Electric Actuators

Speed (mm/s) 40 40 2.6 2.6 1.3 1.3 0.3 0.3 0.1 0.1 80 80 1.3 1.3 0.7 0.7 0.2 0.2 0.1 0.1 For transfer load of 3kg For transfer load of 1kg Positioning time (sec) Positioning time (sec) Positioning distance (mm) Positioning distance (mm) 100 100 50 50 10 10 1 1 10 10 10 10.1 5.1 5.1 1.1 1.1 0.2 0.2 Speed (mm/s) Speed (mm/s) 2.6 40 40 2.6 1.3 1.3 0.3 0.3 0.1 0.1 1.3 80 80 1.3 0.7 0.7 0.2 0.2

Air Slide Table

10, 20 ST 10 to 30 ST 40 to 75 0.002 0.050 0.002 ST 10 to 75 0.000 0.000 0.000 0 20 40 60 0 20 40 60 0 20 40 60 Load [N] Load [N] Load [N] (Plate size: t = 12) Lr = 160 mm MXQ20(A)-Z, MXQ16B-Z MXQ20(A)-Z, MXQ16B-Z MXQ20(A)-Z, MXQ16B-Z 0.018 0.025 0.600 ST 125, 150 0.016 ST 150 0.500 Table displacement [mm] Table displacement [mm] Table displacement [mm] ST 10 to 40 0.020 ST 75, 100 0.014

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Speed (mm/s) 40 40 2.6 2.6 1.3 1.3 0.3 0.3 0.1 0.1 80 80 1.3 1.3 0.7 0.7 0.2 0.2 0.1 0.1 For transfer load of 3kg For transfer load of 1kg Positioning time (sec) Positioning time (sec) Positioning distance (mm) Positioning distance (mm) 100 100 50 50 10 10 1 1 10 10 10 10.1 5.1 5.1 1.1 1.1 0.2 0.2 Speed (mm/s) Speed (mm/s) 2.6 40 40 2.6 1.3 1.3 0.3 0.3 0.1 0.1 1.3 80 80 1.3 0.7 0.7 0.2 0.2

Electric Actuator/Slider Type

38.3 30 40 M6 x 1.0 10 8.5 40 to 100 68 105 to 120 190.5 160 125 to 200 85 205 to 300 102 32 Size Stroke range (mm) OA OB P Q S T U V WA WB WC X XA XB Y Z 35 26 70 15 to 35 54 4 5 26.5 8.5 40 to 100 50 33.5 105 to 120 95 125 to 200 70 43.5 205 to 300 85 51 25 M6 x 1.0 12 80 18 30 95 6.8 40 40 28.5 75 20 to 35 64 5 6 34 8.5 40 to 100 50 33.5 105 to 120 105 125 to 200 70 43.5 205 to 300 85

MY1

speed mm/s Piston speed mm/s Piston speed mm/s MY1HT/m MY1HT/m MY1HT/m 1000 1000 1000 500 500 500 300 300 300 MY1HT63 MY1HT63 Load weight kg Load weight kg Load weight kg MY1HT63 100 100 100 MY1HT50 MY1HT50 50 50 50 MY1HT50 40 40 40 30 30 30 20 20 20 10 10 10 100 200 300 400 500 1000 100 200 300 400 500 1000 100 200 300 400 500 1000 Piston speed mm/s Piston speed mm/s Piston speed mm/s

Smooth Cylinder/Low Speed Cylinder

32 (mm) ZZ S TD TT TX TY TZ Z Bore size (mm) 20 118 62 8 10 32 32 52 108 25 122 62 9 10 40 40 60 112 32 124 64 9 10 40 40 60 114 40 143.5 154 88 10 11 53 53 77 Clevis Integrated Style (E) CM2YE Bore size Stroke ZZ + Stroke LZ + Stroke Z + Stroke RR LP S + Stroke L AL F K N A H N U G NA +0.058 0 CDH10 0 0.1 CX 2 x P (Rc, NPT, G) H1 G 1.5 I Eh8 NA CI D LH MM 2 x LD NN Width across flats B1

MY1

m s m s Bore size (mm) Cushion stroke Type of impact 16 12 s 20 15 m 25 15 32 19 40 1 2 24 m2 Kinetic energy E1 50 30 63 37 Thrust energy E2 Fs Fs + mgs Fs mgs 80 40 100 40 Absorbed energy E E1 + E2 Rubber Bumper (10 only) Positive Stroke from One End Due to Pressure Symbol : Speed of impact object (m/s) F: Cylinder thrust (N) s: Shock absorber stroke (m) m:Weight of impact object (kg)

5 Port Solenoid Valve Series SY3000/5000/7000/9000

Voltage drop may be caused by internal circuit for S, Z and T type (With power-saving circuit).

