Vacuum (Check leakag) 100 lloninntal lype Uacuum tntny: Without BufleU Wilh Ban[eil ]itting Specif ications l',.1.t':.,.l,',,,l,. : : : t : . : : . : : . ,t I , i I .. .1. q2-6 8:t) 04 . 06 Nylon tube, 04 . 06 Urethane tube olQ-s16 04 . 06 Nylon tube, a4. 66 Urethane tube szj-sgz 04. oO Nylon tube, @4. oO Urethane tube s40-o5O o6 Nylon tube, oG Urethane tube Vacuum entry Connection o2-o I M 5 x
(Example) SS3YJA3-41-03-M3 . 1 set SYJA314. 1 set SYJA324. 1 set SYJ300-10-2A . 1 set The asterisk denotes the symbol for assembly.
- [] PLC RWw RWw bit 10.1.2 0 (2) [OUT]()[] (P.41) 1 ON OFF OFF 2 10.1.2 (2) [OUT]()[] (P.41) 3 4 5 0 6 ON ON *1 7 *1 8 *2 9 *1 *2 A *2 B (*1*2) C 17.
36 21 33.9 43.2 18.5 13.2 10 1/4" 40.4 35.4 34.4 29.4 18.5 34 18.5 AS321FG-02-06 AS221FG-N02-09 27.2 36.4 60 17 27.8 39.3 12.8 15.2 6 5/16" 20 21 36 AS321FG-02-08 AS221FG-N02-11 33.9 43.2 63 18.5 29.5 41 15.2 17.9 8 3/8" 23 43.8 48.8 21.8 19 42.8 37.8 R 1/4 AS321FG-02-10 AS321FG-N02-07 27.8 39.3 67 21 31.8 43.3 18.5 13.2 10 1/4" 17 60 NPT 1/4 AS321FG-02-12 AS321FG-N02-09 19 21.8 29.5 41
Auto Switch Mounting Bracket Part No. 32 40 50 63 80 100 Auto switch model Bore size (mm) Bore size (mm) 40 32 50 63 80 100 Foot (1) MNB-L06 MB-L03 MB-L04 MB-L05 MB-L08 MB-L10 D-A5/A6 D-J5/F59F Flange MNB-F03 MNB-F04 MNB-F05 MNB-F06 MB-F08 MB-F10 BT-03 BT-03 BT-05 BT-05 BT-06 BT-06 Single clevis MB-C08 MB-C10 MB-C03 MB-C04 MB-C05 MB-C06 D-A3/A44 D-G39/K39 BMB2 -032 BMB2 -040 BMB1 -050 BMB1
Auto Switch Mounting Bracket Part No. 32 40 50 63 80 100 Auto switch model Bore size (mm) Bore size (mm) 40 32 50 63 80 100 Foot (1) MNB-L06 MB-L03 MB-L04 MB-L05 MB-L08 MB-L10 D-A5/A6 D-J5/F59F Flange MNB-F03 MNB-F04 MNB-F05 MNB-F06 MB-F08 MB-F10 BT-03 BT-03 BT-05 BT-05 BT-06 BT-06 Single clevis MB-C08 MB-C10 MB-C03 MB-C04 MB-C05 MB-C06 D-A3/A44 D-G39/K39 BMB2 -032 BMB2 -040 BMB1 -050 BMB1
, 42, 43): DXT192-40-1TA Interface regulator (only for type 41, 42, 43): NARBZ3000-00-P Typ 20 NVV5Z3-2O-@1-OOr Stations a otl?
Type SS5YJ5-42 Type SS5YJ5-43 Adapter gasket SYJ500-6-1 Adapter gasket SYJ500-6-1 Applicable manifold base Type SS5YJ5-40 Type SS5YJ5-41 Type SS5YJ5-42 Type SS5YJ5-43 Applicable manifold base Type SS5YJ5-20 Refer to page 92 prior to handling.
Filter unit (F) ZX100-K8-F 1 41 51 2-R1.8 (Mounting hole) 3.6 (Mounting hole) 8.8 4.8 1 10 19 Filter unit (Mounting hole) 13-2-53 53 Series ZX Vacuum Pump System/Manifold Specifications Function Max. number of units 8 units Vacuum supply from PV port of the manifold is common supply. Air supply from PS port is common supply.
, 42, 43): DXT192-40-1TA Interface regulator (only for type 41, 42, 43): NARBZ3000-00-P Typ 20 NVV5Z3-2O-@1-OOr Stations a otl?
