Prevents Micro-Bubbles .-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VX3 LLC 2 A 02 11 S VXA Tubing size for P port and R side connection Body class Tubing size for P port and L side connection VN Symbol 00 06 07 08 10 11 10 11 12 13 12 13 19 12 13 19 Symbol 00 06 07 08 10 11 10 11 12 13 12 13 19 12 13 19 Tubing size Plug
-25(L)-X105 ZSE4-00-26(L)-X105 Model (N)ZL112 (N)ZL112-G (N)ZL112-E (N)ZL212 Nozzle Diameter 1.2mm 1~5V + -5% FS load impedence 1k 1.2mm x 2 Output Specification 1 output, NPN open collector 30V 80mA Max Suction Flow 100 l/m (ANR) 200 l/m (ANR) 126 l/m (ANR) Air Consumption 63 l/m (ANR) Fluid Air Max Vacuum Pressure -84kPa (-12PSI) -12PSI Setting PressureRange 0~-101kPa, -760mmHg, -14.7PSI
-A-1 Interface regulator (B regulator) ARBQ4000-00-B-1 Interface regulator (P regulator) ARBQ4000-00-P-1 P R1 R2 SUP/EXH block plate VVQ4000-16A 02 Rc 1/4 Cylinder port sizes Fill out in case of mixed sizes (CM/LM/NM). 03 Rc 3/8 C8 (N7) C10 (N9) With 8 (1/4") One-touch fitting With 10 (5/16") One-touch fitting With 12 (3/8") One-touch fitting C10 (N11) Bottom ported Rc 1/4 Single wiring Special
1.v.') l|xT33-17 Millim.lG in Paqfi656 NVS 421,1-00 "XX" D 2 3 SlE a35 y. condiBie ol s9.ol l3l.vo (h.tchd 0t) ! (6) O rings 5 axl$3n0 Sdmd.$ y.6i.tsil.i.d r15/1mV6OH2 aoP'lov60 H: So|mdceps!
Double rcd o12, a16/5 b 30 o2O, a25/5 b 50 o32,a4ol51o IOC) o50 to 61 00/1 0 to 1 0O Singleacting Spring return/extend s 1 2 1 0 6 4 U 5 , 1 0 o50h0.20 Ion.rotating rod Double acting Singl rod o12, @16/5 lD 30 o20, @295to 50 o32, o4ol510 1OO o50, 0631 0 to 1 00 Double rod s12, s1615 lo 30 o20 lo o40l5 to 50 o50, a6310lo 50 @Actuation Doude acting Srngle acting spnng refurn Single acting
5 10 15 20 25 30 kPa Pressure loss [kPa] Pressure loss [kPa] 750 kPa 50 kPa 30 0 kPa 0 kPa 20 30 kPa 50 kPa 70 kPa 750 kPa 350 kPa 10 70 kPa 350 kPa 00 10 20 30 40 50 Flow [L/min] Flow [L/min] PF2M711(-L) 100 L/min PF2M721(-L) 200 L/min 40 90 80 70 60 50 40 30 20 10 00 50 100 150 200 Pressure loss [kPa] Pressure loss [kPa] 750 kPa 30 30 kPa 0 kPa 0 kPa 20 750 kPa 30 kPa 50 kPa 50 kPa 350
NPT M5 x 0.8, C4 P port P port T NPTF A port size A 1/8 1/8 M5 M5 x 0.8 R port Applicable blanking plate assembly Refer to page 610. 1/8 A port M5 x 0.8, C4 C4 4 One-touch fitting N3 5/32" One-touch fitting Note) For more than 8 stations, supply/exhaust air to/from both sides of P port and R port. 611 3 Port Pilot Solenoid Valve 10-SYJ300 Type 20 Manifold: Top Ported/10-SS3YJ3-20Stations -00
Manually operated type (For high pressure and high flow) Diaphragm Valve for Ultra High Purity Series AP3100 Suitable for UHP gas supply line Body material: 316L SS secondary remelt High pressure type: 20.7 MPa and 9 MPa Designed for bulk specialty gas (BSGS) delivery LOTO standard with AP3157, optional AP3125 How to Order (Inlet) (Outlet) AP31 00 2PW MV8 MV8 S Model Ports Code Maximum operating
INP1 ALARM READY START REF PRSLO / / / / TEMP READY Time when it goes away Contact input signal 1Delay timer of reading / 40 Offset mode OFF Setting of low flow rate alarm 4 5 0 LOFL OFSET MODE READY OVER INP2 INP1 DELAY Upper limit of circulating fluid temperature monitoring function 400 / / / / Contact input signal 1 OFF Detection timer Detection time of low flow rate alarm 4 5 00
INP1 ALARM READY START REF PRSLO / / / / TEMP READY Time when it goes away Contact input signal 1Delay timer of reading / 40 Offset mode OFF Setting of low flow rate alarm 4 5 0 LOFL OFSET MODE READY OVER INP2 INP1 DELAY Upper limit of circulating fluid temperature monitoring function 400 / / / / Contact input signal 1 OFF Detection timer Detection time of low flow rate alarm 4 5 00
