Flow Rate Range: 5 to 500 L/min, Thread Type: NPT, Port Size: 1/2, Output Specifications: NPN; Analog 1 to 5 V, Option 1: w/Lead Wire w/Connecter + Connector Cover, Unit Specifications: Unit Selection Function, Option 2: With Bracket, Calibration Certificate: With Calibration Certificate

Flow Rate Range: 5 to 500 L/min, Thread Type: NPT, Port Size: 1/2, Output Specifications: NPN; Analog 1 to 5 V, Option 1: w/Lead Wire w/Connecter + Connector Cover, Unit Specifications: Unit Selection Function, Option 2: With Bracket, Calibration Certificate: -

Flow Rate Range: 5 to 500 L/min, Thread Type: NPT, Port Size: 1/2, Output Specifications: NPN; Analog 1 to 5 V, Option 1: w/Lead Wire w/Connecter + Connector Cover, Unit Specifications: SI Unit Only, Option 2: Without Bracket, Calibration Certificate: With Calibration Certificate

Flow Rate Range: 5 to 500 L/min, Thread Type: NPT, Port Size: 1/2, Output Specifications: NPN; Analog 1 to 5 V, Option 1: w/Lead Wire w/Connecter + Connector Cover, Unit Specifications: Unit Selection Function, Option 2: Without Bracket, Calibration Certificate: With Calibration Certificate

Precision Regulator

In addition, the product for the following specifications is also available: Prefix (10-): Clean series Prefix (25A-): Secondary battery compatible Prefix (80-): Ozone resistant (Fluororubber specification) IRM: Manifold specifications (For IR1000 and IR2000 series only.

Process Valve

VNA1A -6A, 8A, 10A VNA2 -10A, 15A VNA3 -20A VNA4 -25A VNA5 -32A VNA6 -40A VNA7 -50A No.

70pvvna

VNA1A -6A, 8A, 10A VNA2 -10A, 15A VNA3 -20A VNA4 -25A VNA5 -32A VNA6 -40A VNA7 -50A No.

C76

CH LT CO 4-AB CE CT CR CU CG (mm) Rod foot (Flange) AB 7 9 Rod trunnion NB Rod clevis AB 7 9 Bore CE CG 41 52 CH 35 40 CO 4 3 CR 24 30 CT 20 28 CU TDe8 TZ 47.9 59.3 XB 47 57 CW 13 17 CZ 57.9 72.3 LT 4 5 XB 47 57 AO AU 14 20 LT 4 5 NH 28 33 TF 28 30 TR 52 60 UR 49 58 US 66 80 W 34 40 XS 48 60 10 0.025 0.047 12 0.032 0.059 32 40 34.5 46.8 7 10 9 12 42.5 58.2 6-10-12 13 Series C76 Cylinder:

C76

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Rod trunnion, Head trunnion: C76T32, C76T40 TDe8 TDe8 TZ TZ Port Port NB XB XC + Stroke Rod clevis, Head clevis: C76C32, C75C40 XB XC + Stroke CZ CW CH LT LT 4-AB 4-AB CO CO CR CT CE CE CR CU CG CG (mm) Rod/Head trunnion Rod foot (Flange) Rod clevis,

LC6D/LC6C

F (LC6D-2 only) +24V GND CW+ CW CCW+ CCW PD+ PD A B C D E 7 6 3 10 CW CW 10 10 2 R 330 CCW input 330 CCW input 2 2 9 1 CCW CCW 8 9 9 5 4 14 13 12 R 330 PD input 1 PD 8 11 F Functions Function change-over switch Input signal terminal CW pulse input terminal By applying the pulse input, the actuator moves from the motor side to the end side.

Series LX Dedicated Stepper Motor Driver and Positioning Driver Series LC6D/LC6C

F (LC6D-2 only) +24V GND CW+ CW CCW+ CCW PD+ PD A B C D E 7 6 3 10 CW CW 10 10 2 R 330 CCW input 330 CCW input 2 2 9 1 CCW CCW 8 9 9 5 4 14 13 12 R 330 PD input 1 PD 8 11 F Functions Function change-over switch Input signal terminal CW pulse input terminal By applying the pulse input, the actuator moves from the motor side to the end side.

