VZ100/300/500

Mounting Screw Tightening Torques M3: 0.8 Nm 4-6-34 35 3 Port Solenoid Valve Rubber Seal, Body Ported/Base Mounted Series VZ500 Manifold for Internal Pilot How to Order Applicable solenoid valve VZ512--01 VZ512M--01 VZ522--01 Z522M--01 Applicable blanking plate assembly DXT201-15-4A Type 20/21 VV3Z5 20 05 1 A port A port P/R port thread type Manifold P port Stations 20 21 Type 20 Type 21

Modular Type Filter Regulator Series AW

AW20P-270AS AR20P-260S G36-10-01 GC3-10AS G36-2-01 GC3-2AS AD27 AR30P-270AS AR30P-260S G36-10-01 GC3-10AS G36-2-01 GC3-2AS AD38 AD38N Note) AR40P-270AS AR40P-260S G46-10-02 GC3-10AS G46-2-02 GC3-2AS AD48 AD48N Note) Set nut Round 1.0MPa Note 2) Note 3) Pressure gauge Square embedded type Round 0.2MPa Note 3) Square embedded type N.O. N.C.

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

P R D side SMC AN200 U side Individual EXH spacer SSQ1000-R-3Special wiring specifications (-K) Back pressure check valve (-B) SSQ1000-BP Built-in silencer (-S) P. 2-3-49 P. 2-3-45 P. 2-3-46 P. 2-3-47 C6 L6 D-sub connector Terminal no.

Table of Contents

CX D-G5NBL 35 40 45 45 45 40 50 45 D-G5/K5 D-B7/B8 BM1 -01 BM1 -02 BM1 -32 BM1 -04 BM1 -05 BM1 -06 Since this is a guideline including hysteresis, not meant to be guaranteed.

4/5 Port Air Operated Valve Series SYJA3000

(Manifold base) SYJ7120-5G-01 2 pcs. (Valve) SYJ7000-21-1A 1 pc. (Blanking plate assembly) SS5YJ7-41-03-01 1 pc. (Manifold base) SYJ7140-5LZ 1 pc. (Valve) SYJ7240-5LZ 1 pc. (Valve) SYJ7000-21-1A 1 pc. (Blanking plate assembly) The asterisk denotes the symbol for assembly. Prefix it to the part nos. of the solenoid valve, etc.

Vacuum Pad

01 01 01 01 01 01 01 01 01 01 01 53 Series ZP Heavy-duty Pad Dimensions: Without Buffer ZPX HB40 50 B8 B10 01 ZPX HB63 80 B10 B12 01 ZPX HB100 125 B10 B12 01 I 1/8 (Rc, NPT, NPTF) 11 I 1/8 (Rc, NPT, NPTF) Width across flat 21 (Hexagon) 4 x M5 x 10 I 1/8 (Rc, NPT, NPTF) 70 11 Width across flat 21 (Hexagon) Y 11 Width across flat 21 (Hexagon) 45 H 4 x M4 x 8 28 H G 3 x M3 x 8 H F G G E F Y

Vacuum Pad

01 01 01 01 01 01 01 01 01 01 01 53 Series ZP Heavy-duty Pad Dimensions: Without Buffer ZPX HB40 50 B8 B10 01 ZPX HB63 80 B10 B12 01 ZPX HB100 125 B10 B12 01 I 1/8 (Rc, NPT, NPTF) 11 I 1/8 (Rc, NPT, NPTF) Width across flat 21 (Hexagon) 4 x M5 x 10 I 1/8 (Rc, NPT, NPTF) 70 11 Width across flat 21 (Hexagon) Y 11 Width across flat 21 (Hexagon) 45 H 4 x M4 x 8 28 H G 3 x M3 x 8 H F G G E F Y

Vacuum Pad

01 01 01 01 01 01 01 01 01 01 01 53 Series ZP Heavy-duty Pad Dimensions: Without Buffer ZPX HB40 50 B8 B10 01 ZPX HB63 80 B10 B12 01 ZPX HB100 125 B10 B12 01 I 1/8 (Rc, NPT, NPTF) 11 I 1/8 (Rc, NPT, NPTF) Width across flat 21 (Hexagon) 4 x M5 x 10 I 1/8 (Rc, NPT, NPTF) 70 11 Width across flat 21 (Hexagon) Y 11 Width across flat 21 (Hexagon) 45 H 4 x M4 x 8 28 H G 3 x M3 x 8 H F G G E F Y

Vacuum Pad

01 01 01 01 01 01 01 01 01 01 01 53 Series ZP Heavy-duty Pad Dimensions: Without Buffer ZPX HB40 50 B8 B10 01 ZPX HB63 80 B10 B12 01 ZPX HB100 125 B10 B12 01 I 1/8 (Rc, NPT, NPTF) 11 I 1/8 (Rc, NPT, NPTF) Width across flat 21 (Hexagon) 4 x M5 x 10 I 1/8 (Rc, NPT, NPTF) 70 11 Width across flat 21 (Hexagon) Y 11 Width across flat 21 (Hexagon) 45 H 4 x M4 x 8 28 H G 3 x M3 x 8 H F G G E F Y

