VQ7-6/7-8

P reduced pressure A reduced pressure B reduced pressure ARB350-00-P ARB350-00-A ARB350-00-B A B A B 27 Series VQ7-8 Manifold Options Interface regulator Main EXH back pressure check plate P A B ARB350-00AXT512-25A Interface regulator Main EXH back pressure check plate (AXT512-25A) 282 ARB350-00P A B 146 SMC SMC 238.5 (208) 221 226.5 (196) 209 193.5 181.5 135.5 (105) 118 PA B PE PE P 90.5

Modular F.R.L. Units

Optional/Semi-standard specifications N.O.: Black N.C.: Gray B B B B B Dimensions Thread type/Rc,G: 10 One-touch fitting Thread type/NPT: 3/8" One-touch fitting Barb fitting Applicable tubing: T0604 1/4 M5 x 0.8 Width across flats 14 Width across flats 17 1/8 Model Standard specifications Optional specifications Bracket mount With auto drain P 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 B 87.6 115.1

Large Size Vacuum Module: Series ZR

SP 18 20 ZR1 1-K1M-DZCUK For port exhaust Exhaust (EXH.) port Rc 1/4 AMJ A B AMV A B S A B AEP 75.3 HEP 7.2 1 Related Equipment A B A B S A B Digital pressure switch for vacuum 109 1 (Port exhaust) 114 1 (Built-in silencer) 109 PE A (79.8) 1 85 1 PD 60 1 PS PV 147 (2000) 957 Series ZR Ejector exhaust Vacuum V port Ejector System with Valve Pilot pressure exhaust PE port Circuit diagram Release

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ Type ）

MR-J3-B LECSS (2 axis) (Note 7) SW1 CN1A (Note 8) SW2 CN1B 2 1 LE-CSS-S MR-J3-B (Note 7) LECSS (3 axis) (Note 6 ) SSCNET cable (option) SW1 CN1A SW2 (Note 8) CN1B 2 1 MR-J3-B (Note 7) LECSS (n axis) SW1 CN1A (Note 9) Cap SW2 (Note 8) CN1B 2 1 3 6 3.

VZS

Side 4(A), 2(B) D side 1 16 VS4 16 stations Max. 16 stations.

JXCx-OMY0004

S Standard cable Orange 9 B A-6 Black 8 3 Actuator side Controller side (14.2) (2) 2 1 (8) (1) B1 A1 (14) (18) (17.7) 6 5 (3) 2 1 A6 B6 15 16 L (11) (30.7) 14.2 Actuator cable [8 to 20m] (1) (2) LE-CPSignal name Terminal number Cable color Terminal number A B-1 Brown 2 Cable length (L) A A-1 Red 1 B B-2 Orange 6 8 8m B A-2 Yellow 5 COM-A/COM B-3 Green 3 A 10m COM-B/ A-3 Blue 4 B 15m (3

Vacuum System Peripherals:

R L B 01 1 Nil F G Rc 1 8 ... ...

VS7-6

-P VF VFR VP7 VQC SQ VQ Symbol VQ4 VQ5 A port regulation/ARB250-00-A B port regulation/ARB250-00-B VQZ P port regulation VQD VFS VS VS7 A port regulation VQ7 B port regulation 1.19-7 Series VS7-6 Sub-plate Sub-plate: Series VS7-1/VSA7-1 Specifications Applicable solenoid valve/air operated valve Sub-plate size Series ISO size q ISO size q Side piping 1 4 3 8 Piping Bottom piping 0.37kg 1

With Factory Installed

Example) 1NR 20 1/8 25 1/4 Port size 30 3/8 01 1/8 1/2 40 Accessory (optional) 1/4 02 03 3/8 Symbol Description Applicable model 04 1/2 B With bracket AR2001-AR4001 Optional Specifications Combination Table Optional specifications Applicable regulator model Optional specifications Symbol AR3001 1 N R AR 2001 AR2501 AR4001 O.02 ~ O.2MPa [O.2 ~ 2.0kgflcm 21 -1 Non relieving -N IN-OUT reversal

SMC Electronic Switch Series Variations

How to calculate the setting value A = Max. pressure value in auto preset mode B = Tentative min. pressure value in auto preset mode P1 = A(AB)/4 P2 = B+(AB)/4 Example: Full scale reading 100[kPa] Setpoint for output 50[kPa] Repeatability 1[%F.S.] 1[%F.S.] = 100 [kPa] X 0.01 = 1[kPa] Manual adjustment is possible after set point auto preset mode.

