Possible to transfer a workpiece at low-speed. Size 20, 30, 40 Size 10, 15 L3 = (mm) L1 = X = Applicable shaft type: W Equal dimensions are indicated by the same marker.
M D2 L1 Connecting thread T L2 H D1 D2 L1 L2 L3 L4 (1) A (2) Max.
L1 = 25n + 63, L2 = 25n + 76, L3 = 25n + 269.5 (262.5) n: Stations 7 238 251 457 (435.5) 6 213 226 432 (410.5) 5 188 201 407 (385.5) 4 163 176 382 (360.5) 3 138 151 357 (335.5) 2 113 126 332 (310.5) 12 363 376 582 (560.5) 11 338 351 557 (535.5) 10 313 326 532 (510.5) 8 263 276 482 (460.5) 9 288 301 507 (485.5) L1 L2 L3 L3 ( ): Type MP 2-5-43 Plug-in Unit Metal seal type Rubber seal type
Product Precautions p. 165 26 Variations Basic Pad ZP Series Vacuum inlet direction Flat type Flat type with ribs Bellows type Thin flat type Thin flat type with ribs Deep type Vacuum inlet direction Single unit p. 32 p. 51 p. 68 p. 87 p. 96 p. 105 VAC Vertical Vertical Lateral Lateral ZPT VAC p. 33 p. 34 p. 51 p. 52 p. 69 p. 70 p. 87 p. 96 p. 105 p. 106 With adapter ZPR p. 35 p. 37 p. 53
SUP port EHX I/O Cylinder port 2, 4 (A, B) 1, 3 (P, R) Serial unit: EX240 25-pin 26-pin 20-pin Conforms to IP67 Conforms to IP67 C3 (for 3.2) C4 (for 4) C6 (for 6) M5 (M5 thread) C8 (for 8) N9 (5/16") N1 (1/8") N3 (5/32") N7 (1/4") C4 (for 4) C6 (for 6) C8 (for 8) C10 (for 10) N3 (5/32") N7 (1/4") N9 (5/16") N11 (3/8") C8 (for 8) C10 (for 10) C12 (for 12) Rc 1/2 N7 (1/4") N9 (5
10BK1-L1 10BK2-L2 10BK21/2-L21/2 1/4 BK3-L3 1/4 RBK3-L31/2 1/4 RBK3-L4 5/16 BK4-L4 5/16 RBK4-L31/2 5/16 RBK4-L3 70 Reducer Bulkhead Bushing Reducing Bushings 10-32 Thru 10-32 * Lock nut and washer included C Thread 9/32 7/16 Hex 5/16 Hex 1/2 D B Hex 1/4 1/4-28 3/8-24 A Thread 71 RB 4-28-10 * RBB 3/8-10 R e d u c e r B u s h i n g D i m e n s i o n s A Tthread 1/4 NPT 1/4 NPT 1/4 NPT 1/4
(mm) Model H Bracket mounting dimensions Q Weight (g) 1(P) R 2(A) 2(A) R 3(R)* L1 L2 L3 L4 L5 L6 M1 M2 Bracket assembly no.
1/4 n-1/8 : Thread type LQ H H P = J (Pitch) 2 LVN L Dimension (mm) TI/ TIL n (stations) Model Dimensions 3 5 6 7 8 9 10 2 4 PA L1 103.5 138 172.5 207 241.5 276 310.5 345 69 VV2CL2 L2 115.5 150 184.5 219 253.5 288 322.5 357 81 PAX L3 127.5 162 196.5 231 265.5 300 334.5 369 93 L1 115.5 154 192.5 231 269.5 308 346.5 385 77 PB VV2CL3 L2 127.5 166 204.5 243 281.5 320 358.5 397 89 L3 139.5 178
281.5 204.5 320 397 L3 101 139.5 178 255 370.5 293.5 216.5 332 409 L1 83 124.5 166 249 373.5 290.5 207.5 332 415 VV2CL4 L2 95 136.5 178 261 385.5 302.5 219.5 344 427 L3 107 148.5 190 273 397.5 314.5 231.5 356 439 Manifold composition 2 stns. x 1 3 stns. x 1 2 stns. x 2 3 stns. x 2 3 stns. x 3 2 stns. x 2 + 3 stns. 2 stns. + 3 stns. 2 stns. + 3 stns. x 2 2 stns. x 2 + 3 stns. x 2 Note) Manifold
B L1 H 1(P) 2(A) C D E F G J K L3 L4 L5 L6 Q L2 M1 Model 1(P)2(A) 29.1 53.9 24.3 29.6 52.9 23.8 15.8 16.8 11 2.0 1.2 19 49 11 21 50 13 M5 4 6 VHK-B1A 44.5 14.5 1 27 22 16.5 26 VHKl-M5-06F VHKl-M5-04F 18 41 16.5 3.5 3.4 1.2 21 51 11 23 53 13 4 6 VHK-B1A 44.5 14.5 1 27 22 16.5 26 VHKl-01S-06F VHKl-01S-04F 18 41 55.4 23.8 31.6 56.9 24.3 32.6 16.5 3.5 15.8 16.8 11 7.2 9.7 1 8 8 VHKl-01S-08F 62.2
Filter unit (F) ZX100-K8-F 1 41 51 2-R1.8 (Mounting hole) 3.6 (Mounting hole) 8.8 4.8 1 10 19 Filter unit (Mounting hole) 13-2-53 53 Series ZX Vacuum Pump System/Manifold Specifications Function Max. number of units 8 units Vacuum supply from PV port of the manifold is common supply. Air supply from PS port is common supply.
