Non-locking push type Nil: Without sub-plate 3: Main/Pilot valve common exhaust type For type 31, S31, 32, S32 manifold 5 port R port P, E port (With gasket and screws) D: Push-turn

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

Pg.7 Indicator light 3.5 to 7 Cover diameter 1.5 Cross section 0.23mm2 < >: AC 61 53.5 35.5 0 1 M plug connector (M): VQZ312 (R)wMwC6, C8, C10, 02 Cover diameter 1.5 Cross section 0.23mm2 77 37 <42> 300 (Lead wire) 101.5 <102.5> 114 65 <66> Indicator light < >: AC 1.12-15 VQZ1000/2000/3000 Body Ported Dimensions: VQZ3000 2 position double 0 1 Grommet (G): VQZ322 (R)wGwC6, C8, C10, 02 300

Series VQ Base Mounted Metal Seal/Rubber Seal

LO: L plug connector G: Grommet 2 position double 2 SX With lead wire Without connector 3 position closed center VK 3 VZ M: M plug connector MO: M plug connector With lead wire 3 position exhaust center VF Without connector 4 1 set (F kit 7 station manifold base No.) 3 set (Single solenoid No.) 2 set (Double solenoid No.) 2 set (3 position solenoid No.)

V

I N G S C3 C4 C6 M5 N1 N3 N7 C3 C4 C6 M5 N1 N3 N7 A S S E M B LY VVQ1000-R-1-C6 VVQ1000-52A-C8 (VQ1000) O F B A C K P R E S S U R E A S S E M B LY [-B] VVQ1000-57A DIN R A I L M O U N T E D B R A C K E T [-D] VA C U U M E J E C T O R U N I T C H E C K VA LV E F O R P R E V E N T I O N O F S I L E N C E R (EXH P O R T) VVQ1000-JA BM (VQ1000) VVQ1000-18A Courtesy of Steven Engineering, Inc.

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

plug connector (M) 1 (P) 3 (R2) VQZ1000 M plug connector (M) 0.2 0.35 (A) 4 1 (P) 5 (R) DIN connector (Y) DIN connector (YZ) VQZ2000 N.C.

SYJ3000/5000/7000

Load factor: ( (Load weight x 9.8)/Theoretical force) x 100% Conditions Series CJ2 Series CM2 6 x 1 m AS3301F-06 8 x 1 m AS3301F-08 AN110-01 Series MB/CA2 Series CJ2 Series CM2 4 x 1 m Series MB/CA2 Body ported Tubing bore x Length Speed controller Silencer Base mounted Tubing bore x Length Speed controller Silencer AS2301F-04 6 x 1 m 4 x 1 m AS1301F-04 AN120-M5 SYJ5120-M5 SYJ5140-01 AN101

Rubber seal 5 Port Solenoid Valve Series SYJ7000

Load factor: ( (Load weight x 9.8) /Theoretical force) x 100% Conditions Series CJ2 Series CM2 6 x 1 m AS3301F-06 12 x 1 m AS4001F-12 AN200-02 AS2301F-06 AN110-01 Series MB/CA2 Series CJ2 Series CM2 Series MB/CA2 Body ported Tubing bore x Length Speed controller Silencer Base mounted Tubing bore x Length Speed controller Silencer AN200-02 AN3301F-06 AS1301F-06 6 x 1 m AS3001F-06 SYJ7120-01

CJ2

pin Knuckle pin Material: Stainless steel Material: Rolled steel Material: Stainless steel Dd9 d m L t Set ring Part No.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

PA/B 3.6 (0.2) A/BR 3.24 (0.18) Rc(PT)1/8: Rc(PT) 1/4: M5: PA/B 3.42 (0.19) A/BR 3.24 (0.18) PA/B 3.6 (0.2) A/BR 3.6 (0.2) C4: C8 : C4: Valve effective area mm2 (Cv factor) Note 2) C6: C10: C6: C8: Manifold base weight W (g) Note 3) W = 65.4n + m + 128.2 W = 13n + m + 36 W = 41.2n + m + 77.6 (n: Number of SUP/EXH blocks, m: DIN rail weight) Note 1) In cases such as when many valves are operated

