o t l ffi 3 Port. Solenoid Pilot ODerated Series: NVJ3OO t_l f ;+;,a"ten"tdPit.top"[t.o-Serie-f,tV-.t-SOOO] iMKx;;*.Ki -t witrr-SuigJv.lt g" --lzvo-c-1 rw I t l r v n c i l i o l 5 w t t r12V0C 1l i0.r5w)i l e v P { a I 6VDC tl sVDC I 1W I NVJ100: Can be used for vacuum application. NVJ300: jSuppressor L \_l_, ! 1 r-, Diodel ;lCoil I sru"o !
t l ffi 3 Port. Solenoid Pilot ODerated Series: NVJ3OO t_l f ;+;,a"ten"tdPit.top"[t.o-Serie-f,tV-.t-SOOO] iMKx;;*.Ki -t witrr-SuigJv.lt g" --lzvo-c-1 rw I t l r v n c i l i o l 5 w t t r12V0C 1l i0.r5w)i l e v P { a I 6VDC tl sVDC I 1W I NVJ100: Can be used for vacuum application. NVJ300: jSuppressor L \_l_, ! 1 r-, Diodel ;lCoil I sru"o !
t l ffi 3 Port. Solenoid Pilot ODerated Series: NVJ3OO t_l f ;+;,a"ten"tdPit.top"[t.o-Serie-f,tV-.t-SOOO] iMKx;;*.Ki -t witrr-SuigJv.lt g" --lzvo-c-1 rw I t l r v n c i l i o l 5 w t t r12V0C 1l i0.r5w)i l e v P { a I 6VDC tl sVDC I 1W I NVJ100: Can be used for vacuum application. NVJ300: jSuppressor L \_l_, ! 1 r-, Diodel ;lCoil I sru"o !
2 Brass NBR Rod seal Piston A t !3 Brass NBR Tube gasket Piston B y !4 Zinc chromated Piano wire NBR Piston gasket Return spring u !
Direct Solenoid Series NVS 3105, 4014/ 402/3/ 4/ 54 ,.,4:,.t .,r".,,,. 't;"iii:l:lr:'ir'i' .l l:r':].l:'.:ri:]"r''irr':''i ' r.i' 'r "i "" ' r' ,.it:.i:ur,,r':.,'l:.,t:i:rr'].i:,i::.!t'.:.,i,l.:a,,l'.::ra,'.i,," " . r' i l ,,,.:,:].::.i::.::rl::]rr:,;,:::t,:,,,t,.i:.i:t.:fi:l':,rill..ia,it,"l'-'.:l:...:', ,'l.it:la:::lt]i:ri:t,:i;:i.:i:.,'i:r':::l'.'rt:ail.:r'.,t'...':.'
r t . : . , t . : r r l ' r i . r t , : t r ' r r r , . a a . . r . r . , r r , , .
ULTIC ARMOR is a registered trademark of Nippon Valqua Industries, Ltd. 416 b XLA/XLA V Series Aluminum High Vacuum Angle Valve Air Operated/with Solenoid Valve How to Order [Option] q w y e u r t i XLAV M9N 16 A G G 1 o !
A B A B A B B A B A B A B B A B A B A 10 16 2 2 6 6 2.5 2.5 1.5 1.5 0.5 0.5 4.5 4.5 3 3 3.5 3.5 8.5 8.5 0.5 0.5 2.5 2.5 6.5 6.5 3 3 2 2 1 1 5 5 3.5 3.5 4 4 9 9 1 1 Note) Adjust the auto switch after confirming the operating conditions in the actual setting.
