ZP

5020 6020 8020 4030 5030 6030 8030 Pad type Type Oval Symbol W Dimensions: Pad Unit ZP2W ZP220 W ZP230 W 7 7 8 7 12 20 30 8 8 Y Y Y a A a A a A C C C b 20 30 B 31 21 Dimensions Dimensions Dimensions a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 2 x 2 2.5 3 Y a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 Y Model Model Model ZP2-3507W ZP2-4010W ZP2-5010W ZP2-6010W ZP2-4020W ZP2-5020W ZP2

ZP

5020 6020 8020 4030 5030 6030 8030 Pad type Type Oval Symbol W Dimensions: Pad Unit ZP2W ZP220 W ZP230 W 7 7 8 7 12 20 30 8 8 Y Y Y a A a A a A C C C b 20 30 B 31 21 Dimensions Dimensions Dimensions a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 2 x 2 2.5 3 Y a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 Y Model Model Model ZP2-3507W ZP2-4010W ZP2-5010W ZP2-6010W ZP2-4020W ZP2-5020W ZP2

3 Port Air Operated Valve

SYJA 2(A) 2(A) Standard VZA (P)1 3(R) (P)1 3(R) i VFA 2(A) 2(A) 2(A) 3(R) VFRA o For vacuum (P)1 3(R) (P)1 3(R) VPA4 SYJA X VZA 1(P) VTA For vacuum u y t r e w q VGA VPA VPA VPA3 i 2(A) 3(R) o X Component Parts No.

ZP

5020 6020 8020 4030 5030 6030 8030 Pad type Type Oval Symbol W Dimensions: Pad Unit ZP2W ZP220 W ZP230 W 7 7 8 7 12 20 30 8 8 Y Y Y a A a A a A C C C b 20 30 B 31 21 Dimensions Dimensions Dimensions a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 2 x 2 2.5 3 Y a 4 5 6 8 A 5 6 7 9 C 2 x 1.8 Y Model Model Model ZP2-3507W ZP2-4010W ZP2-5010W ZP2-6010W ZP2-4020W ZP2-5020W ZP2

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

VX3 Threaded M5 x 0.8 VXA Fluid temperature (C) 0 to 100 Ambient temperature (C) 0 to 60 VN Weight (kg) 0.09 0.15 0.36 0.17 LVC Construction LVA Standard type N.C. type N.O. type Double acting type LVH LVD LVQ PB PB PB q q q LQ PA PA PA e e e LVN TI/ TIL A B A B A B A B A B PA r w PAX PB With flow rate adjustment t PB PA Description Material Parts list No.

Compact Cylinder with Air Cushion and Lock Series RLQ

(mm) Joint A type mounting bracket B type mounting bracket 32, 40 YU-03 YA-03 YB-03 50, 63 YU-05 YA-05 YB-05 RS Allowable eccentricity (mm) M W T2 V 32 40 50 63 Bore size 1 Eccentricity tolerance 0.5 Backlash J E Joints are not included with A type and B type mounting brackets.

Compact Cylinder with Air Cushion

(Example) Bore size 40 Part number A type mounting bracket . YA-03 Joint. YU-03 Joint part no.

HRX-OM-R028

range. 03Data field of a command is not normal.

HRX-OM-T004

range. 03Data field of a command is not normal.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

Meter-in y y u u q w e r t q w e r t i i o o !

RQ

RS M W V T2 Applicable mounting bracket Bore size (mm) Weight (g) Joint 2D through 2O counter bore T1 B E J Type A mounting bracket Type B mounting bracket 32, 40 YU-03 YA-03 YB-03 25 50, 63 YU-05 YA-05 YB-05 40 Material: Precision die-casting material equivalent to stainless steel 304 80 YU-08 YA-08 YB-08 90 100 YU-10 YA-10 YB-10 160 Bore size (mm) O M J E D B Part no.

Compact Cylinder with Air Cushion Series RQ

This produces an air cushion cylinder which retains the merits of a compact design. Operating principle q When the piston is retracting, exhaust is discharged from both A and A' until piston seal H passes the air passage A. A + A' A' w After piston seal H has passed the air passage A, exhaust is discharged only from A'.

AR20-B to AR60-B

X425 w t e 03 q w t e r For high/low temperature Option/Semi-standard: Select one each for a to g.

SQ1000/2000

3 position: SQ2 40 3 4 5 3 4 5 3 position: SQ2 41 y e q w e y e q w e u u SQ2541 SQ2441 SQ2341 SQ2540 SQ2440 SQ2340 (A) (B) (A)(B) 2 4 (A)(B) (A)(B) (A)(B) (A)(B) 2 4 4 2 4 2 4 2 4 2 5 1 3 (R1) (P)(R2) 5 1 3 (R1) (P)(R2) 5 1 3 5 1 3 (R1)(P)(R2) 5 1 3 (R1)(P)(R2) 5 1 3 (R1)(P)(R2) (R1) (P)(R2) Dual 3 port valve: SQ2 41 A B C Parts list e q w e w y No.

Hydraulic

W D d E E D M MA a a M MA F NA NA F K A A K C H + Stroke S + Stroke H B ZZ + 2 strokes (mm) Bore size (mm) A a B C d E F G GA J K M MA MM NA P R S T V W H ZZ D 0 -0.018 0 -0.021 0 -0.021 0 -0.021 0 -0.025 0 -0.025 0 -0.025 0 -0.062 0 -0.062 0 -0.074 0 -0.074 0 -0.074 0 -0.074 0 -0.087 40 23 10 60 44 18 45 25 14 17.5 M8 x 1.25 18 13 20 M14 x 1.5 30 1/4 37 114 11 7.5 8 66 246 17 50 25 9 73

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

3 W 3 W Glossary of Terms Coil specifications Inrush current 12 VDC 1.25 A 2 A 2 A 24 VDC 0.63 A 1 A 1 A Temperature rise*5 25C 25C 25C 1 Leakage: The value at a differential pressure of 0.01 MPa or higher and an ambient temperature of 20C 2 This product has an IP67 enclosure, but if water enters the product, it may result in malfunction or breakage.

LVQ

-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com w r t VX3 VXA y VN LVC LVA r t LVH With reducer LVD LVQ With indicator With by-pass With flow rate adjustment LQ i u LVN TI/ TIL PA SMC PA PA PAX u PB SMC A B A B SMC SMC A B A B Description No.

Vacuum System Peripherals:

3 3 8 1.1 M V VX3334 -03 M V 4 VX3244 -03 1.6 M V VX3344 -03 For Vacuum Pad Orifice dia.

LEC-OM07605CN

(1) 0+55() 0+40() -20+65() -15+70() 90%RH() 80%RH() 90%RH() () 1000m LECSS2-T5 LECSS2-T7 LECSS2-T8 LECSS2-T9 () 5.9m/s2 XY49m/s2 (2) (FR-BIF) (UVW), A 5 (UVW)(UVW) U U U U V V M V M V W W W W DC DC 24 V DC 24 V DOCOM DOCOM RA RA U,V,WCN2 (3) (4) A 6 () (5) DC24V ALM()MBR( ) RA B U DC 24 V (6) 10 (7) A 7 () 1.(:) (1) (2) 2.(:) (1) 1 (2) (3) (4) , [](:) EEP-ROM

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

u w t e r !