ZR

Vacuum Pressure 53 kPa (L: Large flow type) ZM Nozzle dia.

Round Type Hydraulic Cylinder

LS + Stroke ZZ + Stroke LX LZ (mm) Effective thread length (mm) Bore size (mm) Stroke range (mm) A B1 B2 D F GA GB H H1 H2 I K LD LH LS LT LX LZ MM N NA NB NC 20 Up to 800 15.5 18 13 26 10 16 12 8 41 5 8 30 5 7 25 121 5.5 40 55 M8 x 1.25 13 26 19 15 25 Up to 800 19.5 M10 x 1.25 22 17 32 12 16 12 8 46 6 8 32 5.5 7 28 121 5.5 40 55 13 28 19 15 32 Up to 800 21 M14 x 1.5 24 22 38 16 19 12 8 53

100

Model GZ33-K1K-01-X56 GZ33-P1C-N01-X55 Pressure unit kPa inHg/psi dual scale Pressure range 100 to 100 kPa 30 inHg to 14 psi Connection thread R1/8 NPT1/8 Accuracy Vacuum 3% F.S., Positive pressure 5% F.S.

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

(mm) D Model B d H C SNJ-015A Y M10 x 1 3 14 16.2 E SN-015A M14 x 1 5 19 21.9 SNJ-010A M8 x 1 3 12 13.9 C A B Ball joint type: 40, 50 D E Y C A B (mm) D E Y ZP10F Model B A C 1.5 6.5 10 12 ZP13F 13 15 3 8.2 2 7 ZP16F 16 18 ZP20F 20 22 8.5 ZP25F 3 25 28 4 10.2 ZP32F 9 32 35 ZP40F 5 13 40 43 10 28 ZP50F 6 14 50 53 8 13-11-101 6 Vacuum Pad: Ball Joint Type Vertical Vacuum Entry Without Buffer

Vacuum Unit

How to Order Manifold w r q e ZZK2 A P 2 L 04 If the manifold parts (set of end plates for both ends and tension bolts) are shipped unassembled, please refer to page 33. q Stations w System/Port e Supply valve and release valve wiring1 Symbol System Port Symbol Stations 01 1 station 02 2 stations Symbol Wiring Selectable wiring for manifold r (Refer to page 16.)

Fieldbus System

Stations 1 station Symbol 01 I/O Unit stations 16 Note) 16 stations Nil None 1 station Note) Max. number of stations depends on the wiring specifications. 1 9 9 stations Note 1) Without SI Unit, the symbol is nil. Cylinder port size Note 2) SI Unit is not included in I/O Unit stations.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

Model VQZ100 VQZ200 VQZ300 AN110-01 AN110-01 AN200-02 AN200-02 AN110-01 Refer to page 4-14-3 for silencer for single valve unit. 4-14-17 18 Series VQZ Option Body Ported External Pilot Specifications Inch-size One-touch Fittings and Option Threads External pilot specifications are used when the operating pressure is below the minimum operating pressure 0.1 to 0.15 MPa or when valve is used

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

L 310.5 23 298 22 335.5 25 323 24 360.5 27 348 26 385.5 29 373 28 410.5 31 398 30 435.5 33 423 32 460.5 35 448 34 485.5 37 473 36 39 498 38 510.5 EXH port silencer Silencer is installd in the EXH port. 63 38 22 Dimensions 13 Silencer P/N Model VQZ100 VQZ200 VQZ300 AN110-01 AN110-01 AN200-02 AN200-02 AN110-01 2.10-17 Series VQZ Body Ported Option Inch Size One-touch Fittings and Optional Thread

Lubrication Equipment

70 70 90 95 27 40 56 73 73 50 80 95 120 120 120 120 81.5 122 142 177 177 254 268 25 40 53 70 75 90 95 25.5 38 38 41 39 45 45 M5 X 0.8 AL1000 AL2000 AL3000 AL4000 AL4000-06 AL5000 AL6000 30 41 50 50 70 70 27 40 54 54 66 66 22 23 26 25 35 35 5.4 6.5 8.5 8.5 11 11 8.4 8 10.5 10.5 13 13 40 53 70 70 90 90 2.3 2.3 2.3 2.3 3.2 3.2 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2, 3/4 3/4, 1 1 SAC1000, #3 SAC2000

AC Servo Motor Driver (SSCNET Type)

Parameter setting (PLC side) . 53 7.1 SSCNET Setting .53 7.2 Movement amount per pulse .54 7.3 Stroke limit .55 7.4 Operating conditions .56 8. Home position return (PLC) . 57 8.1 Returning to home position .57 9. Positioning operation (PLC) . 58 9.1 Setting of Operation data .58 9.2 Movement MOD .62 10.

VCW

Made to Order Specifications Non-leak (10 6 Pam 3/sec), vacuum (0.1 Paabs) specifications VCW X35 A L Oil-free specifications VCW X40 17-2-53 6 Series VCW Construction N.C.

