Body Size: 20, Back Flow: w/o Backflow, Thread: Rc, Port Size: 01 (1/8), Options: H (w/Set Nut; for Panel Mount), Set Pressure: 0.05 to 0.85 MPa Setting, Bowl: Polycarbonate Bowl, Bowl Guard: C (w/Bowl Guard), Drain Port: w/Drain Cock, Exhaust Mechanism: Relieving Type, Flow Direction: R (Flow Direction: Right to Left), Drain Cock w/Barb Fitting: None, Pressure Units: Product: MPa, °C; Pressure

Body Size: 20, Back Flow: w/o Backflow, Thread: Rc, Port Size: 1/8, Options: w/o Mounting Option, Set Pressure: 0.05 to 0.85 MPa Setting, Bowl: Polycarbonate Bowl, Bowl Guard: w/Bowl Guard, Drain Port: w/Drain Cock, Exhaust Mechanism: Relieving Type, Flow Direction: Flow Direction: Right to Left, Drain Cock w/Barb Fitting: None, Pressure Units: Product: MPa, °C; Pressure Gauge: MPa, Made

Body Size: 20, Back Flow: w/o Backflow, Thread: Rc, Port Size: 1/8, Options: w/Set Nut; for Panel Mount, Set Pressure: 0.05 to 0.85 MPa Setting, Bowl: Polycarbonate Bowl, Bowl Guard: w/Bowl Guard, Drain Port: w/Drain Cock, Exhaust Mechanism: Relieving Type, Flow Direction: Flow Direction: Right to Left, Drain Cock w/Barb Fitting: None, Pressure Units: Product: MPa, °C; Pressure Gauge: MPa

Body Size: 20, Back Flow: w/o Backflow, Thread: Rc, Port Size: 1/8, Options: G+H, Set Pressure: 0.05 to 0.85 MPa Setting, Bowl: Polycarbonate Bowl, Bowl Guard: w/Bowl Guard, Drain Port: w/Drain Cock, Exhaust Mechanism: Relieving Type, Flow Direction: Flow Direction: Right to Left, Drain Cock w/Barb Fitting: None, Pressure Units: Product: MPa, °C; Pressure Gauge: MPa, Made to Order: 0.4 MPa

Body Size: 20, Back Flow: w/o Backflow, Thread: Rc, Port Size: 01 (1/8), Options: GH (G+H), Set Pressure: 0.05 to 0.85 MPa Setting, Bowl: Polycarbonate Bowl, Bowl Guard: C (w/Bowl Guard), Drain Port: w/Drain Cock, Exhaust Mechanism: Relieving Type, Flow Direction: R (Flow Direction: Right to Left), Drain Cock w/Barb Fitting: None, Pressure Units: Product: MPa, °C; Pressure Gauge: MPa, Made

Electric Actuators

B 89 A A B Section BB Coupling P.C.D.

Table of Contents

B 89 A A B Section BB Coupling P.C.D.

Electric Actuator with Integrated Guide

(B contact) 3 wire GXL-N12FTB Switch specifications (SUNX Corporation) GXL-N12FT(B) Part no.

Title not found

Shield 12 13 7 6 9 8 3 B-4 A-4 B-5 A-5 B-6 A-6 Brown Black Red Black Orange Black Vcc GND A A B B Connector B terminal no.

High Vacuum Angle Valve

Inrush Current Flow Time (Reference) 200 V Current 100 V 0 5 15 10 20 25 30 Time [Second] 2 Mounting position of the heater Heater symbol XL-25-2 XL-40-2 XL-50-2 XL-63-2 XL-80-2 H4 (100C) (a) (a) (b), (c) (a), (b), (c) H5 (120C) (a) (b), (c) (b), (c) (a), (b), (c) (b), (c) (b) (a) (c) Heater (Option) 17 Aluminum High Vacuum Angle Valve: With Heat-resistant Auto Switch XLm Series Made to

LEC-OM07605CN

b . A b . A b . A 1 2 3 1 b012 Ab. 0 1 b b . A b .