Low Speed Auto switch model Bore size (mm) 20 25 32 40 50 63 80 100 D-M9(V) D-M9W(V) D-A9(V) MQ BMA3-020 (A set of a, b, c, d) BMA3-025 (A set of a, b, c, d) BMA3-032 (A set of a, b, c, d) BMA3-040 (A set of a, b, c, d) BMA3-050 (A set of a, b, c, d) BMA3-063 (A set of a, b, c, d) RHC D-M9A(V) Note 2) BMA3-020S (A set of b, c, d, e) BMA3-025S (A set of b, c, d, e) BMA3-032S (A set of b,
O e b u t h c n i ( ) . n i M e l o h . a i d d a e r h T T P N . o N t r a P H ) . x e H ( D 1 D 2 L 1 L 2 A * M . t W ) f g ( 8 / 1 S 4 3 7 0 T R K 7/ 6 1 ) 1 1 . 1 1 ( 8 6 . 0 ) 2 . 7 1 ( 9 3 . 0 ) 0 1 ( 9 8 . 0 ) 5 . 2 2 ( 3 9 . 0 ) 5 . 3 2 ( 0 1 . 1 ) 8 2 ( 5 7 . 0 ) 9 1 ( 8 1 . 0 ) 6 . 4 ( 4 1 4 / 1 S 5 3 7 0 T R K 9/ 6 1 ) 9 2 . 4 1 ( 8 0 . 1 ) 5 . 7 2 ( 8 1 . 1 ) 0 3 ( 4 2 4 / 1
manifold block, it is possible to prepare for removing a valve for maintenance reasons or planning to mount a spare valve, etc. 10 Size 18 mm (A) 4 (B) 2 112.4 42 19 26 1 (P) 5 (R1) 3 (R2) Circuit diagram 14 Size 26 mm 112 Individual SUP spacer 49 12.5 (F) (T) (F) (T) VV802-P-01 (Size 18 mm) 18 9 1/8" VV801-P-03 (Size 26 mm) By mounting individual SUP spacers on a manifold block, it is possible
7 Piston rod Miniature linear guide Table Bumper A Bumper B Bushing Steel ball A Steel ball B Type C snap ring for hole Round head Phillips screw Magnet holder Auto switch Piston gasket Rod seal Piston seal Gasket r t y u i o !0 !1 !2 !3 !8 !
7 Piston rod Miniature linear guide Table Bumper A Bumper B Bushing Steel ball A Steel ball B Type C snap ring for hole Round head Phillips screw Magnet holder Auto switch Piston gasket Rod seal Piston seal Gasket r t y u i o !0 !1 !2 !3 !8 !
Using a T-spacer facilitates the branching of air flow.Features · Attachment for AC Series Air Combination.· Y110-M5-A applicable models: AC10-A, AC10B-A.· Y210-□01-A, 02-A applicable models: AC20-A, AC20B-A, AC20C-A.· Y310-□01-A, 02-A applicable models: AC25-A, AC25B-A, AC25C-A · Y310-□01-A, 02-A applicable models: AC30-A, AC30B-A, AC30C-A.· Y410-□02-A, 03-A applicable models: AC40-A, AC40B-A
1 1 1 1 2 (a) (a) (b) (c) (a) (b) (c) (b) (c) (a) (b) (c) (a) (b) (c) (b) (c) (a) (b) (c) (b) (c) (a) (b) (c) Note 1) The above (a), (b), (c) indicate heater mounting positions.
Mineral oil A C A A A A 18 Sodium hypochlorite (2%, Room temperature) A C A D D B 19 Sodium chloride A A A A B 20 Carbon dioxide A A A A A A 21 Natural gas A A A A A A 22 Boric acid A B A D A B 23 Unless noted otherwise, the solution concentration is in a saturated state.
CE2 + 0.048 0 Y-J010SUS 3.3 3.2 8 10 + 0.048 0 Y-J016SUS 5 6.5 12 10 ML2B Rod End Cap T-bracket C J G5-S Flat type/CJ-CF CV MM Double clevis style cylinder A 7 TH 4-TC MVGQ C0.5 + 0.2 0 TU D D 0.1 0.3 TN 12 C0.5 N CC W L TX TV TK RB Round type/CJ-CR MM TDH10 A J TY TT C0.5 DTW RR L N -X Material: Stainless steel 304 W Part no.
CE2 + 0.048 0 Y-J010SUS 3.3 3.2 8 10 + 0.048 0 Y-J016SUS 5 6.5 12 10 ML2B Rod End Cap T-bracket C J G5-S Flat type/CJ-CF CV MM Double clevis style cylinder A 7 TH 4-TC MVGQ C0.5 + 0.2 0 TU D D 0.1 0.3 TN 12 C0.5 N CC W L TX TV TK RB Round type/CJ-CR MM TDH10 A J TY TT C0.5 DTW RR L N -X Material: Stainless steel 304 W Part no.
B A Series XLA (mm) B mm Model Weight kg (lb) A mm Conductance l/s 40 XLA-16 XLA-25 XLA-40 XLA-50 Little heavy metal contamination The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers. 103 0.25 (0.55) 5 50 113 0.45 (0.99) 14 65 158 1.1 (2.43) 45 70 170 1.6 (3.53) 80