VP4

Model Exhaust specifications P A, B Port size E Applicable valve model Series Common Individual Common Individual VP4154-00 VP4254-00 VP4354-00 VP4454-00 1 , 1 1 3 4 1 2 3 4 3 4 , VVP450 3 4 VVP460 Option Blanking plate assembly XT038N-4A With gaskets and bolts 3-6-9 10 Series VP450/470 Dimensions: VVP450/460 Common EXH: VVP450Station 1Port size VVP460Station 1Port size Grommet Conduit terminal

VPA4

EX) Base: 6 stations, common EXH, A & B port Rc 1/2 VVPA450-061-04 1 pc. VPA4154-00 3 pcs. VPA4254-00 2 pcs. XT038N-4A 1 pc.

5 Port Air Operated Valve Series VPA450/470 How to Order 10 VPA4 1 5 0 VP 5 port Thread type Air operated valve Nil Rc Function F VPA4270-14 G N NPT 2 position single pilot 1 T NPTF 2 position double pilot VPA4150-04 2 3 position closed center Port siz

EX) Base: 6 stations, common EXH, A & B port 1/2 VVPA450-061-04 1 pc. VPA4154-00 3 pcs. VPA4254-00 2 pcs. XT038N-4A 1 pc.

Check Valve Series AK 1

M M AKH03-00 AKH07-00 AKH09-00 AKH11-00 AKH13-00 5/32 1/4 5/16 3/8 1/2 3 6 10 17 24 2.8 6.5 14 24 34 9.3 12 15.2 18.5 21.7 33.5 39 53.3 63.6 70.2 12.7 13.6 18.5 21 22 L Metric Size Male connector type: AKH H (Hexagon width across flats) Connection thread R Applicable tubing O.D.

Miniature Fittings M3, R(PT) 1/8, M5 Series M

I.D. 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 KFH04-01 KFH04-02 KFH06-01 KFH06-02 KFH06-03 KFH08U-01 KFH08U-02 KFH08U-03 KFH08N-01 KFH08N-02 KFH08N-03 KFH10U-02 KFH10U-03 KFH10U-04 KFH10N-02 KFH10N-03 KFH10N-04 KFH12U-02 KFH12U-03 KFH12U-04 KFH12N-02 KFH12N-03 KFH12N-04 10 10 15.5 1.5 1.6 13 23 14 25 36 16 25 37 16 24 36 32 40 65 31 39 64

KF

Connection L2 M d A Effective area (mm2) Weight (g) L1 thread R Model 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 KFH04-01 KFH04-02 KFH06-01 KFH06-02 KFH06-03 KFH08U-01 KFH08U-02 KFH08U-03 KFH08N-01 KFH08N-02 KFH08N-03 KFH10U-02 KFH10U-03 KFH10U-04 KFH10N-02 KFH10N-03 KFH10N-04 KFH12U-02 KFH12U-03 KFH12U-04 KFH12N-02 KFH12N-03 KFH12N-04 10 10

How to Order Series ZM Vacuum Ejector With Valve and Switch For details about certified products conforming to international standards, visit us at www.smcworld.com. 1

Supply pressure (MPa) Flow rate (l/min (ANR)) 13-4-7 7 Series ZM Vacuum Pressure Switch/Solid State Switch (ZSE), Diaphragm Switch (ZSM) Vacuum Switch ZSE1-00-15 ZSE1-00-16 ZSE1-00-17 ZSE1-00-18 ZSE1-00-19 ZSM1-015 Diaphragm ZSM1-021 Model ZSE1-00-14 Solid state Electronic circuit 0 to 101 kPa 3% full span or less (Fixed) 1 to 10% of the set pressure (Changeable) 1 to 10% of the set pressure

VZM400

3 EA EA y A A P P r q B EB B !4 EB !7 !1 !2 t Component Parts Aluminum alloy NBR Note No. !0 Description Material No. PBT ADC Material Note q Description Black zinc chromated Metallic plated Pilot body Body Piston guide B Valve Metallic plated !1 !2 w e Return spring Cushion Cushion Valve spring Return spring Piston B Head cover r Stainless steel Spool/sleeve Stainless steel ZDC !

Electric Actuator

B-1 A-1 B-2 A-2 B-3 A-3 Connector C terminal no. Signal Cable color S Standard cable Brown Red Orange Yellow Green Blue A A B B COM-A/COM COM-B/ 2 1 6 5 3 4 Cable color Connector D terminal no.

Electric Actuator/Slider Type

1 !5 A-A t y @2 C B e @1 !0 C B r w C-C B-B !4 !2 Body Table !3 Component Parts No. Description Material Note No.