ISO Cylinder

C85 C85W C85 C85K C85K C85R C75 C75W C75 C75K C75K C75R Rod clevis: Cl75El lN (With mounting bracket) (XB) Standard LT CG CE CR CO 4 x AB Head clevis: Cl75El lN (With mounting bracket) CZ Width across flats CW (XC + Stroke) CH LT CG CE CR CO 4 x AB CU CT [mm] Bore size AB CE CG CH CO CR CT CU CW CZ LT (XB) (XC) 32 7 9 41 35 4 24 20 46.8 13 57.9 4 47 97 40 9 12 52 40 3 30 28 58.2 17 72.3

Series: 25A-PFMB7, Flow Rate Range: 501 (5 to 500 L/min), Thread Type: Rc, Port Size: 04 (1/2), Out Specification: E (Out 1: PNP, Out 2: Analog 1 to 5 V), Lead Wire: W (Lead Wire w/Connector 2 m, Rubber Cover for Connector, Silicone Rubber), Unit Specifications: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Bracket: R (w/Bracket)

Series: 25A-PFMB7, Flow Rate Range: 5 to 500 L/min, Thread Type: Rc, Port Size: 1/2, Out Specification: Out 1: PNP, Out 2: Analog 1 to 5 V, Lead Wire: Lead Wire w/Connector 2 m, Rubber Cover for Connector, Silicone Rubber, Unit Specifications: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Bracket: w/Bracket, Calibration Certificate: -

Made to Order

Double clevis CT 2 x N D E M Y CD hole H10, Axis d9 RR CW CU CX +0.4 +0 T L CZ 0.1 0.3 [mm] Part no.

LEF-OM002xx

) Actuator stroke 50mm Origin offset0 (Initial input value) CCW CW -50 -40 -30 -20 -10 0 stroke[mm] Origin 50mm Changed to Origin offset10 -40 -30 -20 -10 0 10 CCW CW stroke[mm] Origin 50mm Changed to Origin offset-10 -60 -50 -40 -30 -20 -10 CCW CW stroke[mm] 33 - 4.

LEF-OM006xx

) CCW : CW : . 1) (2mm/) 2 1 CCW CW 2 3 OFF(ON) -28- (=) P.25 =02mm) =0 a) CCW 50mm =0() =10 50mm CCW CW 0 10 20 30 40 50 [mm] 50mm CCW CW 10 20 30 40 50 60 [mm] b) CW )50mm =0() =10 =-10 50mm CCW CW -50 -40 -30 -20 -10 0 [mm] 50mm CCW CW -40 -30 -20 -10 0 10 [mm] 50mm CCW CW -60 -50 -40 -30 -20 -10 [mm] -29- 4/ A 50mm () 5m 5m 10% 15m 20% -30- 5./ 5.1 (LEC ) ,,

3-Position Rotary Table

(CCW: Counterclockwise, C: Center, CW: Clockwise) C C C C CW CCW CW CCW CW CCW CW CCW Left 90: Right 90 Left 45: Right 45 Left 90: Right 30 Left 60: Right 90 Working Principle This model uses a 3-position 5-port solenoid valve (pressure center).

5 Port Air Operated Valve Series SYA3000/5000/7000 1

VFRA4211-03 VFRA4211-04 VFRA4311-03 VFRA4311-04 VFRA4411-03 VFRA4411-04 VFRA4511-03 VFRA4511-04 3/8 1/2 3/8 1/2 3/8 1/2 3/8 1/2 3/8 1/2 13 15 14 15 13 14 13 14 13 (5.0) 15 (5.3) 0.30 0.30 0.31 0.30 0.32 0.28 0.31 0.30 0.27 (0.42) 0.22 (0.42) 3.2 3.8 3.4 4.0 3.2 3.5 3.2 3.7 3.2 (1.3) 3.7 (1.5) 1.1 1/8 Single 2 position 1.2 1/8 Double Closed center 1.2 1/8 Exhaust center 1.2 1/8 3 position

V100

Common exhaust: VV3P7-41Stations 1-04 (G) (E) (T) (D, Y) N.C.