INP1 ALARM READY START REF PRSLO / / / / TEMP READY Time when it goes away Contact input signal 1Delay timer of reading / 40 Offset mode OFF Setting of low flow rate alarm 3 5 0 LOFL OFSET MODE READY OVER INP2 INP1 DELAY Upper limit of circulating fluid temperature monitoring function 400 / / / / Contact input signal 1 OFF Detection timer Detection time of low flow rate alarm 3 5 00
ML2B / W1 ML2B / M1 0 0 0 0 Momentum Nm 0 0 Load N 0 Piston Speed m/s Piston Speed m/s ML2B / W2 ML2B / M2 Momentum Nm Load N Piston Speed m/s Piston Speed m/s ML2B / W3 ML2B / M3 20 10 Momentum Nm 5 Load N 3 2 1 Piston Speed m/s Piston Speed m/s ML2B / W4 Allowable Kinetic Energy 00 H or izontal M ounting 100 5 00 Ver tical M ounting 50 Load N 0 0 1 00 Load N 0 50 5 Piston Speed
/ / INC()/ / b c 2mm d e f / P.41 7.2 / P.43 7.2 g INP ON INP INP ON / P.41 7.2 h / P.41 7.2 / P.42 7.2 i 100 % 150 % LEY16A 200 % LEY25A / P.42 7.2 j 12AREA ON 12 INC ABS() No.1 148 250 AREA k INP No.0 50+20 = 70 -24- 1 -IN INPAREA a b c d e f g h i j k No. 1 2 mm/s mm mm/s^2 mm/s^2 % % mm/s % mm mm mm 0 ABS 100 100.00 3000 3000 0 0 0 100 80.00 90.00 0.50 No.00
AQ240F-04-l 1.7 2.5 AS AQ240F-06-l 2.4 2.7 AQ340F-06-l 4 4 ASN How to Order Circuit AQ 2 4 0 F 06 06 AQ With silencer ASV AK Quick exhaust valve Exhaust port ASS 00 04 06 Built-in silencer Applicable tube O.D. 4 Body size Applicable tube O.D. 6 2 3 M5 1/8 IN, OUT port applicable tube O.D. 04 06 4 6 With exhaust port fittings In-line style Built-in One-touch fittings Note) Brass parts are
How to Calculate the Flow Rate For obtaining the flow rate, refer to page 4-1-6. 4-16-1 2 Series VS3115/3110 How to Order VS311 D L 5 01 5 Thread type Accessory (Option) Nil Rc Mounting With indicator light L P With manual override N NPT T NPTF E Nil Without bracket Port size Piping Electrical entry B With bracket G 1 8 Rc 1 4 Rc 1 4 Rc 3 8 Without sub-plate Rc 01 02 02 03 00 Body ported
VO325-00 VQZ VT325-T Specifications VZ Type of actuation Direct operated type 2 position single solenoid VS Air Fluid Operating pressure range 0 to 1.0 MPa 10 to 50C (No freezing. Refer to page 4-18-4.)
Contact P/A when mounting a pressure switch, T-interface, or filter regulator on the OUT side of the 3-port valve for residual pressure release. 0.6 0.6 0.5 0.5 Outlet pressure MPa Outlet pressure MPa 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 00 25 50 75 100 125 150 00 1000 2000 3000 4000 5000 Flow rate L/min (ANR) Flow rate L/min (ANR) AC20 Rc 1/4 AC50 Rc 1 0.6 0.6 0.5 0.5 Outlet pressure MPa Outlet
A port size Stations -+ -+ -+ -+ 01 C6 C8 N7 N9 1/8 02 : 20 2 stations : 20 stations Rc G Nil P port 1/4 R X 6 one-touch fitting F N T P 8 one-touch fitting NPT NPTF A port 1/8 1/4" one-touch fitting R port 1/4 5/16" one-touch fitting Note) For more than 9 stations, supply/exhaust air to/from both sides of P and R port. 41 Series SYJ700 Type 20 Manifold: Top Ported/SS3YJ7-20Stations (-00
l 250 225.5 305 256.7 428 323.5 21775 1089 100 340.2 390.5 390.8 352 476.2 669.2 505.s 34020 l70l Table. 6.17 Mass in kg tor cylinders trom 25 to |00 mm Dia. for a Load Ratto ot 85olo wilh 5 bar working pressure. P E E D C O N T R O L The speed of a cylinder is delined by the extra force behind the piston, above the torce opposed by the load.
(full span) Class 3 Port exhaust 0 to 50C (32 to 122F) Housing: Polycarbonate/ABS resin Symbol Standard P V 5 Series (N)ZL Multistage Ejector Option Specifications Digital vacuum pressure switch specifications With digital vacuum pressure switch (ZSE4) ZSE4-00--X105 ZSE4B-00--X105 ZSE4E-00--X105 Part number Display Pressure setting range Maximum operating pressure LCD LED LCD with back light