Basic type / Direct mount type Series CY3B/CY3R

-01-04-X214 AS1201FPQ-M5-04-X214 Elbow type/Brass (throttle valve) AS2201FPQ-01-06-X214 AS1201FPQ-M5-06-X214 CY1S With clean One-touch fitting AS2201FPQ-01-08-X214 AS2201FPG-01-04-X214 AS1201FPG-M5-04-X214 Elbow type/ Stainless steel 304 (throttle valve) CY1L AS2201FPG-01-06-X214 AS1201FPG-M5-06-X214 AS2201FPG-01-08-X214 CY1H Note 1) Refer to Back Page 10 (How to Use Clean Series) for the

JXCx-OMT0005CN

DRV C RESET <> 66 - <>12 1 [] A [a ] (01-103) [] C RESET 2 [SW] A [a ] <> <> (01-144) D RESET SVON <> <> <>(M24V) (01-145) D RESET SVON <> <> <> (01-146) D RESET SVON <> 67 - <> <>(DC24V) D RESET SVON (01-147) <> <> <> (01-148) D RESET SVON <> <> (01-149) D RESET SVON <> <> Communicati on error. (01-150) D RESET SVON <> (01-192) E <> <> <> ON(SVON ON)

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

(Size: 01) EVS1-02 (Size: 02) 100 80 1000 l/min (ANR) 400 l/min (ANR) Accommodates enclosure IP65 Dust/Splashproof type Lightweight Size 01 (3 position): 0.26 kg Size 02 (3 position): 0.18 kg 3-11-11 12 ISO Standard Solenoid Valve Size 1,2/Single Unit Series EVS1-01/1-02 How to Order FG S EVS1 01 3 M0 Valve Thread type Size Nil F T 01 02 Rc Size 01 G Size 02 Courtesy of Steven Engineering

•

Calculation of suction flow rate OCalculation 01 Ejector/ average suction flow rate. 01 = ( ~ ~'3) 0 max.

13

01-01 ZH07BS-01-01 ZH07BL-01-01 ZH10BS-01-01 ZH10BL-01-01 ZH13BS-01-02 ZH13BL-01-02 I J K L M N O P Model 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 ZH05BS-01-01 ZH05BL-01-01 ZH07BS-01-01 ZH07BL-01-01 ZH10BS-01-01 ZH10BL-01-01 ZH13BS-01-02 ZH13BL-01-02 57 12 3.2 31.5 Rc 5.8 2 38.5 57 12 3.2 31.5 5.8 2 38.5 57 12 3.2 31.5 5.8 2 38.5 57 12 3.2 31.5 5.8 2 38.5 60 12 3.2 33.5 5.8 2

Air Cylinder Series CM2

53 77 154 154 36 11 10 54 30 55 75 23 27 10 3.2 134 171 44.5 Up to 300 Up to 500 177 188 47.3 143.5 to 500 Up to 300 Up to 300 Precautions on Trunnion Style, Flange Style 1.

Sine Cylinder Series REC

-01-06-X214 AS2001F-06-X214 AS2301F-01-06-X214 DREC32 AS2201F-01-06-X214 AS3001F-08-X214 AS2301F-01-06-X214 REC40 AS3201F-02-08-X214 AS3001F-08-X214 AS3301F-02-08-X214 -X Use the recommended speed controllers.

Sine Cylinder Series REC

-01-06-X214 AS2001F-06-X214 AS2301F-01-06-X214 DREC32 AS2201F-01-06-X214 AS3001F-08-X214 AS2301F-01-06-X214 REC40 AS3201F-02-08-X214 AS3001F-08-X214 AS3301F-02-08-X214 -X Use the recommended speed controllers.

Sine Cylinder Series REC

-01-06-X214 AS2001F-06-X214 AS2301F-01-06-X214 DREC32 AS2201F-01-06-X214 AS3001F-08-X214 AS2301F-01-06-X214 REC40 AS3201F-02-08-X214 AS3001F-08-X214 AS3301F-02-08-X214 -X Use the recommended speed controllers.

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

G VX 2 2 1 21 01 G 1 1 Normally Closed (N.C.)

0.55

Conditions Body Ported Body ported Series CJ2 Series CM2 Series MB, CA2 Series CS1 Tubing x Length T0604 x 1 m T0806 x 1 m VF1120-01 Speed controller AS3002F-06 AS3002F-08 AN101-01 Silencer Tubing x Length T0604 x 1 m T1075 x 1 m VF3130-02 Speed controller AS3002F-06 AS4002F-10 AN110-01 Silencer T1075 x 1 m T1209 x 1 m Tubing x Length T0604 x 1 m VF5120-03 AS4002F-10 AS4002F-12 Speed