CL

40 40 52 52 14 14 14 15 17 17 21 21 16 16 11.5 13.5 13.5 19 19 19 112.5 121 133 141.5 150 167 18.5 18.5 18.5 Without rod boot With rod boot Bore (mm) 40 50 63 80 100 125 140 160 LX S X LS LT LY MM N W YB YA P ZZ e 36 45 45 60 60 75 75 75 ZZ h 59 66 66 80 81 f H 51 58 58 71 72 l 1/4 3/8 3/8 1/2 1/2 1/2 1/2 3/4 1/4 Stroke 1/4 Stroke 1/4 Stroke 1/4 Stroke 1/4 Stroke 1/4 Stroke 1/4 Stroke 1/

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3 !5 @3 !0 !

ATEX Compliant 5 Port Solenoid Valve Series 52-SY

Note 2) 52-SY9000 has no bracket. 5 7 9 52-SY5000 52-SY7000 52-SY9000 Thread type Type of actuation Nil F N T Rc G NPT NPTF 2-position single 2-position double 3-position closed centre 3-position exhaust centre 3-position pressure centre 1 2 3 4 5 A, B port size (Body ported type) Piping type Port size Applicable series Symbol 01 C4 C6 C8 N3 N7 N9 02 C8 C10 N9 N11 02 03 C8 C10 C12 N9 N11

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

3 !

CV/MVGQ

MQQ M RHC 3.

CV/MVGQ

3 !4 !5 !6 !7 !8 !9 @0 @1 @2 @3 @4 @5 No.

JIS Standard Hydraulic Cylinder

8 39 130 11 11 88 40 109 30 62 38 52 40 23 15 M10 x 1.25 25 to 1400 65 12 21 15 11 36 30 3/8 42 130 11 11 95 46 118 30 69 45 52 52 1/3.5 stroke 50 28 15 M10 x 1.25 25 to 1400 76 85 52 15 27 19 11 43 35 1/2 46 142 14 13 115 58 145 30 52 55 63 30 20 M12 x 1.5 25 to 1500 90 98 63 15 27 19 14 43 35 1/2 52 148 18 15 132 65 165 35 65 55 80 35 20 M16 x 1.5 25 to 1800 110 17 22 22 16 44 44 3/4 65

CQ2

3 !

LX

3 0.5 3 3 3 N.O.

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3 0.5 3 3 3 Proximity switch types Home position switch 3 wire/NPN 3 wire/PNP 3 wire/NPN 3 wire/PNP 3 wire/NPN 3 wire/PNP 2 wire 3 wire/NPN 3 wire/PNP 2 wire N.O.

CNA

8 3/8 1/2 1/2 M14 x 1.5 27 30 31 37 40 6 7 7 11 11 M8 x 1.25 14 18 18 22 26 30 35 35 40 40 27 32 32 37 37 60 70 86 102 116 22 27 27 32 41 96 108 115 139 160 1/8 1/4 1/4 1/4 1/4 1/8 1/8 1/4 1/4 1/4 44 52 64 78 92 16 20 20 25 30 32 40 40 52 52 10 10 10 14 14 85 95 102 123 144 15 17 17 21 21 52 16 20 20 20 22 12 13 18 23 25 12 15 12 18 20 10 12 15 17 19 8 11 11 13 16 25 to 500 25 to 600 32 to

CNA

8 3/8 1/2 1/2 M14 x 1.5 27 30 31 37 40 6 7 7 11 11 M8 x 1.25 14 18 18 22 26 30 35 35 40 40 27 32 32 37 37 60 70 86 102 116 22 27 27 32 41 96 108 115 139 160 1/8 1/4 1/4 1/4 1/4 1/8 1/8 1/4 1/4 1/4 44 52 64 78 92 16 20 20 25 30 32 40 40 52 52 10 10 10 14 14 85 95 102 123 144 15 17 17 21 21 52 16 20 20 20 22 12 13 18 23 25 12 15 12 18 20 10 12 15 17 19 8 11 11 13 16 25 to 500 25 to 600 32 to

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Note 3) For calculation on the longitudinal dimension of the intermediate strokes, refer to page 7-6-3.

