0.4

VF VP4 Cylinder port SUP port EXH VQ 1/2 2, 4 (A, B) 1, 3 (P, R) VQ 4/5 VQC 1/2 VQC 1/2 25-core cable 26 pins VQC 4/5 25 pins 26 pins 20 pins IP67 compliant IP67 compliant IP67 compliant VQZ SQ VFS VFR VQ7 C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) C8 (8) N9 (5/16") N1 (1/8") N3 (5/32") N7 (1/4") C10 (10) C4 (4) C6 (6) C8 (8) N11 (3/8") In case of branch type C12 (12) N13 (1/2") N3 (5/32") N7

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

Cylinder ports (1) N1 N3 N7 N9 N11 M5 01 02 Symbol NM External pilot port 3/8 1/8 5/32 1/4 5/16 Mix Applicable tube O.D.(Inch) M5 1/8 1/4 M5x0.8 VQZ1000 V V V V V Cylinder port VQZ2000 V V V V V VQZ3000 V V V V V Note 1) Mixing One-touch fittings and thread types is impossible.

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

Rubber 12.6 (0.7) VQZ235 20 or less 15 or less 53 VQZ200 Metal 10.0 (0.55) VQZ225 18 or less 14 or less N.O. Rubber 12.6 (0.7) VQZ245 20 or less 15 or less Metal 16.2 (0.9) VQZ315 22 or less 17 or less N.C. Rubber 21.6 (1.2) VQZ335 33 or less 25 or less 77 VQZ300 Metal 15.3 (0.85) VQZ325 22 or less 17 or less N.O.

Compact Vacuum Unit

Option Note 12) Lead Wire with Connector for Vacuum Pressure Switch Nil Without option Nil G Without lead wire with connector (No need to specify for pressure sensor type. ) Lead wire with connector and connector cover, Lead wire length 78.7 inch (2 m) With bracket for single unit (Enclosed with the product for shipment without being assembled) B Vacuum (V) Port Note 11) Bracket C2 C4 N1 N3

Table of Contents

> Built-in silencer C C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) kit C6 (6) N1 (1/8") N3 (5/32") N7 (1/4") N7 (1/4") P. 2-4-50 P. 2-4-54 Built-in silencer Built-in silencer C C6 (6) C8 (8) C8 (8) kit N7 (1/4") N9 (5/16") N9 (5/16") P. 2-4-50 P. 2-4-54 Built-in silencer Built-in silencer C C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) C6 (6) kit N1 (1/8") N3 (5/32")

EXxx-OML0010CN

Terminal Setting() 47 50 52 53 53 -1No.EX-OML0010CN-C (ISO/IEC)(JIS) *1) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety of machinery -Electrical equipment of machines (Part 1: General requirements) ISO 10218: Manipulating industrial robots-Safety JIS B 8370: JIS B 8361:

Digital Flow Switch (Remote type monitor unit)

Specifications 53 Characteristics data 55 Dimensions 56 -1No.PF-OMJ0018-F Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage.

PFxx-OMO0004CN

No.PF-OMO0004CN-E // PFMB7201 2 10 13 14 16 16 19 21 [] 25 OU1OUT2 {3 ] 26 28 [] 28 28 F0 29 F1 OUT1 31 F2 OUT2 39 F3 44 F10 45 F13 46 F20 47 F22 48 F30 49 F31 50 F80 OFF 51 F81 52 F90 53 F98 55 F99 56 57 61 62 64 65 65 68 71 -1No.PF-OMO0004CN-E (ISO/IEC)(JIS) *1) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic

Digital Flow Switch

Summary of Product parts 11 Definition and terminology 12 Mounting and Installation 14 Installation 14 Piping 16 Wiring 17 Outline of Settings [Measurement mode] 21 Flow Setting (set value only) of OUT1 OUT2 [3 step setting mode] 22 Default settings 22 Function Setting [Function selection mode] 24 Default settings 25 F0 Reference condition/Unit selection function 26 F1 Setting of OUT1 28 F2

PFxx-OMP0001CN

No.PF-OMP0001CN-F // PFMB7501 PFMB7102 PFMB7202 2 10 11 12 14 14 16 17 [] 21 OU1OUT2 {3 ] 22 22 [] 24 25 F0 26 F1 OUT1 28 F2 OUT2 36 F3 41 F10 42 F13 43 F20 44 F22 45 F30 46 F31 47 F80 OFF 48 F81 49 F90 50 F98 52 F99 53 54 58 59 61 62 62 65 67 -1No.PF-OMP0001CN-F (ISO/IEC)(JIS) *1) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems

Digital Flow Switch (Remote type monitor unit)

PRODUCT NAME Digital Flow Switch (Remote type monitor unit) MODEL / Series / Product Number PF3W3## Table of Contents Safety Instructions 2 Model Indication and How to Order 9 Summary of Product parts 12 Definition and terminology 13 Mounting and Installation 15 Installation 15 Wiring 16 Flow Setting 21 Function Setting 24 Default settings 25 F0 Selection of sensor 26 F1 Setting of OUT1 27 F2

