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position VQ7-8-FG-S-R 3.3 0.27 13 3.0 0.24 12 Rubber seal 45 or less VQ7-8-FG-D3.0 0.24 12 2.4 0.18 10 Metal seal 15 or less 0.70 Double VQ7-8-FG-D-R 3.3 0.27 13 3.0 0.24 12 Rubber seal 20 or less VK VQ7-8-FHG-D2.4 0.24 10 2.4 0.28 10 Metal seal 45 or less Closed center 0.75 VQ7-8-FHG-D-R 2.8 0.27 11 2.8 0.25 11 Rubber seal 50 or less VZ VQ7-8 3/8 VQ7-8-FJG-D2.4 0.20 10 2.4 0.16 10 Metal

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

9.5 B 10 10.5 13 13 13.5 19 21.5 20.5 B 16.5 22 24.5 23.5 B 15 17.5 16.5 A 10 13 16 16 18.5 13.5 11.5 14 A 20 15 13 15.5 B 10.5 11 13.5 13.5 14 19.5 22 21 B 15.5 21 23.5 22.5 A 7 10 13 13 15.5 10.5 8.5 11 B 7.5 8 10.5 10.5 11 16.5 19 18 A 17 12 10 12.5 B 12.5 18 20.5 19.5 12 16 20 25 32 40 50 63 Auto Switch Mounting Height D-A7H D-A80H D-F7 D-J79 D-F7W D-F79W D-F7BAL D-F79F D-F7NTL D-A73C

Table of Contents

32/40 1/3 7/20 10-200 10-25 10-25 10-25 10-40 10-30 16-25 32-125 10-25 32-63 20-50 CDRA1 CDRB CDRQ2 MRQ MDSUB MSQ MHZ2 MHZJ2 MHL2 MDHR MHS 12-25 MHK MHS MHC2 MHT2 MHW2 10-25 MHY MRHQ MHL Grommet D-A72/A73/A80 12-13-7 D-A72H/A73H D-A76H/A80H 12-13-8 MHR Rail Connector D-A73C/A80C 12-13-9 D-A53/A54/A56 D-A64/A67 MHK Grommet Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco

Electric Actuators

8 25 25 18 Standard motor 8 12 8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room specification 104 Dust seal specification 110 TSUBAKI CABLEVEYOR specification 122 Construction 134 Mounting

5

63 80 100 D-M9(V) D-M9W(V) D-M9A(V) 4.5 5 4.5 5.5 5 5.5 20 25 32 40 50 63 80 100 D-H7/H7mW D-H7NF 4 4 4.5 5 6 6.5 REA D-H7C 7 8.5 9 10 9.5 10.5 D-G5/G5W/G59F D-G5BA/K59/K59W 4 4 4.5 5 6 6.5 6.5 7 D-A9(V) 7 6 8 8 8 9 D-C7/C80 D-C73C/C80C 8 10 9 10 10 11 REB D-G5NT 4 4 4.5 5 6 6.5 6.5 7 D-G5NB 35 40 40 45 45 45 45 50 D-B5/B64 8 10 9 10 10 11 11 11 D-B59W 13 13 14 14 14 17 16 18 REC

CQ2

D-A7H/A80H D-A73C/A80C D-F7/J79 D-F7V/J79C D-F9W D-F9WV D-F9BAL D-A9 D-A9V D-F9 D-F9V D-A7/A80 D-A79W Bore size (mm) A B A B A B A B A B A B A B 12 4.5 5.5 5 6 2 3 9 10 16 7.5 5 8 5.5 5 2.5 12 9.5 20 7.5 6.5 8 7 5 4 12 11 25 7.5 7 8 7.5 5 4.5 12 11.5 32 9.0 6 9.5 6.5 6.5 3.5 13.5 10.5 8 5 12 9 11 8 40 13 8.5 13.5 9 10.5 6 17.5 13 12 7.5 16 11.5 15 10.5 50 11 11.5 11.5 12 8.5 9 15.5 16 10