High Vacuum Angle Valve

Rear flange surface M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) 3 Solid state auto switch Seal material changed part Flange: Reed auto switch Leakage (Pam3/s or less) Note) Internal 1.3 x 10-9 (FKM) 1.3 x 10-7 1.3 x 10-9 (FKM) 1.3 x 10-7 Symbol Changed part External Without auto switch (with built-in

Table of Contents

directions for 2 hrs. each 490 m/s2 in X, Y, Z directions 3 times each 1000 Vp-p, Pulse width 1 s, Rise time 1 ns Resistance Note 1) In the case of PF2W711, 3% of F .S. or less (15C to 35C, based on 25C).

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

38.3 30 40 M6 x 1.0 10 8.5 40 to 100 68 105 to 120 190.5 160 125 to 200 85 205 to 300 102 32 Size Stroke range [mm] OA OB P Q S T U V WA WB WC X XA XB Y Z 35 26 70 15 to 35 54 4 5 26.5 8.5 40 to 100 50 33.5 105 to 120 95 125 to 200 70 43.5 205 to 300 85 51 25 M6 x 1.0 12 80 18 30 95 6.8 40 40 28.5 75 20 to 35 64 5 6 34 8.5 40 to 100 50 33.5 105 to 120 105 125 to 200 70 43.5 205 to 300 85

LJ1H

TSUBAKI CABLEVEYOR cross-sectional dimensions (mm) A Series A B H S LJ1 10 LJ1 20 LJ1 30 10 20 B H S H S 10 20 14 40 H S Example) For LJ1 10 2 3 6 4 8 8 4 Correct: 60% or less Incorrect: More than 60% 103 104 Made to Order Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com

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S n Nil Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 2 fingers 2 Number of fingers Bore size 10 mm 16 mm 20 mm 25 mm 32 mm 40 mm 10 16 20 25 32 40 Action D Double acting Opening/Closing stroke (mm) 10 16 20 25 32 40 30 60 80 Symbol Nil 20 40 60 40 80 100 50 100

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3 8 1 2 3 4 S L, Z S L, Z S Note ) Thread PB 1 32A 40A 50A AC Flange DC Note) Surge voltage suppressor is attached in the middle of lead wire.

5

RHC With Rod Trunnion With Head Trunnion RZQ Z + Stroke TX CD Z + Stroke TX CD 51 40 3.2 3.2 40 51 6.8 x 3.4 6.8 20.5 7.5 40 57 6.8 20.5 LX LZ LX LZ 7.5 40 57 6.8 x 3.4 (mm) Mounting Part no.

15

The load factor for each direction can be obtained as follows. x = 0/220 = 0 y = 50/210 = 0.24 z = 200/430 = 0.47 5. x + y + z = 0.71 1 LER LEH LEY -X5 1000 1000 1000 11LEFS 800 800 800 11LEJS L1 [mm] L2 [mm] L3 [mm] 600 600 600 25ALz 400 400 400 LEC Lx Ly 200 200 200 LEC S 0 0 0 0 10 20 30 40 50 0 10 20 30 40 50 0 10 20 30 40 50 LEC SS-T Work load [kg] Work load [kg] Work load [kg] LEC

1

ZZ + 2 x Stroke S + 2 x Stroke Series CA2 Bore size (mm) ZZ S GC 40 231 169 29 50 250 181 33 63 269 197 33 80 321 233 41 100 342 253 41 ZZ + 2 x Stroke Series MB MB, MB1 Common Bore size (mm) ZZ S GC S + 2 x Stroke ZZ + 2 x Stroke 32 231 180 36 40 235 180 38 50 262 200 41 Series MB1 63 262 200 43 GC 80 320 244 52 100 320 244 52 ZZ + (2 x Stroke) S + (2 x Stroke) Stroke range is shown as

Air Cylinder

N Rubber bumper 100 CG1 25 B S Z N CDG1 With auto switch M9BW 100 B 25 N S Z With auto switch (Built-in magnet) Number of auto switches Rod end thread Mounting Nil Male rod end F Female rod end Nil 2 pcs. S 1 pc. n n pcs.

Battery-less

E LEYG25L E LEYG16L E 120 125 120 125 0.1 0.1 10 100 1000 35 40 10 100 1000 35 40 Stroke [mm] Stroke [mm] o L = 50 mm Max. speed = Over 200 mm/s !

CM2

size (mm) Z S ZZ Z Z S S Z S S ZZ ZZ ZZ ZZ Z 20 6 21.5 25 20 158 112 143 183 133 137 87 168 193 6 24.5 32 25 162 112 147 187 137 137 87 172 197 6 27 40 32 164 114 149 189 139 139 89 174 199 164 214 224 8 32.5 40 138 179 168.5 163 113 204 229 188 243.5 254 193.5 218.5 213 268.5 279 6-4-49 50 Series CM2 Clevis Integrated Style (E) CM2E Bore size Stroke S T Spring return S + Stroke Z +