Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type 1

M5 Port size M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 10-32 UNF NPT 1/8 NPT 1/4 NPT 3/8 NPT 1/2 Type 01 02 03 04 U10/32 N01 N02 N03 N04 Elbow Universal 2 3 Universal type Applicable tubing O.D.

Table of Contents

Manifold Option P. 2-4-23 VVQ1000-10A-3 Blanking plate assembly VVQ1000-N3-Station (1 to Max. stations) Name plate [-N3] Built-in silencer, direct exhaust [-S] VVQ0-58A Port plug D side U side Blanking plug VVQ1000-P-3-C6 Individual SUP spacer VQ1000-FPGDouble Check block AN103-X233 Silencer KQ2P23 04 06 C6 (SUP) port One-touch fitting for 6 P R PR P R PR VVQ1000-R-3-C6 Individual EXH spacer

REA/REB

case of 15. 25, 32 A dimension D-Y5 D-Y6 D-Y7 B dimension C dimension D dimension Auto switch model D-Y5 D-Y6 D-Y7 D-Y5 D-Y6 D-Y7 D-Y5 D-Y6 D-Y7 D-Z7 D-Z8 D-Z7 D-Z8 D-Z7 D-Z8 D-Z7 D-Z8 Bore size (mm) 25 22 103 103 47 47 78 78 22 32 30.5 117.5 117.5 55.5 55.5 92.5 92.5 30.5 Operating Range Bore size (mm) Auto switch model 32 25 15 D-A9 8 D-M9 3 D-Z7/Z8 9 9 D-Y5/Y6/Y7 6 7 Since this

REA/REB

15 Auto switch model Bore size (mm) D-A9 A dimension D-M9 B dimension C dimension D dimension D-A9 D-M9 D-A9 D-M9 D-A9 D-M9 21.5 76.5 72.5 56.5 60.5 17.5 15 Note) Auto switches cannot be installed in Area C in the case of 15. 25, 32 A dimension D-Y5 D-Y6 D-Y7 B dimension C dimension D dimension Auto switch model D-Y5 D-Y6 D-Y7 D-Y5 D-Y6 D-Y7 D-Y5 D-Y6 D-Y7 D-Z7 D-Z8 D-Z7 D-Z8 D-Z7 D-Z8

Speed Controller with Residual Pressure Release Valve with One-touch Fitting AS  FE Series

(mm) Note) Type 04 06 08 10 12 4 6 8 10 12 Port size Elbow Universal 2 3 01 02 03 04 R 1/8 R 1/4 R 3/8 R 1/2 Made to Order (For details, refer to page 659.) Control type Note) For applicable tubing O.D. selection, refer to the Model.

KB

D L2 L1 A2 KBL1-R1S KBL2-R1S KBL2-R2S KBL2-R3S KBL3-R2S KBL3-R3S KBL3-R4S KBL4-R3S KBL4-R4S 13.6 27.0 30.5 31.5 26.5 37.5 32.5 31.0 41.5 18 38.0 15.0 14.8 23.2 27.3 26.5 32.6 29.3 47.6 57.6 48.8 R(PT)1 8 43.5 46.5 42.0 56.0 R(PT)1 4 R(PT) 3 8 R(PT)1 4 R(PT) 3 8 R(PT)1 2 R(PT) 3 8 R(PT) 1 2 17 17.6 15.5 19 19 25.2 22 18.0 51.5 22 61.5 57.5 19.5 36.0 24 27.0 24 Reference dimensions after R

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Series AS


1F-D Elbow Type/Universal Type 1

Applicable cylinder bore size (mm) Elbow type Universal type Port size Metric size Inch size Flat head screwdriver 3.2 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" AS121F-M5 AS131F-M5 6, 10, 16, 20 M5 x 0.8 AS221F-01 AS231F-01 20, 25, 32 R 1/8 AS221F-02 AS231F-02 20, 25, 32, 40 R 1/4 AS321F-02 AS331F-02 40, 50, 63 R 1/4 AS321F-03 AS331F-03 40, 50, 63 R 3/8 AS421F-04 AS431F-04 63, 80,

E-P HYREG

Refer to Specific Product Precautions on page 1006. 990 E-P HYREG VY1 Series R Standard Specifications 0 1 0 1 0 1 VY110 01 02 0 1 0 1 VY140 0 1 VY150 0 1 VY170 0 1 20 VY190 0 1 VY1D00 M5 VY1A0 VY1B0 M5 VY120 01 02 VY130 02 03 Model 10 12 10 04 02 03 04 04 06 14 M5 01 Port 1(P) 11 2 Port size 1 1 8 1 8 1 4 1 8 1 4 1 4 3 8 1 2 1 4 3 8 1 2 1 2 3 4 1 1 1 4 1 M5 M5 2 2 M5 2(A) 1 4 3(R) Weight

Series VQ Metal Seal/Rubber Seal Body Ported

Blank plug Dimensions 23 04 06 KQP-X19 A L D Model Fittings size d Color: White 3.2 4 6 16 16 18 3.2 6 8 31.5 32 35 KQP-23-X19 KQP-04-X19 KQP-06-X19 It is inserted into an unused cylinder port and SUP/ EXH ports. The minimum order quantity is 10 pcs.

