Type: Speed Controller, Body Material: [Resin] PBT, Control Method: Meter-Out, Format: [Elbows] Cylinder direct-connected elbow type, Environment, Applications: Standard, Thread Portion Material: [303/304 Stainless Steel] Stainless steel 303, Knob Type: Resin, Lock Nut Option: Hexagon Shape Lock Nut, Joint Type: Male thread + One-Touch Couplings, Connection Dia.: 3/8, Option: None, Types

AS: AS, Body Size: 3 (3/8 Basis), Style: 2 (Elbow), Control Method: 0 (Meter-out), Thread: Metric Thread (M5)/R(PT), Port Size: 03 (3/8), Applicable Tube OD: Ø8

Valve; w/Stop Valve), Return Port Size: 03 (3/8), Flow Switch Output Specifications: BT (Out 1: PNP; Out 2: Flow Rate: PNP; Temp.: PNP; Temperature Sensor: Yes), Lead Wire: N (w/o Lead Wire and M8 Connector), Flow Switch Unit Specifications: J (Integrated Display: L/min; Accumulated Flow: L; Temp.: °F)

AS

Note) Inch size Metric size KE 23 01 1 8" 3.2 4 6 8 10 12 5 32" Control type 04 06 08 10 12 03 05 07 09 11 13 3 16" Meter-out Meter-in 0 1 AS-FG 1 4" 5 16" AS-FP 3 8" 1 2" With One-touch fitting AS-FM Note) For applicable tubing O.D. selection, refer to the Model on page 630. Use 1/8" tube.

Body Size: 5 (3/8 Basis), Thread: M5 Metric/10-32UNF/R(PT), Port Size: 03 (3/8), Applicable Tube OD: 08 (Ø8 mm), Sealant: S (Sealant), Lock Nut: J (Round)

AS: AS, Body Size: 3/8 Basis, Style: Elbow, Control Method: Meter-out, Thread: Metric Thread (M5)/R(PT), Port Size: 3/8, Applicable Tube OD: Ø10, Option: Sealant, Lock Nut: Round

AS: AS, Body Size: 3/8 Basis, Style: Elbow, Control Method: Meter-out, Thread: Metric Thread (M5)/R(PT), Port Size: 3/8, Applicable Tube OD: Ø8, Option: Sealant, Lock Nut: Round

AS: AS, Body Size: 3/8 Basis, Style: Elbow, Control Method: Meter-out, Thread: Metric Thread (M5)/R(PT), Port Size: 3/8, Applicable Tube OD: Ø6, Option: None, Lock Nut: Round

AS: AS, Body Size: 3/8 Basis, Style: Elbow, Control Method: Meter-out, Thread: Metric Thread (M5)/R(PT), Port Size: 3/8, Applicable Tube OD: Ø12, Option: Sealant, Lock Nut: Round

AS: AS, Body Size: 3 (3/8 Basis), Style: 2 (Elbow), Control Method: 0 (Meter-out), Thread: Metric Thread (M5)/R(PT), Port Size: 03 (3/8), Applicable Tube OD: Ø10, Option: S (Sealant), Lock Nut: J (Round)

AS: AS, Body Size: 3 (3/8 Basis), Style: 2 (Elbow), Control Method: 0 (Meter-out), Thread: Metric Thread (M5)/R(PT), Port Size: 03 (3/8), Applicable Tube OD: Ø8, Option: S (Sealant), Lock Nut: J (Round)

AS: AS, Body Size: 3 (3/8 Basis), Style: 2 (Elbow), Control Method: 0 (Meter-out), Thread: Metric Thread (M5)/R(PT), Port Size: 03 (3/8), Applicable Tube OD: Ø6, Option: None, Lock Nut: J (Round)

AS: AS, Body Size: 3 (3/8 Basis), Style: 2 (Elbow), Control Method: 0 (Meter-out), Thread: Metric Thread (M5)/R(PT), Port Size: 03 (3/8), Applicable Tube OD: Ø12, Option: S (Sealant), Lock Nut: J (Round)

ZP

J 04 4 06 6 08 8 Model A B C D 2 E F G H J K L M Vacuum inlet direction q Pad dia.

Vacuum Pad

Note 3) ZP3-Y(04/06/08)UM;(J/K)3-@ ZP3-Y(04/06/08)B;(J/K)3-@ ZP3-Y(04/06/08)UM;(J/K)6-@ ZP3-Y(04/06/08)B;(J/K)6-@ ZP3-Y(04/06/08)UM;(J/K)10-@ ZP3-Y(04/06/08)B;(J/K)10-@ ZP3-Y(04/06/08)UM;(JB/K)15-@ ZP3-Y(04/06/08)B;(JB/K)15-@ ZP3-Y(04/06/08)UM;(JB/K)20-@ ZP3-Y(04/06/08)B;(JB/K)20-@ ZP3B-Y2B(J/K)6-B5 ZP3B-Y2B(J/K)10-B5 ZP3B-Y2B(JB/K)15-B5 ZP3B-Y2B(JB/K)20-B5 ZP3-(04/06/08)UM; ZP3-(04/06/08

ZP3

Form w 1 Material e Buffer spec. r Buffer stroke t Vacuum inlet M5 x 0.8 Effective thread depth 4 3 40 22.5 1.2 11 6 46 25 14.5 10 56 29 20.5 04 A J K 3 40 22.5 1.8 11 6 46 25 14.5 10 56 29 20.5 06 08 N S U F GN GS HS 18 11 15 59 42.5 1.2 10 20 66.5 50 06 08 15 59 42.5 1.8 20 66.5 50 04 JB K ZP3 Y UM B5 3 41 23.5 11 6 47 26 14.5 10 57 30 20.5 JB K 15 60 43.5 10 20 67.5 57 J K 4 10 13 16 D

Vacuum Unit

P With manifold common release pressure supply (PD) port Cannot be selected when e is J When J is selected for e, install the release valve or vacuum breaker in the middle of the vacuum piping. u Vacuum (V) port W With exhaust interference prevention valve Exhaust interference prevention valve Symbol Vacuum (V) port 06 6 08 8 07 1/4" 09 5/16" 5 When more than one option is selected, list

ZP

K Y A J K B Y C D Misc.

Series VQ Base Mounted Metal Seal/Rubber Seal

A combination of J and N is unavailable. Indicate R for the valve with external pilot. 8 stations 08 Note 1) Insert L (top piping) or B (bottom piping) for elbow type. (VQ1000 only) Example) B6 (Elbow One-touch fittings for 6, bottom piping.) Indicate LM for models with elbow fittings and mixed cylinder port sizes.

CA2

(Example) CDA2WL40-100 Nil J K Nil JJ KK Nil N Cylinder stroke (mm) For more information, please refer to the next page.