PF-OMN0011_C

No.PF-OMN0011CN-C / / PF3W3## SMC 2 9 12 13 15 15 16 21 23 23 F0 25 F1 OUT1 26 F2 OUT2 34 F3 40 F10 41 F20 45 F22 46 F30 48 F80 49 F81 50 F82 51 F90 52 F96 53 F97 54 F98 57 F99 58 59 62 63 66 66 69 71 -1No.PF-OMN0011CN-C (ISO/IEC)(JIS) 1) 2) 1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules

CEx-OMG0106

Selection of Dip Switch 53 Chapter 12: Driving 12-1. Setting of Origin Direction 54 12-2. Adjustment of Air Balance 54 Chapter 13: Error Messages & Countermeasures 13-1. Controller 5557 13-2. Brake Units Life Span 58 Chapter 14: Appendix 14-1.

ML1C

Moment (Nm) Moment (Nm) Moment (Nm) Load mass (kg) M1 = F1 x L1 Piston speed V (mm/s) ML1C/M2, M3 M2 = F2 x L2 M3 = F3 x L3 Piston speed V (mm/s) (How to calculate the load ratio) A. Consider (1) max. load mass, (2) static moment, (3) dynamic moment (when stopper collides) when calculating the max. allowable moment and load mass.

Series VQ4000 Base Mounted Plug-in/Plug Lead Single Unit For details about certified products conforming to international standards, visit us at www.smcworld.com.

side D side U side D side 12 16.5 43.5 12 16.5 43.5 D side entry (LD) AMC610-10 Exhaust cleaner 29 215 AMC610-10 Exhaust cleaner D side mounting D side mounting 118 118 90 149 2-G Rc 3/4 Electrical entry 90 149 2-Rc 1/2 1(P) port 2-Rc 1/2 1(P) port U side mounting U side mounting 17.5 17.5 SMC SMC R2 R1 5 3 3 5 R2 R1 PE PE 3 2-Rc 1/8 (Pilot EXH port) 3 2-Rc 1/8 (Pilot EXH port) 38 70 38 53

Digital Flow Switch (Integrated display type)

No.PF-OMM0005-N PRODUCT NAME Digital Flow Switch (Integrated display type) MODEL / Series / Product Number PF3W7## Table of Contents Safety Instructions 2 Model Indication and How to Order 11 Summary of Product parts 14 Definition and terminology 15 Mounting and Installation 17 Installation 18 Piping 20 Wiring 23 Flow Setting 26 Function Setting 29 Default settings 30 F1 Setting of OUT1 31 F2

3-Screen Display Multi-channel Digital Sensor Monitor Up to 4 pressure sensors can be connected!

Analog voltage 1 to 5 V Analog voltage 1 to 5 V Or IO-Link hub (Commercially available) Process Data Bit offset 79 78 77 76 75 74 73 72 71 70 69 68 67 66 65 64 Item CH11 measured value: 16-bit signed integer Bit offset 63 62 61 60 59 58 57 56 55 54 53 52 51 50 49 48 Measurement data of sensors for 4 channels are combined and cyclically sent as a process data.

PSxx-OMU0002CN

No.PS-OMU0002CN-D // ZSE20A(F) ISE20A 2 8 10 11 15 15 17 19 [] 22 23 3 24 26 28 28 28 F0 30 F1 OUT1 31 F2 OUT2 34 F3 36 F4 37 F5 FUNC 39 F6 41 F10 42 F11 48 F80 49 F81 50 F82 52 F90 53 F96 55 F97 56 F98 58 F99 60 61 65 65 66 75 75 78 -1No.PS-OMU0002CN-D 1 (ISO/IEC)(JIS) *1) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO

MY1

D-Y7P, D-Y7PV D-Y59B, D-Y69B D-Y59A, D-Y69A Internal circuits Lead wire length 0.5m 10 9 10 D-Y59A, D-Y69A Lead wire length 3m 53 50 53 Dimensions DC(+) Brown [Red] D-Y59A, D-Y7P, D-Y59B Main circuit of switch OUT Black [White] M2.5 x 4 Slotted set screw Indicator light 3.4 2.5 DC() Blue [Black] SMC 6.2 5 D-Y7P(V) 29 DC(+) Brown [Red] Main circuit of switch Most sensitive position 12.5 OUT

CY1F

Load (kg) m1 m4 m2 m3 Moment (Nm) F3 M3=F3 x L3 L3 F1 M1=F1 x L1 F2 M2=F2 x L2 L1 L2 1. Maximum allowable load (1), static moment (2), and dynamic moment (3) (at the time of impact with stopper) must be examined for the selection calculations. Maximum allowable load To evaluate, use a (average speed) for (1) and (2), and (impact speed = 1.4a) for (3).