Smooth Cylinder/Low Speed Cylinder

Installed state New Shortened installation width Reduced width for short pitch mounting (mm) Compact foot type width A (mm) New New Existing foot type width B (mm) Bore size (mm) 1 unit 2 units 3 units 12 16 20 25 32 40 50 63 80 100 19 38 57 25 44 19 38 57 29 48 26 52 78 36 62 26 52 78 40 66 26 52 78 45 71 Existing model 26 52 78 52 78 31 62 93 64 95 36 72 108 77 113 42 84 126 98 140 45 90

ZP

Pad typePad diameter Pad diameter (Symbol) Pad type 150 32 250 300 340 H (Flat with rib) HT (Thin flat with rib) Dimensions: Pad Unit ZP2-32H 26 2.5 2 8 2 5 32 34 14 3 x 3 3 x 5 ZP2-300H ZP2-340H 240 4 x M8 x 1.25 276 160 11 10 13 10 50 45 23 52 52 19 340 298 301 344 88 88 4 x 9 4 x 14 4 x 14 4 x 9 33 Series ZP2 Heavy-duty Pad Dimensions ZP2-150HT ZP2-250HT 150 4 x M8 x 1.25 103 124 11 10

2 Phase Stepper Motor/Without Motor Brake Series LXS

3 0.5 3 3 3 N.O.

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

PL PW S FV FD FT FX FY FZ Without rod boot With rod boot H ZZ d* e* f h l ZZ 40 11 M14 x 1.5 27 1/4 42 11 20 45 153 60 9 12 80 42 100 51 215 52 43 15 59 1/4 stroke 223 50 11 M18 x 1.5 30 3/8 46 10 21 50 168 70 9 12 90 50 110 58 237 58 52 15 66 1/4 stroke 245 63 14 M18 x 1.5 31 3/8 48.5 13 23 60 182 86 11.5 15 105 59 130 58 254 58 52 17.5 66 1/4 stroke 262 80 17 M22 x 1.5 37 1/2 55 15 23

ZP

Pad typePad diameter Pad diameter (Symbol) Pad type 150 32 250 300 340 H (Flat with rib) HT (Thin flat with rib) Dimensions: Pad Unit ZP2-32H 26 2.5 2 8 2 5 32 34 14 3 x 3 3 x 5 ZP2-300H ZP2-340H 240 4 x M8 x 1.25 276 160 11 10 13 10 50 45 23 52 52 19 340 298 301 344 88 88 4 x 9 4 x 14 4 x 14 4 x 9 33 Series ZP2 Heavy-duty Pad Dimensions ZP2-150HT ZP2-250HT 150 4 x M8 x 1.25 103 124 11 10

5 Port Solenoid Valve Series SY3000/5000/7000/9000

Includes bushing assembly (SY5000-52-3A) 3 pcs. 1 SY560--(-Q) Valve VQC P, R port (1: One-touch fitting for 10, 2: One-touch fitting for 3/8") Includes bushing assembly (SY5000-52-3A) 3 pcs. 1 2 2 SUP/EXH block assembly SY5000-55A(-Q) VQZ 3 End block assembly SY5000-56-1A(-Q) For D side (Bushing assembly: Not available for SY5000-52-3A) SQ 4 End block assembly SY5000-56-1B(-Q) For U side

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VX210 VX220 VX220 VX230 VX230 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 1/4, 3/8 1/4, 3/8, 1/2 18 22 30 22 30 (76) (86) (93) 2, 3, 4.5 3, 4.5, 6 8, 10 3, 4.5, 6 8, 10 40 45 50 45 50 68 78 85 85 92 30 9 19.5 27 6 8 8 8 8 12.8 19.5 42.5 42.5 42.5 85 36 46 46 15 10.5 19 52 52 52 96.5 17.5 35 22.5 32 22.5 43 61 49 98 65 14 23 55 55 55 103.5 10.5 19 58 58 58 103 17.5 40 25 36 25 46 63 50 101 68