ZP

Model A Model A B C E D G E ZPT40 U C ZPT50 U C ZPT10 U C ZPT13 U C ZPT16 U C 19.5 6.2 8 6 3.3 32 6.5 40 43 18.5 10 12 1.7 12 3 27 21 21 33 7.5 3.8 50 53 6.2 12 5 8 8 6 13 15 1.8 12.5 3.5 27.5 21.5 21.5 16 18 1.2 Deep Deep 1 8 B C D D E Y F: M6 x 1 F: M8 x 1.25 D F: Rc Model A 1 8 D G F: Rc Y B C E D G E D G F: M5 x 0.8 F: M6 x 1 E Model A ZPT40D 40 43 29 6 8 6.2 17 42.5 ZPT10D ZPT16D 10

ISO Cylinder

10 12 16 20 25 32 40 D-M9l D-M9lV D-M9lW D-M9lWV D-M9lA D-M9lAV 2 2.5 2.5 3 3 3 3 3 D-A9l*1 D-A9lV 7 6 6 6 6 Band mounting D-H7l D-H7lW D-H7BA D-H7NF 3 3 3 4 4 4 4.5 5 D-H7C 8 8 8 9 7 8.5 9 10 D-C7l/C80 D-C73C/C80C 7 7 7 7 7 8 8 8 D-M9l/M9lV D-M9lW/M9lWV D-M9lA/M9lAV 2.5 3 3.5 3.5 D-A9l*1 D-A9lV 6.5 5.5 6 D-F7l/J79 D-F7lV/J79C D-F7lW/J79W D-F7lWV D-F79F D-F7BA/F7BAV Rail mounting 5 5 6

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20 12 10 20 20 20 40 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 2 Horizontal 8 25 25 18 Standard motor 8 12 8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

/A80 D-A79W D-A9 D-A9V D-P5DWL D-F9BAL Bore size (mm) A 4.5 7.5 7.5 7.5 9 13 11 13.5 17.5 21.0 A 9 7 9.5 13.5 17 B 10 10.5 13 13 13.5 19 21.5 20.5 29 31.5 B 15 17.5 16.5 25 27.5 A 5 8 8 8 9.5 13.5 11.5 14 18 B 10.5 11 13.5 13.5 14 19.5 22 21 29.5 32 A 2 5 5 5 6.5 10.5 8.5 11 15 18.5 B 7.5 8 10.5 10.5 11 16.5 19 18 26.5 29 A 8 12 10 12.5 16.5 20 B 12.5 18 20.5 19.5 28 30.5 A 12 16 14 16.5

ZP

Applicable Pad List 8 8 8 8 8 8 8 8 Dimensions (per stroke) Model Weight (g) Dimensions (per stroke) Model Weight (g) Dimensions (per stroke) Model Weight (g) Dimensions (per stroke) Model Weight (g) Lateral A 17 20 B 34 40.5 D 11 14.5 11.0 12.2 A 17 20 B 30 37 D 10 14 7.7 8.6 A 17 20 B 34 40.5 D 11 14.5 11.0 12.2 A 17 20 B 30 37 D 10 14 7.7 8.6 ZP3-Y015U:J3-B3 ZP3-Y015U:J6-B3 ZP3-Y015U:

Hydraulic

thread depth 8 10 (11) Rod end male threads M M 48 24.5 D D 10 10 2-5.5 through 4-9 counter bore depth 7 36 36 8 20 2-Rc 1/8 (port size) 20 57 + Stroke 5 5 + Stroke 67 + 2 strokes C X L C X L + Stroke 47 32 to 100 2-P (port size) Approx.

SY

Order in multiples of 10. Dimensions Applicable fitting size d 4 Model A L D Flat ribbon cable connector assembly KQ2P-04 16 32 6 6 KQ2P-06 18 35 8 8 KQ2P-08 20.5 39 10 10 KQ2P-10 22 43 12 Cable length (L) Assembly part no.