REA/REB

/J79 D-J79C D-F7V D-F7NTL D-F7W/J79W D-F7WV D-F7BAL D-A7/A80 D-A7H/A80H D-A73C/A80C D-F7LF D-F79F Bore size (mm) B A 10 6 3 4.5 (mm) 15 6 4 4.5 Dimension A Dimension B 20 6 3 4.5 Auto switch model D-A72 D-A72 25 6 3 4.5 D-F7W/J79W D-F7WV D-F7LF Note 1) D-F7W/J79W D-F7WV D-F7LF Note 1) D-F79F D-F7BAL D-A7H/A80H D-A73C/A80C D-F7/J79 D-J79C D-F7V D-A7H/A80H D-A73C/A80C D-F7/J79 D-J79C D-F7V

Table of Contents

(Including band and screw) Operating Range Bore size (mm) Bore size (mm) Auto switch model Auto switch model 20 25 32 40 50 20 25 32 40 50 D-C7/C8 D-H7 D-B5/B6 D-G5/K5 D-B7/B8 D-G7/K7 D-B7/B80 BMA2 -025 BMA2 -032 BMA2 -040 BMA2 -050 BMA2 -020 10 8 10 9 10 D-B73C/B80C D-C7/C80 BA -32 BA -04 BA -05 BA -01 BA -02 10 8 10 9 10 D-C73C/C80C D-B5/B64 BM1 -01 BM1 -02 BM1 -32 BM1 -04 BM1 -05 10 8

A

4-R 36.8 E 36.8 E R P P D D + + MADE IN JAPAN MADE IN JAPAN SMC SMC Model Port size A B C D E G H I K L M N P Q R AV2000-02-G AV2000-02-GS AV2000-02-D AV2000-02-DZ AV2000-02-Y AV2000-02-YZ AV3000-03-G AV3000-03-GS AV3000-03-D AV3000-03-DZ AV3000-03-Y AV3000-03-YZ AV4000-04-G AV4000-04-GS AV4000-04-D AV4000-04-DZ AV4000-04-Y AV4000-04-YZ AV5000-G AV5000-GS AV5000-D AV5000-DZ AV5000-Y AV5000

Soft Start-up Valve AV2000/3000/4000/5000 1

4-R 4-R 36.8 E 36.8 E R P VEX P D D AMR + + MADE IN JAPAN ITV MADE IN JAPAN SMC SMC IC VBA Model Port size A B C D E G H I VE K L M N P Q R AV2000-02-G AV2000-02-GS AV2000-02-D AV2000-02-DZ AV2000-02-Y AV2000-02-YZ AV3000-03-G AV3000-03-GS AV3000-03-D AV3000-03-DZ AV3000-03-Y AV3000-03-YZ AV4000-04-G AV4000-04-GS AV4000-04-D AV4000-04-DZ AV4000-04-Y AV4000-04-YZ AV5000-G AV5000-GS AV5000-

Vacuum System Peripherals:

e w q m t r e w q U side D side 13-14-26 26 e Valve Model SX340 is for internal pilot.

Body Size: -, Thread: -, Port Size: -, Mounting: -, Bowl: -, Lubricant Exhaust Port: -, Flow Direction: -, Pressure Unit: -

Series KC Self-seal Fittings

L2 A1 A2 D L1 KBL1-R1S KBL2-R1S KBL2-R2S KBL2-R3S KBL3-R2S KBL3-R3S KBL3-R4S KBL4-R3S KBL4-R4S 18 38.0 27.0 30.5 31.5 26.5 37.5 32.5 31.0 41.5 15.0 14.8 23.2 27.3 26.5 32.6 29.3 47.6 57.6 48.8 13.6 R(PT)1 8 43.5 46.5 42.0 56.0 R(PT)1 4 R(PT)3 8 R(PT)1 4 R(PT) 3 8 R(PT)1 2 R(PT) 3 8 R(PT)1 2 15.5 17 19 17.6 19 22 25.2 18.0 51.5 22 61.5 57.5 19.5 36.0 24 24 27.0 Reference dimensions after R

Soft Start-up Valve AV2000/3000/4000/5000

4-R 36.8 E 36.8 E R P P D D + + MADE IN JAPAN MADE IN JAPAN Model Port size A B C D E G H I K L M N P Q R AV2000-02-G AV2000-02-GS AV2000-02-D AV2000-02-DZ AV2000-02-Y AV2000-02-YZ AV3000-03-G AV3000-03-GS AV3000-03-D AV3000-03-DZ AV3000-03-Y AV3000-03-YZ AV4000-04-G AV4000-04-GS AV4000-04-D AV4000-04-DZ AV4000-04-Y AV4000-04-YZ AV5000-G AV5000-GS AV5000-D AV5000-DZ AV5000-Y AV5000-YZ M4

High Purity Fluoropolymer

Printed in Japan. 1st printing June, 1999 D-SMC.L.A. P-100 (YG) 4th printing April, 2002 D-DN P-80 (DN)

-fl Seies

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4 Way, 5 Port / Solenoid/Pilot Operated NVFR Series

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