VM

Description VH300 244120 244120-1 VH400 244219 244219-1 VH600 Resin e Slide ring 24408-1 24077 JIS B 2401 P5 JIS B 2401 P42 24403 24416-3 240359 JIS B 2401 P10 JIS B 2401 G55 24413 2407102A (2407114A) 24425-6 240359 JIS B 2401 P10 JIS B 2401 P71 24413 2407102A (2407114A) 240417 24047 JIS B 2401 P15 JIS B 2401 G120 r t y u i Slide ring spring Check ball spring O-ring O-ring Handle head Piano

RZQ

stroke of 25 mm or less RZQ MI W S B A CEP1 CE1 CE2 [mm] Proper Mounting Position D-A7H,A80H D-A73C,A80C D-F7,J79,J79W D-F7V,J79C D-F7W,F7WV D-F7BAL,F7BAVL D-F79F ML2B D-M9 D-M9V D-F9W D-F9WV D-A79W D-A9 D-A9V C J G5-S D-A7,A80 D-F9BAL D-P5DWL Bore size (mm) CV B A B A B A B A B A B A B A MVGQ 32 27 37.5 27.5 38 24.5 35 26 36.5 30 40.5 29 39.5 40 CC 27 39 31 43 31.5 43.5 28.5 40.5 30 42

3 Position Cylinder Series RZQ

stroke 50 or larger bore size D-P5DW 40, 50, 63 B + First-stage stroke =U =U Mounted on different side in case of a full stroke of 25 mm or less B A [mm] Proper mounting position D-A7H,A80H D-A73C,A80C D-F7,J79,J79W D-F7V,J79C D-F7W,F7WV D-F7BAL,F7BAVL D-F79F D-F9 D-F9V D-F9W D-F9WV D-A79W D-F7LF D-A9 D-A9V D-F9BAL D-P5DWL D-A7,A80 Bore size (mm) A B A B A B A B A B A B A B A B 32 29 39.5

C95

A B A B A B A B A B A B MB1 32 0 10.5 1.5 14 9.5 22 4.5 17 2 14.5 0 10.5 1 13.5 40 0 21.5 1.5 25 9.5 33 4.5 28 2 25.5 0 21.5 1 24.5 CA2 50 0 23 2 26.5 10 34.5 5 29.5 2.5 27 0 23 1.5 26 63 0 28 2 31.5 10 39.5 5 34.5 2.5 32 0 28 1.5 31 CS1 80 2.5 28 6 21.5 14 29.5 9 24.5 6.5 22 2.5 28 5.5 31 100 2.5 28 6 31.5 14 39.5 9 34.5 6.5 32 2.2 28 5.5 31 C76 C85 Auto Switch Mounting Height C95 D-F5,

Sine Rodless Cylinder Series REBR Direct Mount Type

-LD Piping port P Operating direction A 7 Piping port P Operating direction B W K G With switch rail Q + Stroke Z + Stroke Piping port P (plug) Operating direction B HS CR HR Plug 22 8 Piping port P Operating direction B Piping port P (plug) Operating direction B 8 Piping port P Operating direction A 16 19.5 16 Plug REBR15 REBR15 (mm) A B C CB CR D F G GP GW H HA HB HC HP HR HS HT Model REBR15

KR

button Body O-ring Seal Stud Port B Port B Port B Port B Seal Guide Chuck Guide Chuck Collet Collet Port A Release button Port A 15-3-6 2 FR One-touch Fittings Manifold Series KRM Dimensions: KRM11 2-FB Applicable tubing O.D.

AC Servo Motor Driver (Pulse input type)

Recommended Parameter Values [LEF] LEFS25 LEFS32 LEFS40 Series Lead symbol H A B H A B H A B Lead 20 12 6 24 16 8 30 20 10 Parameter *1,*2 Para. Initial value Recommended value No.

MLU

Allowable Kinetic Energy Extension locking direction Retraction locking direction 100 100 50 50 Load weight kg Load weight kg 10 10 50 W 50 5 5 40 40 B 32 32 0.5MPa 0.4MPa 0.5MPa 0.4MPa A A 25 25 1 1 100 500 100 500 B W Maximum speed mm/s Maximum speed mm/s B: Retraction locking direction F: Extension locking direction 9-13-4 4 Series MLU Specific Product Precautions 2 Be sure to read before

Compact Electric Actuator Series LG1

Description Body cover Bearing cap Damper End cover A End cover B Photomicrosensor Sensor plate Connector A Connector B No.