Table of Contents

H MM NN MQ10-M MQ16-M MQ20-M MQ25-M MQ28-M 10 10.5 M5 x 0.8 M3 x 0.5 16 11.5 M6 x 1.0 M4 x 0.7 20 13.5 M8 x 1.25 M5 x 0.8 25 16.5 M10 x 1.25 M6 x 1.0 28 22.5 M14 x 1.5 M8 x 1.25 Clevis pin d Dd9 m m l t L t Applicable bore (mm) Applicable snap ring Part no.

Series VQ Metal Seal/Rubber Seal Body Ported

6 Voltage 1 to 6 L M 2 3 (VQ0) (VQ1000) (VQ2000) L M 2 3 (VQ0) (VQ1000) (VQ2000) VQ110L VQ110L Double (latching) Double (latching) Voltage 1 to 6 Voltage 1 to 6 The direction of the L and M connectors of a pilot valve is opposite to that of the single and double styles.

CJ2

Lead wire length symbols: 0.5 m Nil (Example) C73C 3 m L (Example) C73CL 5 m Z (Example) C73CZ None N (Example) C73CN Since there are other applicable auto switches than listed, refer to page 6-3-13 for details.

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

A A n-One-touch fitting (A port) (Pitch) P=19 21 C6: Applicable tube T0604 C8: Applicable tube T0806 Rc (PT) 1/8 L plug connector (L) M plug connector (M) (Non-locking) Manual override (P/R port) 4-Rc (PT)1/4 69.5 [76] 69.5 [76] 57.1 50.5 35 8.5 63.5 63.5 63.5 4-Rc (PT)1/4 (P/R port) 14 1 21.5 21.5 A A 14 1 9.5 C6: MAX. 6 C8: MAX. 6.5 9.5 (Pitch) n-Rc (PT)1/8 (A port) P=19 21 22.5 22.5 43

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

1 to 12 stations 24 D side D-sub connector (25P) kit, with 3.0 m cable D side D-sub connector kit D-sub connector (25P) kit, with 5.0 m cable Flat ribbon cable (26P) kit, without cable P kit Flat ribbon cable (26P) kit, with 1.5 m cable 24 stations 1 to 12 stations 24 (1) Flat ribbon cable (26P) kit, with 3.0 m cable D side Flat ribbon cable (26P) kit, with 5.0 m cable 26P 20P ( ) Flat ribbon

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

-m-L3m-mmm : 0 x 00016F (367) PF2M701-m-L4m-mmm : 0 x 000170 (368) PF2M725-m-Lm-mmm : 0 x 00017D (381) PF2M725-m-L2m-mmm : 0 x 00017E (382) PF2M725-m-L3m-mmm : 0 x 00017F (383) PF2M725-m-L4m-mmm : 0 x 000180 (384) PF2M702-m-Lm-mmm : 0 x 000171 (369) PF2M702-m-L2m-mmm : 0 x 000172 (370) PF2M702-m-L3m-mmm : 0 x 000173 (371) PF2M702-m-L4m-mmm : 0 x 000174 (372) PF2M750-m-Lm-mmm : 0 x 000181

A

m 0 . 0 1 m m 0 . 0 1 m m 0 . 0 1 m m 0 . 0 1 m m 0 . 0 1 m m Fluid A i r A i r A i r A i r A i r A i r Operating Pressure 0.2~0.6MPa 0.15~0.6MPa 0.2~0.6MPa 0.15~0.6MPa (29~87PSI) 22~87PSI 29~87PSI 22~87PSI Ambient and Fluid Temperature 0 ~ 6 0 C ( 3 2 ~ 1 4 0 F ) 0 ~ 6 0 C ( 3 2 ~ 1 4 0 F ) Max Operating Frequency 1 8 0 c . p . m 1 8 0 c . p . m Lubrication N o n l u b e N o n l u b