Nickel plated Chromium molybdenum steel Hexagon socket head cap screw @1 Aluminum alloy Switch mounting rail @2 Note) Brass for 6, 10 and 15 8-15-53 53 Series CY1S Dimensions Slider type/Slide bearing CY1S6/10 4-J x K (Depth) 14 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com
SUP port EHX I/O Cylinder port 2, 4 (A, B) 1, 3 (P, R) Serial unit: EX240 25-pin 26-pin 20-pin Conforms to IP67 Conforms to IP67 C3 (for 3.2) C4 (for 4) C6 (for 6) M5 (M5 thread) C8 (for 8) N9 (5/16") N1 (1/8") N3 (5/32") N7 (1/4") C4 (for 4) C6 (for 6) C8 (for 8) C10 (for 10) N3 (5/32") N7 (1/4") N9 (5/16") N11 (3/8") C8 (for 8) C10 (for 10) C12 (for 12) Rc 1/2 N7 (1/4") N9 (5
M5 Weight (g) Nylon Urethane D1 D2 L1 L2 M L3 Part No.
M5 Weight (g) Nylon Urethane D2 L1 D1 L2 M L3 Part No.
Allowable driving force (Fn) (n = 1, 2, 3) W + WB WV P PV W + WB > WV P > PV Determination of allowable load weight & pressure High Precision Guide Type REAH F1 = x (W + WB) x 9.8 Horizontal Inclined Vertical F2 = (W + WB) x 9.8 x (cos + sin) (See page 63 for vertical operation.)
A D-X Me1 20Me1 = 1/3WeL1 = 1/3 x 15 x 0.2 = 1 [Nm] 4 = Me1 /Me1max = 1/10 = 0.1 W We Data L1 Examine Me1. n = 1 + 2 + 3 + 4 = 0.111 + 0.125 + 0.091 + 0.10 = 0.427 Can be used base on n = 0.427 1 10-2-53 53 Series REAH Model Selection 4 Caution on Design 2 Table Deflection Amount Displacement of Table due to Pitch Moment Load Displacement of Table due to Yaw Moment Load Displacement of Table
A D-X Me1 20Me1 = 1/3WeL1 = 1/3 x 15 x 0.2 = 1 [Nm] 4 = Me1 /Me1max = 1/10 = 0.1 W We Data L1 Examine Me1. n = 1 + 2 + 3 + 4 = 0.111 + 0.125 + 0.091 + 0.10 = 0.427 Can be used base on n = 0.427 1 10-2-53 53 Series REAH Model Selection 4 Caution on Design 2 Table Deflection Amount Displacement of Table due to Pitch Moment Load Displacement of Table due to Yaw Moment Load Displacement of Table
When sum of load rate does not exceed 1, it is possible to use. n=1+2+3 1 < = < = 47 MXS Series Air Slide Table How To Select Allowable load: W(N) Fig.1 Overhung: Ln(mm), Correction value for moment center distance An (mm) Fig.2 Pitch moment Yaw moment Roll moment W My Mp Mr W W W Static moment Kinetic moment L1 A1 L3 A5 L2 A3 W Mp Mr My W W L3 A6 W L1 A2 L2 A4 W Mey Mep L2 A4 A2 L3 Work
L4 L1 L2 L3 L4 L n 12 260.5 250 229 16 L n 12 273 262.5 239.5 17 10 235.5 225 208 14 11 248 237.5 218.5 15 13 273 262.5 239.5 17 14 285.5 275 250 18 15 285.5 275 260.5 12.5 16 298 287.5 271 13.5 10 248 237.5 218.5 15 11 260.5 250 229 16 13 285.5 275 250 18 14 285.5 275 260.5 12.5 15 298 287.5 271 13.5 16 310.5 300 281.5 14.5 L1 L2 L3 L4 L1 L2 L3 L4 402 Series 10-SZ3000 EX510 Gateway-type