Applicable bore (mm) C D d H Applicable bore (mm) C D d H 5 26 30 12.5 8 M8 x 1.25 15 M22 x 1.5 26 13 20 20 SOR-20 NT-02 6 32 36.9 16.5 8 M10 x 1.25 19.6 M24 x 1.5 32 17 25, 32 25 SOR-25 NT-03 8 38 43.9 21.0 9 M14 x 1.5 M30 x 1.5 25.4 38 22 40 32 SOR-32 NT-04 11 41 47.3 26 11 M18 x 1.5 31 M33 x 2.0 41 27 50, 63 40 SOR-40 NT-05 13 31 M22 x 1.5 37 32 80 NT-08 16 39 M26 x 1.5 47.3 41 100 NT-
35.5 37 2.3 2.3 2.3 2.3 3.2 55 53 70 70 90 15.4 8 10.5 10.5 13 5.4 6.5 8.5 8.5 11 43.9 45.8 54 55.5 65.8 34 40 54 54 66 30 41 50 50 70 30 38.4 38.4 47.5 63 66.4 74.3 74.3 80.3 26 29.4 37.3 37.3 43.3 44 44 44 44 44 72.4 85.6 91.7 93.2 175.5 11 10.5 10.5 8 6.5 91.4 121.9 153.9 155.9 242.6 25.5 24.8 28.9 30.4 42.2 40 53 70 75 95 5 3.5 1.5 1.2 3.2 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1
As the circulating fluid temperature is within the set range of "AS.06", "AS.06" alarm monitoring starts. Status (2): The circulating fluid temperature becomes within the set range of "AS.04". "AS.04" alarm monitoring starts.
As the circulating fluid temperature is within the set range of "AS.06", "AS.06" alarm monitoring starts. Status (2): The circulating fluid temperature becomes within the set range of "AS.04". "AS.04" alarm monitoring starts.
L6 5.5 L2 DIN rail holding screw (For DIN rail mounting) 8 47 1.5 DIN rail holding screw (For DIN rail mounting) 2 x M4 mounting hole Light/surge voltage suppressor Marker groove 1 0 5.1 5.5 1.7 A B A B A B A B A B 3 2 92.6 14 A 14 A 14 A 14 A A 14 35 83 106 90 60.5 0 1 5 4 40.9 PWR 2 3 8 4.6 B 12 B 12 B 12 B 12 B 12 PCI BUS IN BUS OUT 53 7 8 8 4.6 ( ) C6: 3.6 N7: 7.4 (4.9) FE terminal 36.7
74 108 53 Width across flats 36 80 [mm] Optional specifications With bracket With built-in silencer Model K L M N P Q R S T U V W X Y AV2000-m02-1 to 6D/Y(Z)m-A 30 50 51.5 44 5.5 10 66 2.3 33.5 54 M4 x 0.7 Depth 6 3 Width across flats 14 AV3000-m03-1 to 6D/Y(Z)m-A 41 50 53.5 46 5.5 15 70 2.3 33.5 54 M4 x 0.7 Depth 6 3 Width across flats 19 AV4000-m04-1 to 6D/Y(Z)m-A 50 60 64 54 8.5 18
hole 41 Foot bracket For the bracket assembly model, refer to page 4-14-19.
16.2 ASV 49 AS331FS1-02-08 (S) 8 13.2 37.1 23.5 59.9 14.2 50 AS331FS1-02-10 (S) 10 15.9 17.4 23 41.2 26.1 62.5 15.6 53 AS331FS1-02-12 (S) 12 18.5 42.5 28.3 64.7 17 55 AS331FS1-03-06 (S) 6 11.2 12.9 16.6 20.2 36 21.4 57.8 13.3 AK 1/4 19 63.1 61.7 57.9 56.5 24.5 19.2 VCHC 41 AS331FS1-03-08 (S) 8 13.2 37.1 23.5 52.2 14.2 42 AS331FS1-03-10 (S) 10 15.9 17.4 23 41.2 26.1 54.8 15.6 45 AS331FS1-
Manifold base VV3Z5-20 VV3Z5-21(R) VV3Z5-40 VV3Z5-41(R) Applicable base Sub-plate VV3Z5-40-2 VV3Z5-41-2 VV3Z5-41-1 VV3Z5-41R-2 VV3Z5-41R-1 DXT201-15-6A Applicable base VV3Z5-20-1 VV3Z5-21-1 VV3Z5-21R-1 Manifold base Manifold base DXT201-15-4A Note) Only in the case of assembled with manifold base at the time of shipment.
93 36.5 13.5 15 32 25 23 M5 24 59.5 46 57.5 60 55 48.5 101 57.5 68 1/2 22 45 96.5 41 11 17 36 22.5 23 M5 26 65 48 63 62 60.5 50.5 103 63 70 1/4, 3/8 VCW42 30 50 101 41 13.5 17 36 25 23 M5 26 67 48 65 62 62.5 50.5 103 65 70 1/2 35 60 108.5 41 17.5 17 36 30 28.2 M5 26 70.5 48 68.5 62 66 50.5 103 68.5 70 3/4 5 Series VCW How to Order Manifolds How to Order Manifold Assemblies (Example) VV2C