VFR

L plug connector Closed center: VFR2310-LExhaust center: VFR2410-LPressure center: VFR2510-LM plug connector Closed center: VFR2310-MExhaust center: VFR2410-MPressure center: VFR2510-MDIN terminal Closed center: VFR2310Exhaust center: VFR2410Pressure center: VFR251001 02 01 02 01 02 01 02 01 02 01 02 01 02 D Y 01 02 D Y 01 02 D Y Applicable cable O.D. 6 to 8 [4.5 to 7] Light/Surge voltage

Vacuum Pad: Ball Joint Type, Series ZPT/ZPR

flats 12 F Width across flats 10 Width across flats 3 F Width across flats 2 D 3 D C C 2 2 A A B B Dimensions A Dimensions A (mm) (mm) B C D F Y B C D F N NL P Model Model ZPT10F-B5 ZPT20F-B5 10 12 10 12.5 27 32 M5 x 0.8 5 9 1.5 ZPT13F-B5 ZPT20F-B8 20 22 13 15 M8 x 1.25 8 12 10.5 13 27.5 36 ZPT16F-B5 ZPT20F-B01 16 18 2 Rc(PT)1/8 6.2 14 12.5 15.5 ZPT25F-B5 32 M5 x 0.8 5 9 ZPT 40/50 F-B 8/01

3 Port Air Operated Valve Series SYJA300 1

Rc 1/8 Body side VZA422-P-01 M5 x 0.8 0.53 0.17 2.2 0.49 0.17 2.0 N.O. Rc 1/8 Body side VZA414-1P-01 VZA414-1P-02 VZA414-2P-01 VZA414-2P-02 VZA424-1P-01 VZA424-1P-02 VZA424-2P-01 VZA424-2P-02 Rc 1/8 Rc 1/4 Rc 1/8 Rc 1/4 Rc 1/8 Rc 1/4 Rc 1/8 Rc 1/4 M5 x 0.8 0.49 0.11 2.2 0.57 0.19 2.4 N.C. Sub-plate side M5 x 0.8 0.49 0.11 2.2 0.57 0.19 2.4 N.C.

reduces flow setting time

Inch Size [mm] Model d T (R, NPT) H D1 D3 L1 L2 L3 L4 Note 1) A Note 2) M W1 W2 X Y Weight [g] Unlocked Locked Unlocked Locked AS221FS-01-01 (S) 1/8" 7.2 12 19.1 26.2 19.1 43.9 42.4 40.8 39.3 13.3 20 21.5 6.5 15 13 (13) AS221FS-01-03 (S) 5/32" 8.2 AS221FS-01-07 (S) 1/4" 11.2 20.8 27.9 14 (13) AS221FS-01-09 (S) 5/16" 13.2 22.4 29.5 14.2 15 (14) AS221FS-02-01 (S) 1/8" 1/8 13 (12.7) 7.2 20.9

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

-06 AS121FG-U10/32-07 18.3 23.1 11.7 13.5 18.1 22.9 11.6 12 6 1/4" 13.5 AS221FG-01-04 AS221FG-N01-01 12.7 20.4 27.5 9.3 4 1/8" 16 20.4 27.5 17 9.3 12.7 AS221FG-01-06 AS221FG-N01-03 14.3 13.5 20.4 27.5 11.6 6 5/32" 14.2 31.1 36.1 12 32.1 27.1 NPT 1/8 R 1/8 17 AS221FG-01-08 AS221FG-N01-05 12.7 14.3 23.1 30.2 19 18.5 25.3 32.4 15.2 11.4 8 3/16" 36.1 31.1 32.1 27.1 16.5 14.2 AS221FG-01-10 AS221FG-N01

Speed Controller with Residual Pressure Release Valve with One-touch Fitting AS  FE Series

AS-F (Hexagon width across flats) (Hexagon width across flats) AS22 1FE-01-04SK 12.7 27.5 20.4 4 9.3 26 TMH AS22 1FE-01-06SK 13.5 27.5 20.4 13.4 6 11.6 27 12 12 R 1/8 44.9 49.9 48 53 14.2 AS22 1FE-01-08SK 18.5 32.4 25.3 8 15.2 29 ASD AS22 1FE-01-10SK 21 40.2 33.1 14.1 10 18.5 31 Applicable tubing O.D. d AS22 1FE-02-04SK 16 34.4 25.2 4 10.4 36 AS AS22 1FE-02-06SK 17 34.4 25.2 17.7 6 12.8 37

Series VC, Series VCS, Direct Operated 2 Port Solenoid Valve for Steam

Valve model Port size VCS21 VCS20-12-01 1/8, 1/4 34 40 25 30 12.8 12.8 5 4.5 6 13 VCS30-12-02 1/4, 3/8 42 52 30 40 19 19 6 5.5 7 19 VCS31 VCS30-12-04 1/2 48 56 36 44 23 23 6 5.5 7 23 VCS40-12-02 1/4, 3/8 42 52 30 40 23 23 6 5.5 7 19 VCS30-12-04 VCS41 1/2 48 56 36 44 23 23 6 5.5 7 23 VCS40-12-06 3/4 56 65 44 53 28.2 28.2 6 5.5 7 26 Bracket material: Stainless steel 3 Series VCS Direct Operated

Series VC, Direct Operated, 2 Port Solenoid Valve for Water, Series VCW

Valve model Port size VCW2 VCW20-12-01 1/8, 1/4 34 40 25 30 12.8 12.8 5 4.5 6 13 VCW30-12-02 1/4, 3/8 42 52 30 40 19 19 6 5.5 7 19 VCW3 VCW30-12-04 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-02 1/4, 3/8 42 52 30 40 23 23 6 5.5 7 19 VCW30-12-04 VCW4 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-06 3/4 56 65 44 53 28.2 28.2 6 5.5 7 26 Bracket material: Stainless steel 3 Series VCW Dimensions (

Series VCS

Valve model Port size VCS21 VCS20-12-01 1/8, 1/4 34 40 25 30 12.8 12.8 5 4.5 6 13 VCS30-12-02 1/4, 3/8 42 52 30 40 19 19 6 5.5 7 19 VCS31 VCS30-12-04 1/2 48 56 36 44 23 23 6 5.5 7 23 VCS40-12-02 1/4, 3/8 42 52 30 40 23 23 6 5.5 7 19 VCS30-12-04 VCS41 1/2 48 56 36 44 23 23 6 5.5 7 23 VCS40-12-06 3/4 56 65 44 53 28.2 28.2 6 5.5 7 26 Bracket material: Stainless steel 3 Series VCS Direct Operated