Made to Order

D-F7 D-J79 D-F7WV D-F7BAV D-A79W D-A9/D-A9V 10 15 10 + 15 (n2)Note) (n=4, 6...) 5.5 6 6.5 6.5 D-A7/A80 D-A7H/A80H D-A73C/A80C 7.5 8 8.5 8.5 D-F7W/J79W D-F7BA D-F79F/F7NT 15 + 20 (n2)Note) (n=4, 6...) 10 15 D-A79W 10 10.5 12.5 12.5 5 10 10 + 15 (n2)Note) (n=4, 6...)

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

L A L D Applicable fitting size d Model 10-KQP-04 16 32 6 4 10-KQP-06 18 35 8 6 10-KQP-08 20.5 39 10 8 10-KQP-10 22 43 12 10 10-KQP-12 24 44.5 14 12 10-KQP-01 16 31.5 5 1/8" 10-KQP-03 16 32 6 5/32" 10-KQP-07 18 35 8.5 1/4" 10-KQP-09 20.5 39 10 5/16" 10-KQP-11 22 43 11.5 3/8" Type 16, Cassette base Type 10, Tie-rod base Series Manifold type SUP block disk EXH block disk 10 SV1000-59-1A SV1000

V100

20.5 22 31.5 32 35 39 43 3.2 6 8 10 12 Color: White 3.2 4 6 8 10 D VP VG VP DIN rail AXT100-DRS070 L As for , enter the number from the DIN rail dimensions table.

Table of Contents

Flat with ribs F: M5 x 0.8 F: M6 x 1 F: M8 x 1.25 F: Rc Y 1 8 Model A 1.2 2.6 4.8 7 9 ZPT20 U C ZPT25 U C ZPT32 U C 1.6 0.8 20 23 1.7 14 23 6 8 6.2 23 29 29 4 28 5 8 8 12 12 25 1.8 M4 x 0.7 1 14.5 23.5 23.5 29.5 29.5 4.5 32 35 2.3 Deep 2.5 M5 x 0.8 1 8 B C D E G D E G D E G D E G F: M5 x 0.8 F: M6 x 1 F: M8 x 1.25 F: Rc Y Model A ZPT25D 25 28 20 5 29 8 6 29 8 8 35 12 6.2 35 12 10 b c d e

Compact 5-Port Solenoid Valve

Station 8 113 SOL.b SOL.a 47.04 (+) (+) () () 22 9 Station 9 SOL.b SOL.a (+) (+) () () 23 10 D-sub connector cable [IP67 compliant] D-sub connector cable [IP20/40 compliant] Station 10 Cable length (L) Assembly part no. Note Cable length (L) Assembly part no.

Table of Contents

VXF(A)2160 Tank 41l 6 x 10 pcs. VXF(A)2160 Tank 41l 6 x 6 pcs. 10 x 12 pcs. 10 x 12 pcs. Without tube (VXF2280) Without tube Without tube (VXF2280) Flow rate Q (Nl) 10 x 12 pcs. 10 x 8 pcs. 10 x 12 pcs. 10 x 8 pcs. VXF(A)2280 Tank 70l 10 x 8 pcs. VXF(A)2280 Tank 70l 10 x 8 pcs. 10 x 10 pcs. 10 x 10 pcs. 100 mm 100 mm 10 x 10 pcs. 10 x 10 pcs. 10 x 8 pcs. 10 x 8 pcs.

KJ

Note) D: Max. diameter 8.4 27.5 34.1 30.6 12.7 2.2 2.2 8.4 10 3.2 10 30.1 2.2 2.2 3.2 2.7 R 1 8 M5 x 0.8 28.2 31.3 12.7 34.8 9.3 4 9.3 10 10 30.3 30.8 4.5 4.5 2.2 2.2 11 11 R 1 8 33.4 36.9 M5 x 0.8 K 11.6 13.5 11.6 10 10 6 32.9 R 1 8 M 8> H D MS 8> Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area